激光透射成像法测量石英管的外径与壁厚

发布时间：2018-03-19 12:09

本文选题：半导体激光　切入点：透射成像　出处：《光学技术》2017年06期 　论文类型：期刊论文

【摘要】：为了同时同位测量石英管的外径和壁厚,建立了激光透射成像系统,对系统测量原理进行研究。基于几何光学和菲涅尔公式,分别导出平行光垂直照射石英管后的透射光线偏向角、相对光强与入射光线离轴距离之间的关系;通过数值计算,分析了偏向角、相对透射光强随入射光线离轴距离的变化特点;针对物方远心光路,分析了光阑对偏向角和相对光强的限制;基于CCD成像原理,通过引入标定系数和补偿因子,导出石英管外径与壁厚的计算公式。实验结果表明:外径绝对误差和相对误差的平均值分别为0.119mm和0.91%,壁厚绝对误差和相对误差的平均值分别为0.153mm和6%。
[Abstract]:In order to simultaneously measure the external diameter and wall thickness of quartz tube at the same time, a laser transmission imaging system is established. The measurement principle of the system is studied. Based on geometric optics and Fresnel formula, The relationship between the relative light intensity and the distance from the axis of the incident light is derived, and the angle of deviation is analyzed by numerical calculation. The characteristics of the relative transmission intensity with the distance from the axis of the incident light, the limitation of the aperture deflection angle and the relative light intensity on the far-centered optical path are analyzed. Based on the principle of CCD imaging, the calibration coefficient and compensation factor are introduced. The formulas for calculating the outer diameter and wall thickness of quartz tube are derived. The experimental results show that the average values of absolute error and relative error of outer diameter are 0.119mm and 0.91mm respectively, and the average values of absolute error and relative error of wall thickness are 0.153mm and 6mm respectively.
【作者单位】：燕山大学理学院;燕山大学里仁学院;
【基金】：国家自然科学基金(11504320)
【分类号】：TN249;TP391.41

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