基于CBCM方法的MOSFET寄生电容测量方法设计

发布时间：2018-04-01 16:33

本文选题：CBCM　切入点：寄生电容测量　出处：《浙江大学》2017年硕士论文

【摘要】：基于充放电的电容测量(Charge-based Capacitance Measurement,CBCM)是目前对片上寄生电容进行测量的最精确而有效的方法。基于CBCM方法本文提出了两种改进型的测量方法。一种是自微分(Self-Differential,SD)CBCM方法,用于单个微分电容,如MOSFET栅电容的精确测量。这种方法有两个优点,一是采用了一种新提出的自微分的测试步骤来消除测量过程中的系统误差,二是可以工作于超高频率(500MHz以上),从而大大减小了随机误差。因此相比于之前的CBCM方法,该方法能提高数十倍的测量精度。另一种是多通道(Multi-Channel,MC)CBCM,用于MOSFET各部分寄生电容的精确提取分离。成功分离提取MOSFET栅源电容、栅漏电容、栅对衬底电容、源对衬底电容、漏对衬底电容等寄生电容,并且可以测量MOSFET各种工作区域的寄生电容,从截止区到放大区到饱和区。测量精度达到亚飞法(小于10-15F)级别,这也是首次有研究工作能以这样的精度做这么广泛的片上电容测量工作。两种CBCM方法都以阵列的形式在GSMC0.18μm工艺上实现,通过对多个不同待测器件的批量测量,我们的测量方法的可靠性可以得到验证。
[Abstract]:Charge-based Capacitance Measurement method (CBCM) is the most accurate and effective method to measure parasitic capacitance on chip. Based on CBCM method, two improved methods are proposed in this paper. For accurate measurement of single differential capacitance, such as MOSFET gate capacitance, this method has two advantages: first, a new self-differential test step is proposed to eliminate the systematic errors in the measurement process. The second is that the random error can be greatly reduced by working at or above 500MHz at ultra-high frequency. Therefore, compared with the previous CBCM method, The method can improve the measurement accuracy by dozens of times. The other is the multi-channel multi-channel channel channeler MCCBCM, which is used for the accurate extraction and separation of parasitic capacitors in various parts of MOSFET. The successful separation and extraction of MOSFET gate source capacitance, gate leakage capacitance, gate to substrate capacitance, source-to-substrate capacitance, Parasitic capacitance, such as leakage capacitance to substrate, and can measure parasitic capacitance in various working regions of MOSFET, from cutoff region to amplification region to saturation region. The accuracy of measurement reaches the level of subfly method (less than 10-15F). This is the first time that research work has been done to measure the capacitance on a chip with such precision. Both CBCM methods are implemented in GSMC0.18 渭 m process in the form of arrays, and are measured in batches of many different devices to be tested. The reliability of our method of measurement can be verified.
【学位授予单位】：浙江大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN386

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