基于远场光学的高分辨率激光探针系统研究

发布时间：2018-03-17 02:17

本文选题：远场激光探针　切入点：分辨率　出处：《红外与激光工程》2017年10期 　论文类型：期刊论文

【摘要】：鉴于激光探针分辨率低的问题,提出基于远场光学技术对激光探针仪的光学系统进行改进和设计,实现了高分辨率激光探针仪的研制。研究了基于远场光学的激光探针仪的极限分辨率,采用数值孔径为0.4的反射式聚焦物镜对波长为532 nm的脉冲激光束进行聚焦,在合适能量条件下,烧蚀Al和Fe纯样表面获得的极限分辨率分别为2.26μm和1.87μm,在此极限分辨率下利用同轴光谱采集系统且能够采集到3倍于背景噪声强度的Al和Fe元素的光谱信号;设计并实现了带同轴照明的同轴共焦成像系统,视场放大率达24.7倍,采用的同轴照明系统能够有效提高摄取图像的锐度和清晰度,获得的图像分辨率不低于228 lines/mm;发明了一种带指示光的同轴光谱采集系统,能够将同轴光谱采集器与等离子体的对准误差控制在10μm以内,通过二维扫描装置,实现对等离子体表面7×9的矩形点阵列进行精确光谱采集,获得了等离子体原子光谱强度的空间分辨图像。
[Abstract]:In view of the problem of low resolution of laser probe, put forward the improvement and design of optical system of laser far field optical probe was developed based on the high resolution laser probe. The far-field laser probe for optical limiting resolution based on the numerical aperture of the focusing lens of 0.4 reflective wavelength pulsed laser the beam of 532 nm were focused on the appropriate energy conditions, the resolution limit and Fe ablation of Al pure surface were 2.26 m and 1.87 m, the limit of resolution by using coaxial spectrum acquisition system and the spectral signal can be collected 3 times the background noise intensity Al and Fe elements; design and the realization of the coaxial confocal imaging system with coaxial illumination, field amplification rate of 24.7 times, the coaxial lighting system can effectively improve the image sharpness and clarity, the image resolution The rate of not less than 228 lines/mm; the invention of a coaxial spectrum acquisition system with indicator light, can be controlled within the alignment error of 10 m coaxial collector and plasma spectra, the two-dimensional scanning device, achieve precise spectral acquisition of plasma surface 7 x 9 point rectangular array, the plasma atomic spectral intensity the spatial resolution of image.

【作者单位】： 92941部队91分队;
【基金】：国家重大科学仪器设备开发专项(2011YQ160017)
【分类号】：TN24

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