芯片级电调红外波谱成像探测技术研究

发布时间：2018-03-13 11:41

本文选题：液晶电光特征　切入点：谱滤光建模与仿真　出处：《华中科技大学》2015年硕士论文　论文类型：学位论文

【摘要】：谱成像探测是一种结合了图像获取技术以及光学滤波技术的高性能图像信息获取手段。基于谱图像信息,既能得到目标的常规图像,又能获得目标的结构和材质特征。近些年来,谱成像探测技术在军事和民用领域显示出广阔的应用前景和巨大的商业价值,受到广泛关注和重视。本文开展了芯片级电调红外谱成像探测方法和关键技术研究,设计和制作了基于液晶(Liquid crystal,LC)法布里-珀罗(Fabry-Perot,FP)多波束干涉的电调中长波红外滤波芯片。该谱芯片(LC-FP)可直接置于成像光路中或与光敏阵列集成,执行基于图像信息处理或先验知识干预下的电调红外成像波谱的成像探测操作。所发展的LC-FP芯片具有尺寸小、轻质、功耗低、结构稳定性高、环境适应能力强、填充系数或光能利用率高、成本低、谱响应灵活等特点。本论文主要工作和创新点如下:分别构建了基于硒化锌纳米铝膜电极、以及硅纳米金膜电极的红外中长波电调LC-FP芯片架构;利用向列液晶材料的连续弹性体理论以及有限差分算法,仿真了多电压信号条件下的向列液晶分子的偏转特征,计算了层化液晶材料的等效折射率及其空间分布属性;利用传输矩阵算法模拟了所构建的LC-FP架构在中长波红外波段的谱透射特性;通过结构和参数优化,确定了膜系配置以及液晶微腔结构尺寸等关键性参数。综合所匹配的红外成像光敏阵列特征及有效封装要求,规划了芯片形貌结构指标,基于标准微电子工艺完成了谱单片以及可区块化(4×4)谱寻址的LC-FP芯片架构的设计、制作、测评及封装。通过比较和分析所开展的宽谱域红外干涉滤波测试结果,引入经验工艺参数α和β,对多种LC-FP芯片的工艺流程进行了优化和再设计;基于所发展的谱单片和谱寻址LC-FP芯片,针对典型目标开展了电调红外成像波谱的谱成像探测测试,比较和分析了谱图像特征并规划了技术的进一步发展路线图。
[Abstract]:Spectral imaging detection is a kind of high performance image information acquisition method which combines image acquisition technology and optical filtering technology. Based on spectral image information, the conventional image of target can be obtained. In recent years, spectral imaging detection technology has shown wide application prospects and great commercial value in military and civilian fields. In this paper, the detection methods and key technologies of chip level electrically modulated infrared spectroscopy imaging are studied. An electrically modulated medium and long wave infrared filter chip based on liquid crystal liquid crystal LCFabry-Perot Fabry-Perot interference (Fabry-Perot) multibeam interference is designed and fabricated. The chip can be directly placed in an imaging optical path or integrated with Guang Min array. The developed LC-FP chip is small in size, light in weight, low in power consumption, high in structure stability and strong in environmental adaptability. The filling coefficient or light energy utilization ratio is high, the cost is low, the spectrum response is flexible and so on. The main work and innovation of this paper are as follows: the nanocrystalline aluminum film electrode based on zinc selenide was constructed, Using the theory of continuous elastomer of nematic liquid crystal materials and finite difference algorithm, the deflection characteristics of nematic liquid crystal molecules under multi-voltage signals are simulated. The equivalent refractive index of laminated liquid crystal material and its spatial distribution properties are calculated, and the spectral transmission characteristics of the constructed LC-FP structure in the medium and long wavelength infrared band are simulated by using the transfer matrix algorithm, and the structure and parameters are optimized. The key parameters, such as the configuration of the film system and the structure size of the liquid crystal microcavity, were determined, and the chip morphology and structure indexes were planned according to the matching characteristics of the infrared imaging Guang Min array and the effective packaging requirements. Based on the standard microelectronic process, the design, fabrication, evaluation and encapsulation of the LC-FP chip architecture with spectral monolithic and 4 脳 4 block spectrum addressing are completed. The results of the wide-spectrum infrared interference filtering test are compared and analyzed. The process flow of various LC-FP chips is optimized and redesigned by introducing the empirical process parameters 伪 and 尾. Based on the developed spectral monolithic and spectral addressing LC-FP chips, the spectral imaging detection tests for typical targets are carried out for typical targets. The spectral image features are compared and analyzed, and the roadmap for further development of the technology is planned.
【学位授予单位】：华中科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：O434.3;TP391.41

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