激光转印法超材料太赫兹器件的制备技术研究

发布时间：2018-03-30 17:44

本文选题：激光转印技术　切入点：太赫兹超材料　出处：《中国计量学院》2015年硕士论文

【摘要】：超材料是一种基于表面有序微纳米结构的人工材料,通过合理地设计金属结构,可以实现多种自然界材料中不具备的崭新而特殊的电磁传播特性,如负折射效应、超透镜、电磁隐身、高频磁响应等。目前大多数太赫兹超材料微结构器件都采用传统的光刻技术来制备,但是光刻技术制备成本较高、周期长、步骤复杂。因此,寻求一种低成本、高效率、步骤简单且性能优越的方法制备微结构器件引起了广泛关注。激光转印技术是一项基于纳米金属悬浮液(纳米银浆)激光诱导转移的新兴激光直写技术。它通过计算机编制超材料谐振单元结构图形到空间光调制器,经显微物镜成像,照射在涂布有纳米银浆的基底材料上,利用激光脉冲的能量轰击使被激光光斑照亮的区域银层脱落,在敷银基片或接收衬底上形成微结构器件。该技术在发展、定制、修改和修复微电子电路、制备超材料微结构器件等方面具有很大的潜力。我们在国内首次研究并利用激光转印技术成功制备了太赫兹超材料微结构器件。本文的研究工作主要包括:(1)对激光转印技术进行了系统的研究,包括系统的光路搭建及优化、超材料器件加工程序设计,样品制备流程、工艺因素影响及工艺优化等。目前,我们利用激光转印技术已实现了在石英晶片上制备正结构和互补结构的超材料微结构器件。对于互补结构器件,器件结构部分被激光光斑照亮脱落;而对于正结构器件,大面积的银层被光斑照亮而脱落,在敷银基片上留下未被曝光的器件结构部分。受能量密度的限制,目前制备的正结构器件周期最大为100μm,互补结构器件则没有这个限制。制备的器件结构最小线宽为4μm,银层厚度在100 nm~500 nm范围内可调,并且呈现出良好的厚度均匀性、清晰的边缘特征、较少的纳米银颗粒残留等。(2)利用激光转印技术在厚度为200μm的石英晶片上制备了一种双开口环桥式结构和其互补结构的太赫兹超材料谐振器。利用台阶仪和THz-TDS系统对其性能进行了测试,测试结果显示制备的微结构器件共振单元具有良好的重复性,透射谱结果与模拟仿真分析结果基本吻合,可以用来制备超材料太赫兹器件。(3)研究了一种互补双开口环太赫兹滤波器,该滤波器在0.2-1.4 THz范围内有三个谐振峰,可以通过调节内环和外环的结构尺寸灵活选择谐振频率的范围。利用CST模拟仿真分析了在电磁波的作用下滤波器电磁特性变化,外环对三个通频带的产生都有一定的影响,内环主要对第二个通频带的产生起作用。运用激光转印技术在石英晶片表面制备了样品结构,实验结果显示在0.40 THz、0.82 THz、1.15 THz附近有明显的谐振效应,与仿真分析结果基本相符。目前我们使用的是低粘度的纳米银浆,可以在敷银基片上制备微结构器件。未来工艺优化之后有望使用高粘度的纳米银浆在接收衬底上制备器件。
[Abstract]:Metamaterials are artificial materials based on ordered surface microstructures. By reasonably designing metal structures, new and special electromagnetic propagation characteristics, such as negative refraction effect, superlens, can be realized which are not possessed in many natural materials. Electromagnetic stealth, high frequency magnetic response and so on. At present, most terahertz supermaterial microstructural devices are fabricated by traditional lithography technology, but the cost of lithography technology is high, the period is long, and the steps are complicated. High efficiency, The fabrication of microstructural devices with simple steps and superior performance has attracted much attention. Laser transfer technology is a new laser direct-writing technique based on laser induced transfer of nanometallic suspensions (nanocrystalline silver paste). Computer program supermaterial resonant unit structure graphics to spatial light modulator, After microscopic objective imaging, the silver layer of the region illuminated by laser spot is shedded off by laser pulse energy bombardment on the substrate coated with nano-silver paste. A microstructural device is formed on a silver substrate or on a receiving substrate. The technology is developing, customizing, modifying and repairing microelectronic circuits, There is great potential in the fabrication of metamaterial microstructural devices. We have successfully fabricated terahertz microstructural devices using laser transfer technology for the first time in China. The research work in this paper mainly includes: 1) polarization. The optical transfer printing technology is studied systematically. Including system optical circuit construction and optimization, supermaterial device processing program design, sample preparation process, process factors and process optimization. We have made use of laser transfer technology to fabricate metamaterial microstructures on quartz wafers. For complementary devices, the structure of the devices is partly illuminated by laser speckles, and for positive structure devices, A large area of silver is illuminated by the spot and falls off, leaving unexposed parts of the device on the silver substrate. Limited by the energy density, At present, the maximum period of positive structure device is 100 渭 m, while that of complementary structure device is not limited. The minimum linewidth of the fabricated device is 4 渭 m, the thickness of silver layer is adjustable in the range of 100 nm~500 nm, and the thickness uniformity is good. Clear edge features, A terahertz supermaterial resonator with double open annular bridge structure and its complementary structure was prepared on quartz wafer with thickness of 200 渭 m by laser transfer printing technique. The terahertz supermaterial resonator was fabricated with step meter and THz-TDS system. Its performance was tested, The test results show that the resonant unit of the microstructural device has good repeatability, and the transmission spectrum results are in good agreement with the simulation results. A complementary double open loop terahertz filter is studied, which has three resonance peaks in the range of 0.2-1.4 THz. The range of resonant frequency can be flexibly selected by adjusting the structure size of inner and outer rings. The electromagnetic characteristics of the filter under the action of electromagnetic wave are simulated and analyzed by CST simulation. The outer loop has a certain influence on the generation of three passbands. The structure of the sample was prepared on the surface of quartz wafer by laser transfer printing technique. The experimental results show that there is an obvious resonance effect in the vicinity of 0.40THZ 0.82THzN 1.15 THz. The results are in good agreement with the simulation results. At present, we use low viscosity nano-silver paste, which can be used to fabricate microstructural devices on silver coated substrates. It is expected that high viscosity nano-silver paste can be used to fabricate devices on receiving substrates after optimization of the future process.
【学位授予单位】：中国计量学院
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN249

【相似文献】