应用于扫描干涉光刻系统的光束自动对齐系统设计

发布时间：2018-03-08 07:29

本文选题：扫描干涉光刻　切入点：光束自动对齐　出处：《电子科技大学》2015年硕士论文　论文类型：学位论文

【摘要】：扫描干涉光刻技术作为一项现代大面积高精度光栅制造的主流技术,兼具创新性和高效性,不论是制造精度还是制造效率均处于光栅制造技术的前列。光束自动对齐系统作为扫描干涉光刻的子系统,通过保证干涉光束在基底平面光斑重合、干涉光束与法线之间夹角相同,来减小干涉条纹的非线性。本文以光束自动对齐系统为研究课题,对自动对齐系统设计、自动对齐系统各个模块设计、自动对齐系统控制算法以及自动对齐系统对齐精度等进行了一定的研究。首先,以国内外光束对齐、光束校准调研为基础,提出光路短适用于扫描干涉光刻系统的自动对齐系统方案。本文所提自动对齐系统方案巧妙利用透射光栅作为分光器件,利用其0级衍射光和+1级衍射光作为测量光束,位置敏感探测器(PSD)作为测量器件,电动镜座为执行器件,设计了光路短、几何尺寸小、易于集成的新型自动对齐系统。其次,根据系统设计方案,对系统各个模块性能需求进行分析,设计各个模块。分析透射光栅的需求,进行理论衍射效率仿真与实际实验结果的对比;PSD性能参数的分析与实验,包括PSD工作区域大小、位置分辨率、绝对测量精度、PSD数字化噪声、工作时温度变化以及振动对PSD采样的影响;对所用光源性能进行了要求分析,对系统执行器件电动镜座进行了性能方面的测试。本部分创新点在于提出了适用于PSD分辨率与测量精度的测试方案与标定方案。然后,根据前文方案设计与系统模块设计的基础,提出适用于本新型光束自动对齐系统的对齐方案。文章中沿用传统的迭代对齐算法,提出利用上次调整结束的实测值作为下次迭代的初始值,提高自动对齐系统的迭代对齐精度,减小x方向与y方向调节耦合带来的误差。最后,根据前文对自动对齐系统方案、系统模块设计、自动对齐算法等的研究,制定实验方案,验证本文所提的自动对齐系统(位置和角度对齐精度)满足扫描干涉光刻对于自动对齐子系统的对齐要求。
[Abstract]:Scanning interference lithography, as a mainstream technology in modern large area and high precision grating manufacturing, is both innovative and efficient. Both manufacturing accuracy and manufacturing efficiency are at the forefront of grating fabrication technology. The beam alignment system is used as the subsystem of scanning interference lithography by ensuring the coincidence of interference beams in the substrate plane. In order to reduce the nonlinearity of interference fringes, the angle between interference beam and normal line is the same. In this paper, the automatic alignment system is designed, and each module of automatic alignment system is designed. The control algorithm of automatic alignment system and the alignment accuracy of automatic alignment system are studied. Firstly, based on the research of beam alignment and beam calibration at home and abroad, A scheme of automatic alignment system for scanning interference lithography system is proposed, in which the transmission grating is used as the light splitter, and the 0-order diffraction light and the 1-order diffraction light are used as the measuring beams. The position sensitive detector (PSD) is used as the measuring device, and the electric mirror seat is the actuator. A new type of automatic alignment system with short optical path, small geometry size and easy integration is designed. Secondly, according to the design scheme of the system, a new type of automatic alignment system is designed. The performance requirements of each module of the system are analyzed, and each module is designed. The requirements of transmission grating are analyzed, and the theoretical diffraction efficiency simulation is compared with the actual experimental results. The performance parameters of PSD are analyzed and experimented, including the size of the PSD working area. Position resolution, absolute measurement accuracy, digital noise, temperature change and vibration effect on PSD sampling are analyzed, and the performance of the light source used is analyzed. The performance of the electric mirror pedestal of the executive device of the system is tested. The innovation of this part is to put forward the test scheme and calibration scheme suitable for the resolution and measurement accuracy of the PSD. According to the basis of the previous scheme design and system module design, a new alignment scheme is proposed for the new beam automatic alignment system. In this paper, the traditional iterative alignment algorithm is used. In order to improve the accuracy of the iterative alignment of the automatic alignment system and reduce the error caused by the coupling between the x and y directions, it is proposed to use the measured values at the end of the last adjustment as the initial value of the next iteration. Finally, according to the scheme of the automatic alignment system, The system module design, automatic alignment algorithm and so on are studied, and the experimental scheme is established to verify that the automatic alignment system (position and angle alignment accuracy) proposed in this paper meets the requirements of scanning interference lithography for automatic alignment subsystem.
【学位授予单位】：电子科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN305.7

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