飞秒激光光刻波导的实验研究

发布时间：2018-03-25 12:45

本文选题：飞秒光刻　切入点：光波导　出处：《中国科学院研究生院(西安光学精密机械研究所)》2015年硕士论文

【摘要】：飞秒光刻波导技术是近十年才发展起来的一种新型光波导写入技术,相对于离子交换、离子注入以及化学气相沉积等传统的波导制作技术,飞秒光刻波导技术具有简单、灵活、高效等特点,还具备制作三维光子器件的独特能力。飞秒光刻波导技术开辟了天文光子学这一崭新的领域,能够制作光子灯笼、三维滤光器、三维耦合器等光子芯片,在制作高密度的集成光子器件方面具有重大的应用前景。本论文的主要工作包括以下几个方面:1.研究了钛蓝宝石激光晶体中飞秒光刻波导的技术和性能,采用狭缝整形技术通过横向刻写方式,利用重复频率为1 k Hz,脉宽为120 fs的脉冲激光在钛蓝宝石晶体中分步刻写双线型光波导。详细地研究了飞秒脉冲激光在晶体中写入深度、刻写速度以及波导双线间距对波导导光情况的影响,最终得到了一组导光模式较优的双线波导(脉冲能量2μJ,写入深度175μm,刻写速度90μm/s,双线间距26μm)。由于在写入过程中伴随着纳米条纹的产生,波导具有偏振导光特性,采用散射法测得波导的传输损耗为1.82 d B/cm。利用有限差分法,根据波导的近场模式强度分布反推了波导的折射率分布图,得到其最大的折射率增量为1.9×10-4。2.利用重复频率为1 k Hz,脉冲宽度为120 fs的近红外飞秒脉冲激光,用狭缝整形技术通过横向刻写的方式,首次在掺Er3+氟碲酸盐玻璃中分别刻写了I类和压低圆包层波导。利用有限差分法,根据波导的近场模式强度分布分别反推了I类和压低圆包层波导的折射率分布图,其最大的折射率增加量分别为1×10-4和1.9×10-4。采用散射法测得I类光波导的传输损耗为1.04 d B/cm;通过测量插损得到压低圆包层波导的传输损耗小于1.88 d B/cm。实验中分别对比了两类波导导光区域和玻璃材料基质的荧光光谱图,发现激光作用前后玻璃的荧光特性保持良好。
[Abstract]:Femtosecond photolithographic waveguide technology is a new type of optical waveguide writing technology developed in recent ten years. Compared with traditional waveguide fabrication techniques such as ion exchange, ion implantation and chemical vapor deposition, femtosecond photolithography is simple and flexible. The technology of femtosecond photolithography has opened up a new field of astronomical photonics, capable of making photonic chips such as photonic lanterns, three-dimensional filters, three-dimensional couplers, etc. The main work of this thesis includes the following aspects: 1. The technology and performance of femtosecond photolithographic waveguides in Ti sapphire laser crystals are studied. By means of slit shaping technique, a two-line optical waveguide is written in a Ti sapphire crystal with a repetition rate of 1 kHz and pulse width of 120 fs. The writing depth of femtosecond pulse laser in the crystal is studied in detail. The influence of the writing speed and the distance between the two lines of the waveguide on the light guide of the waveguide, Finally, a group of two-wire waveguides (pulse energy 2 渭 J, write depth 175 渭 m, write speed 90 渭 m / s, and distance between two lines 26 渭 m) are obtained. Due to the formation of nanoscale stripes in the writing process, the waveguide has the characteristics of polarization and light conduction. The propagation loss of the waveguide is 1.82 dB / cm ~ (-1) measured by the scattering method. The refractive index profile of the waveguide is derived from the near mode intensity distribution of the waveguide by using the finite difference method. The maximum refractive index increment is 1.9 脳 10 ~ (-2). Using near-infrared femtosecond laser with repetition rate of 1 kHz and pulse width of 120 fs, slit shaping technique is used to describe the laser transversely. For the first time, type I and low-pressure circular cladding waveguides have been written in Er3 doped fluoride-tellurite glasses for the first time. By using the finite difference method, the refractive index profiles of type I and low-pressure circular cladding waveguides have been inversely deduced according to the near mode intensity distribution of the waveguides, respectively. The maximum refractive index increases are 1 脳 10 ~ (-4) and 1.9 脳 10 ~ (-4), respectively. The transmission loss of type I optical waveguide is 1.04 dB / cm by scattering method, and the propagation loss of low-pressure circular cladding waveguide is less than 1.88 dB / cm by measuring insertion loss. Fluorescence Spectra of two kinds of waveguide guiding regions and Glass Matrix, It was found that the fluorescence characteristics of the glass remained good before and after laser irradiation.
【学位授予单位】：中国科学院研究生院(西安光学精密机械研究所)
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN252

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