基于载能离子束技术的包层晶体光波导制备及石墨烯材料表面改性

发布时间：2018-04-25 05:03

本文选题：离子辐照/注入 + 光波导　；参考：《山东大学》2017年硕士论文

【摘要】：光波导是一个有低折射率包围的较高折射率的区域,能够凭借全反射原理将光限制在一个很小的区域内进行传输的器件,是集成光学的基本组成部分。随着集成技术高度发展的今天,形形色色的光波导器件,比如波导激光器,光波导分支器,光波导放大器,光波导耦合器等,在激光、传感、通讯、材料等领域不断的发展扩大。光波导的制备方法多种多样,比如离子辐照/注入制备光波导、飞秒激光加工制备光波导、金属离子扩散方法等。无论哪种方法制备的光波导,其耦合效率、传输损耗、折射率分布等参数都是其重要的表征参数。制备出高耦合效率、低损耗及特殊折射率分布的光波导也是集成光学领域重要的研究课题。石墨烯拥有室温量子霍尔效应、超导性、铁磁性等特殊性质,自发现以来就被广泛应用在各个领域中。在光学方面,由于其特殊的能带结构和热荧光效应,石墨烯可以作为优良的可饱和吸收体,广泛的应用在了脉冲激光的制备上。石墨烯的制备方法很多,对于大体量少层石墨烯的制备,可以用化学气相沉积的方法,在金属材料表面制备而成。而在制备石墨烯器件时,往往要将石墨烯多次叠加然后转移到某种材料表面,这种方法所获得的石墨烯在层与层之间、石墨烯与沉底之间接触不够紧密,影响了石墨烯的性质。离子注入技术,是将某种元素电离后经过电场加速获得一定的能量,然后注入到某种材料中实现材料性质改变的一个过程。比如,将碳、硼等离子注入金属表面,可以提高表面硬度、耐磨性、抗腐蚀性等;将硼、磷等离子注入半导体中实现对半导体材料的精细掺杂;将氢、碳等离子注入介电晶体材料中实现对注入区域材料折射率的调控等。在本论文中,主要是利用载能离子辐照\注入技术对钕离子掺杂钇铝石榴石晶体(Neodymium doping Yttrium Aluminum Garnet,Nd:YAG)和多层石墨烯(Graphene)的微观结构进行调控,研究其光学性质的变化,并将其应用于波导激光研究,获得了高质量的脉冲波导激光。具体工作包括以下两个方面。一、YAG晶体表面类包层光波导的制备:主要工作是探索了一种高耦合效率、低传输损耗、多层折射率分布的光波导制备方法,用以获得高效的近表面型波导激光器件。在这部分工作中,我们用两次不同能量的离子注入的方法制备出了表面类包层型平面光波导,将光波导折射率分布由传统的单一势阱型和势阱加末端势垒型改造成了多层型折射率分布,并将高折射率区域集中在材料的表面附近(表面以下2μm-4μm)。通过与两种单层平面光波导的比较,得出由这种方法所获得的光波导具有较为集中的能量密度分布(分别是另两种光波导的1.4倍和1.9倍)和较高的耦合效率。凭借其较高的能量密度分布,得到了较高质量的近表面平面波导激光输出(阈值为43mW,斜效率为10%),在此基础上结合金刚石精密切割技术制备出脊型光波导,同样获得了较高效率的脊型光波导的激光输出(阈值为60mW,斜效率为46.1%)。二、运用离子注入技术对石墨烯进行性质的改变,运用离子注入的方法减小石墨烯的层间距以及石墨烯与样品之间的间距。我们选择用氧离子和碳离子对覆盖在YAG表面的石墨烯进行离子注入,在离子注入后,运用原子力显微成像技术(AFM),拉曼光谱技术(RAMAN),单束Z扫描技术,消逝场耦合原理等对离子束注入前后的石墨烯进行性质表征,得出了离子束处理石墨烯提升了石墨烯表面平整度并减小了层间距的结论。之后,我们将此样品放到Nd:YAG平面波导上,用810nm激光泵浦,获得了高质量的石墨烯调Q脉冲1064nm激光(最大重复频率为2.3MHz,最小脉宽101ns)。
[Abstract]:The optical waveguide is a region with high refractive index surrounded by low refractive index, which can be transmitted by the principle of full reflection in a very small region. It is the basic component of integrated optics. With the high development of integrated technology, all kinds of optical waveguide devices, such as waveguide lasers, light wave conductance Branches, optical waveguide amplifiers, optical waveguide couplers and other fields are constantly expanding in the fields of laser, sensing, communication and materials. There are many ways to prepare optical waveguides, such as ion irradiation / injection preparation of optical waveguides, optical waveguides fabricated by femtosecond laser processing, metal ion diffusion method, and so on. The coupling effect of the optical waveguides prepared by any method The parameters such as rate, transmission loss and refractive index distribution are important characterization parameters. The optical waveguides with high coupling efficiency, low loss and special refractive index distribution are also an important research subject in the field of integrated optics. Graphene has some special properties, such as the room temperature quantum Holzer effect, superconductivity, ferromagnetism and so on. Since its discovery, it has been widely used since it was discovered. In the field of optics, due to its special band structure and thermal fluorescence effect, graphene can be used as an excellent saturable absorber. It is widely used in the preparation of pulsed laser. There are many preparation methods of graphene. For the preparation of little graphene, the method of chemical vapor deposition can be used in metal materials. The surface is prepared. In the preparation of the graphene devices, the graphene is often overlaid and transferred to the surface of a material. The graphene obtained by this method is between the layer and the layer, and the contact between graphene and the bottom is not close enough to affect the properties of graphene. Ion implantation is the ionization of some elements through the electric field. A process in which a certain amount of energy is accelerated and then injected into a material to achieve a change in the properties of the material. For example, the injection of carbon and boron plasma into the metal surface can improve the surface hardness, wear resistance, corrosion resistance, etc.; boron and phosphorus plasma is injected into semiconductors to achieve fine doping of semiconductors; hydrogen and carbon plasma are injected into the medium. In this paper, the microstructures of Nd ion doped yttrium aluminum garnet crystals (Neodymium doping Yttrium Aluminum Garnet, Nd:YAG) and multilayered graphene (Graphene) are regulated by the energy ion irradiation injection technology in this paper. The changes in the optical properties of the crystals are studied. A high quality pulse waveguide laser is obtained by applying it to the study of the waveguide laser. The specific work includes the following two aspects. 1, the preparation of the YAG crystal surface cladding optical waveguide: the main work is to explore a high coupling efficiency, low transmission loss, and multilayer refractive index distribution. Surface type waveguide laser devices. In this part, surface cladding planar optical waveguides have been fabricated with two different energy ion implantation methods. The refractive index distribution of the waveguide is transformed from the traditional single potential well to the potential well and the end barrier type to the multilayer refractive index distribution, and the high refractive index region is concentrated. Near the surface of the material (2 M-4 mu m below the surface). By comparing with the two single-layer planar optical waveguides, it is concluded that the optical waveguides obtained by this method have a more concentrated energy density distribution (1.4 times and 1.9 times of the other two kinds of optical waveguides, respectively) and higher coupling efficiency. With their higher energy density distribution, high quality is obtained. The output of the measured near surface planar waveguide laser (threshold value is 43mW, the oblique efficiency is 10%). On this basis, the ridged optical waveguides are prepared by diamond precision cutting technology. The laser output of the high efficiency ridge waveguide is also obtained (the threshold is 60mW, the oblique efficiency is 46.1%). Two, the properties of graphene are changed by the ion implantation technique. We use ion implantation to reduce the interlayer spacing of graphene and the spacing between graphene and samples. We choose to use oxygen ions and carbon ions to inject graphene on the surface of YAG. After ion implantation, we use atomic force microscopy (AFM), Raman spectroscopy (RAMAN), single beam Z scanning technology, and evanescent field coupling. The properties of graphene before and after ion beam injection are characterized. It is concluded that the ion beam treatment graphene improves the surface roughness of graphene surface and reduces the interval between layers. After that, we put the sample on the Nd:YAG plane waveguide and pumped the high quality graphite Q pulse 1064nm laser with the 810nm laser. The repetition rate is 2.3MHz, and the minimum pulse width is 101ns).

【学位授予单位】：山东大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN252

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