中芯国际成都封装测试厂设备综合效率系统的设计与实现

发布时间：2018-03-14 10:33

本文选题：设备综合效率　切入点：设备效率　出处：《电子科技大学》2016年硕士论文　论文类型：学位论文

【摘要】：半导体制造技术在不断变化,产品的多样性,在工序的复杂度越来越高的状态下,对设备的高精度化,设备的自动化程度也越来越高,而半导体制造业的设备价格也日益昂贵起来。其更新与维护占企业投资成本的最大比重,因此,挖掘出设备的最高利用率使其发挥其全部的生产能力为公司创造最大利润是企业高管们都在思考的一个问题,也是企业决定芯片制造成本的重要因素之一。本文所研究的内容是当前CIM系统中生产设备效能跟踪系统OEE(Owerall Equipment Efficiency)系统,它是与半导体制造设备联系得最为密切的应用程序。它通过与机台连接的SECS(SEMI Equipment Communication Standard)通信协议取得以机台的连接,从而达到自动收集设备生产运行数据用于设备效能计算,OEE系统将作为最底层的接口来实现CIM系统与设备效能管理系统的连接,并将数据以特定的格式写入日志文件中。利用后台脚本程序进行数据库连接与操作,日志文本的获取与解析,通过公司网络获取各个OEE客户端的日志文件,并运用OEE的后台程序以相同的方法进行读取,解析出所需的数据并把这些数据存入数据库,再利用数据库处理语言PL/SQL对数据进行分析,并把每种类型的设备数据进行汇总。从而计算机出切实有效的产能效率数据,使管理者清楚的知道当前的设备效率信息。更进一步,OEE系统不仅仅看到生产设备的运行效率信息,根据设备具体的各种操作运行的时间的统计,分析影响企业设备损失效率的关键因素。从而为企业提高生产力,减少浪费,节约成本提供有力的数据依据,也为企业的管理者的决策提供强有力的数据依据。本文先回顾了半导体企业的发展历程,芯片制造业的演变,以及相应的辅助制造系统的发展历史。计算机集成制造系统在半导体制造业中的作用以及挑战,从而提出了OEE系统的需求,并对此需求做出了全面的分析。并最终归划了OEE系统的功能模块以及框架结构,并最终实现到公司的实际应用中来。
[Abstract]:Semiconductor manufacturing technology is changing, product diversity, complexity in the process more and more high under the condition of high precision equipment, automation equipment are increasingly high, and semiconductor manufacturing equipment price is also becoming more expensive. The updating and maintenance accounted for the largest proportion of enterprise investment cost therefore, to dig out the highest utilization rate of equipment to enable it to play all of its capacity for the company to create the largest profit is the corporate executives who are thinking about a problem, enterprise decision is one of the important factors of chip manufacturing cost. This paper studies the content of the current CIM system in the production efficiency of equipment tracking system OEE (Owerall Equipment Efficiency) system, it is with the semiconductor manufacturing equipment contact most applications. It is closely connected with the SECS (SEMI Equipment Communication Standard) communication protocol. In order to obtain on the machine connection, so as to achieve automatic collection equipment production operation data for equipment efficiency calculation, OEE system will be used as the bottom of the interface to achieve the connection of CIM system and the efficiency of equipment management system, and writes the data in a specified format in the log file. Use the background script for the database connection and operation, access with the analysis of log text, access to all OEE clients through the company network log files, and use the OEE Daemon in the same way to read, parse out the required data and the data stored in the database, and then use the database language PL/SQL to analyze the data, and the data of each type of equipment are summarized computer capacity. Thus the efficiency of data effectively, make the managers know the information of current equipment efficiency. Further more, the OEE system not only see The information efficiency of production equipment, according to the statistics of all kinds of operation equipment specific time, analysed the key factors affecting the efficiency of the enterprise. The loss of equipment to reduce waste to improve productivity, and provide powerful data for cost savings, but also for the enterprise management decision provides strong data basis. This article first reviews the development of semiconductor industry, the evolution of chip manufacturing, as well as the corresponding aided manufacturing system development history. Computer integrated manufacturing system in the semiconductor manufacturing industry in the role and challenges, and puts forward the requirements of OEE system, and the need to make a comprehensive analysis. And finally divided the function module of OEE system and the frame structure, and ultimately to the actual application in the past.

【学位授予单位】：电子科技大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TN305

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