GaAs-Al MSM器件设计及毛细力辅助飞秒激光3D微纳加工

发布时间：2018-05-04 09:15

本文选题：MSM器件 + 飞秒激光　；参考：《安徽大学》2017年硕士论文

【摘要】：GaAs是Ⅲ-Ⅴ族化合物半导体材料,具有禁带宽度大、击穿电压高、抗辐照能力强、化学性能稳定优点。由GaAs基或GaAs直接制作的器件,在器件反应灵敏度、线性响应、综合性能方面都有很大的优势。而金属-半导体-金属(MSM)结构的器件因其平面型,工艺简单,便于集成等优点倍受青睐。因此,近年来,用GaAs材料制备的MSM光电探测器是人们研究的热门课题之一。本文研究了GaAs基MSM器件的光电特性。首先对MSM电探测器的基本结构和工作原理进行了讨论,并提出了改善MSM光电探测器性能的方法;然后,使用FDTD仿真研究了 Al光栅MSM探测器各项结构参数对器件性能的影响;结果表明,Al光栅MSM探测器的性能可以与Au光栅探测器性能媲美,并且在波长为600 nm-750nm的范围内,Al光栅探测器的性能比Au光栅探测器的性能更优,另外,Al金属价格低廉,可以大大降低生产成本。良好的微纳结构是很多前沿科学产生重大突破的前提,所以探索微纳结构的制作方法目前已经成为世界各国的研究热点。飞秒激光双光子聚合(Two Photon Polymerization,TPP)作为一种强大的、有潜力的三维微纳加工方法,在与物质相互作用过程中具有作用时间短、热影响区域小、加工精度高等独特的优点,并可以加工多种工程材料(如聚合物、陶瓷、金属、杂化材料等)的任意复杂的三维结构。因此被广泛应用在微光学器件、电子、通信、生物医学、微流体器件、微机电系统、超材料等领域。利用飞秒激光直写技术,人们已经成功的制备了各种器件构型的高质量二维和三维微纳光子器件。本文便是使用飞秒激光直写技术加工出微柱结构,并将毛细力自组装作为辅助方法,制备各种复杂结构。分析了微柱自组装的条件:FCFE;均匀分布的微柱阵列受随机缺陷和溶液蒸发过程中的不稳定因素的影响,自组装图案较为随机,为了实现对自组装的控制,提出了在微柱间增加额外间距的方法。实验结果表明,额外间距的增加可以实现排列均匀、有序、稳定的自组装结构,并且,在自组装范围达到100%之前,额外间距的增加会使自组装范围迅速增大。通过设置额外间距,制备了各种图案结构。研究了制备各向异性结构的方法:前端导向蒸发方法——借助重力作用,元胞内微柱受到的毛细力不同,待溶液完全蒸发后,便可实现各向异性自组装。通过分析毛细力和弹性回复力的公式,发现可以在同一元胞内加工不同高度或不同直径的微柱,达到微柱受力不同的目标。使用飞秒激光直写制备双层结构,讨论了底层微柱的直径和加工时的能量对结构的影响,分析了上层微柱在不同高度和激光能量时的自组装情况。毛细力自组装结构两个应用:一是粒子捕获和释放,另一个为结晶,在元胞周期较小且溶液浓度较大的情况下,可以生成微纳米线。飞秒激光与毛细力自组装相结合为3D微纳结构的制备开辟了新天地,在化学,生物医药,微流体等方面具有非常好的应用前景。
[Abstract]:GaAs is a three - V compound semiconductor material, with large band gap, high breakdown voltage, strong radiation resistance and stable chemical properties. The devices made directly by GaAs or GaAs have great advantages in the response sensitivity, linear response and comprehensive performance of the devices. The devices of metal semiconductor metal (MSM) structure are due to their planes In recent years, the MSM photodetectors prepared with GaAs materials are one of the hot topics in recent years. This paper studies the photoelectric characteristics of GaAs based MSM devices. First, the basic structure and working principle of MSM electric detectors are discussed, and the improvement of MSM photodetectors is proposed. Then, the influence of the structure parameters of the Al grating MSM detector on the performance of the device is studied by FDTD simulation. The results show that the performance of the Al grating MSM detector is comparable to that of the Au grating detector, and the performance of the Al grating detector is better than the Au grating detector in the range of 600 nm-750nm. In addition, Al metal is cheap and can greatly reduce the cost of production. Good micro nano structure is the prerequisite for many frontier science to make major breakthroughs. Therefore, the method of exploring the fabrication of micro nano structure has become a hot topic in the world. As a powerful, Two Photon Polymerization (TPP), the femtosecond laser dual photon polymerization is a powerful one. The potential three-dimensional micro nano processing method has the advantages of short action time, small heat affected area and high processing precision in the process of interaction with material, and can process any complex three-dimensional structure of engineering materials such as polymers, ceramics, metals, hybrid materials and so on. Therefore, it is widely used in microoptics devices and electrons. Communication, biomedicine, microfluidic devices, microelectromechanical systems, supermaterials and other fields. By using femtosecond laser direct writing technology, high quality two-dimensional and three-dimensional micro nano photonic devices have been successfully prepared for various device configurations. This paper uses femtosecond laser direct writing technology to process micro column structure and use self assembly of capillary force as auxiliary side. A variety of complex structures are prepared. The conditions for self-assembly of Microcolumns are analyzed: FCFE. The uniform distribution of microcolumn arrays is affected by the random defects and the instability factors in the evaporation process. The self-assembly pattern is more random. In order to realize the control of the self-assembly, the method of adding extra space between the Microcolumns is proposed. The experimental results show that the extra space is extra. The increase in spacing can achieve a uniform, orderly and stable self-assembly structure, and the increase of the extra space will increase the range of self assembly quickly before the range of self assembly reaches 100%. By setting extra spacing, various pattern structures are prepared. The method of preparing anisotropic structure is studied: the front end guide evaporation method is borrowed. In the action of gravity, the capillary force of the microcolumn in the cell is different. After the solution is completely evaporated, the anisotropic self assembly can be realized. By analyzing the formula of the capillary force and elastic recovery force, it is found that the micro columns with different height or different diameter can be processed in the same unit cell to achieve the target with different force in the micro column. The femtosecond laser direct writing system is used. The double layer structure is prepared. The diameter of the microcolumn and the influence of the energy on the structure are discussed. The self-assembly of the upper micro column at different height and laser energy is analyzed. The self assembly structure of the capillary force is two applications, one is the particle capture and release, the other is crystallized, and the cell cycle is small and the concentration of the solution is large. The micro nanowires can be generated. The combination of femtosecond laser and capillary force self assembly opens a new field for the preparation of 3D micro nanostructures. It has a very good application prospect in chemistry, biomedicine, micro fluid and so on.

【学位授予单位】：安徽大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN36

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