基于柔性铰链的并联机构性能研究与优化设计

发布时间：2018-03-18 18:26

本文选题：并联机构　切入点：柔性铰链　出处：《浙江大学》2015年硕士论文　论文类型：学位论文

【摘要】：在精密位姿调节装置需求日益迫切的今天,随着并联机构技术和微位移技术的进步,精密位姿调节并联机构成为了精密位姿调节装置的重要研究方向。在浸没式光刻机中,需要一种微米级的三自由度精密位姿调节装置对浸没单元位姿进行调节,本文研究的基于柔性铰链的并联机构就是这样一种精密调节装置。本文研究内容包括4方面：1)对3.PSR-V并联机构进行了运动学建模,给出了其运动学正逆解的详细推导过程。特别地,提出了已知z、y、β的运动学逆解求解方法,为一些特殊测量方式的控制提供了逆解方法,并仿真验证了各运动学模型的正确性。2)基于伪刚体模型,建立起直圆型柔性铰链的刚度和精度模型；提出了柔性铰链的评价标准并建立相应的数学模型；提出了转动副并联柔性铰链结构,并建立了相应刚度模型,显著提高了柔性铰链纵向刚度和扭转刚度；仿真分析验证了柔性铰链刚度模型的正确性。3)面向应用,对直圆型柔性铰链、并联柔性铰链及并联机构的其他运动副进行了优化设计,并对基于柔性铰链的并联机构的各尺寸进行了优化配置；对动平台和基于柔性铰链的并联机构的测试表明并联机构具有优秀的刚度性能和动态性能。4)对基于柔性铰链的并联机构进行后处理。在误差分析的基础上,利用矢量法建立起基于柔性铰链的并联机构的误差模型；设计参数识别策略成功的将多目标优化问题转变成单目标优化问题；提出带变异的粒子群算法,并结合参数识别策略和误差模型对基于柔性铰链的并联机构进行参数识别；精度性能测试显示基于柔性铰链的并联机构开环重复定位精度(z,α,β)分别达到了(-0.5～1.0um, ±0.01rad,±0.03mard),证明基于柔性铰链的并联机构是一种微米级的精密位姿调节并联机构,满足浸没式光刻中浸没单元的位姿调节要求。
[Abstract]:With the development of parallel mechanism technology and micro-displacement technology, precision position and attitude adjusting parallel mechanism has become an important research direction of precision position and attitude adjusting device. A three degree-of-freedom precise position and attitude adjusting device with micron size is needed to adjust the position and attitude of the immersion unit. The parallel mechanism based on flexure hinge in this paper is such a kind of precision adjusting device. In this paper, the kinematics modeling of 3.PSR-V parallel mechanism is carried out, which includes four aspects: 1. In this paper, the detailed derivation process of the kinematics inverse solution is given. In particular, a method for solving the kinematics inverse solution of known zky, 尾 is presented, which provides an inverse solution method for the control of some special measurement methods. Based on the pseudo-rigid body model, the stiffness and precision model of the straight circular flexure hinge is established, and the evaluation standard of the flexure hinge is put forward and the corresponding mathematical model is established. The parallel flexure hinge structure of rotating pair is proposed, and the corresponding stiffness model is established, which improves the longitudinal and torsional stiffness of the flexure hinge significantly, and the simulation results verify the correctness of the flexure hinge stiffness model. This paper optimizes the design of straight circular flexure hinge, parallel flexure hinge and other kinematic pairs of parallel mechanism, and optimizes the configuration of each dimension of parallel mechanism based on flexure hinge. The test of the moving platform and the parallel mechanism based on the flexure hinge shows that the parallel mechanism has excellent stiffness performance and dynamic performance. 4) the post-processing of the parallel mechanism based on the flexure hinge is carried out. The error model of the parallel mechanism based on flexure hinge is established by using vector method; the multi-objective optimization problem is successfully transformed into a single-objective optimization problem by designing parameter identification strategy; the particle swarm optimization algorithm with mutation is proposed. The parameter identification strategy and error model are used to identify the parameters of the parallel mechanism based on flexure hinge. The precision performance test shows that the open-loop repeat positioning accuracy of the parallel mechanism based on flexure hinge is up to -0.5um, 卤0.01rad, 卤0.03mardn, respectively. It is proved that the parallel mechanism based on flexure hinge is a micrometer precision position-attitude adjusting parallel mechanism. It meets the requirements of position and pose adjustment of immersion units in immersion lithography.
【学位授予单位】：浙江大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN305.7

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