硅微通道板化学机械抛光及微通道整形技术研究

发布时间：2018-05-08 04:06

本文选题：硅微通道板 + 化学机械抛光　；参考：《长春理工大学》2015年硕士论文

【摘要】：近些年来以硅材料为基础制作微通道板已经成为国内外研究的热点,硅微通道板相相对于传统工艺的微通道板具有更多优点,比如高分辨率、高深宽比、高电子增益、低功耗等,被广泛的应用于离子探测、微光夜视等领域。本文通过实验研究的方法,在硅微通道板制备工艺过程中,对化学机械抛光和硅微通道结构整形技术进行了优化与改进,其中包括以下几个方面:(1)利用真空填蜡的方法实现对硅微通道阵列结构孔道的保护,并优化了化学机械抛光的工艺与去蜡清洗工艺,实现了对硅微通道板的化学机械抛光。(2)研究了硅微通道阵列结构整形的方法与实验条件,并优化实验工艺条件,制备出正方形孔形的硅微通道阵列结构。(3)利用化学机械抛光的方法,对硅微通道阵列结构等径区域进行研究,测得等径区域所占比重,并优化整形实验条件获得更高比重等径区域的硅微通道阵列结构。
[Abstract]:In recent years, fabricating microchannel plate based on silicon material has become a hot topic at home and abroad. Compared with traditional microchannel plate, silicon microchannel plate has more advantages, such as high resolution, high aspect ratio, high electron gain. Low power consumption is widely used in ion detection, low-light night vision and other fields. In this paper, chemical and mechanical polishing and silicon microchannel structure shaping technology are optimized and improved in the process of fabrication of silicon microchannel plate by means of experimental research. This includes the following aspects: 1) using vacuum wax filling method to protect silicon microchannel array structure, and optimizing the chemical mechanical polishing process and dewaxing cleaning process. The methods and experimental conditions of silicon microchannel array structure shaping are studied, and the experimental process conditions are optimized. The silicon microchannel array structure with square pore shape was prepared. The equal diameter region of silicon microchannel array structure was studied by chemical mechanical polishing method, and the proportion of equal diameter region was measured. The structure of silicon microchannel array with higher specific gravity and equal diameter was obtained by optimizing the shaping experiment conditions.
【学位授予单位】：长春理工大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN305.2

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