激光外差干涉长行程精密导轨直线度测量及补偿方法研究

发布时间：2018-05-10 22:19

本文选题：直线度 + 位移　；参考：《浙江理工大学》2017年硕士论文

【摘要】：直线度误差作为几何测量领域中基本的参数之一,在现代精密设备与仪器制造中起着重要的作用。在众多直线度测量方法当中,基于激光外差干涉的方法因其具有纳米级的测量精度、米级的测量范围和能直接溯源到米定义等优点而得到广泛应用。但是在实际测量中,除了光学元器件的非线性误差、干涉信号处理误差以及激光波长稳定性等因素外,激光光束漂移是影响基于激光外差干涉原理直线度或位移测量精度的一个关键因素,特别是在长行程导轨直线度测量当中。本论文重点研究了激光光束漂移对激光干涉长行程精密导轨直线度测量精度影响,提出激光光束漂移对长行程精密导轨直线度和位移测量的补偿方法,旨在提高长行程导轨直线度和位移的测量精度。论文综合分析了直线度测量方法和激光光束漂移检测及补偿方法国内外研究现状,提出了检测两测量光束多普勒频移差和单测量光束多普勒频移相结合的直线度误差和位移的测量方法,设计了长行程精密导轨直线度与位移测量及补偿系统的光路结构,建立了激光光束漂移与偏摆角和俯仰角分离检测的数学模型,分析了测量过程中激光束角度偏转与位置敏感探测器上光斑位置变化的关系,给出了水平和竖直方向上激光光束漂移以及偏摆角和俯仰角检测表达式。分析了激光光束漂移对直线度和位移测量结果的影响,提出了激光光束漂移对直线度和位移测量的补偿方法,设计了系统的信号处理方法并利用Visual Basic语言设计了系统测量软件。为了验证本论文提出的激光外差干涉长行程精密导轨直线度和位移测量及补偿方法的可行性,搭建了系统实验装置,分别进行了以下实验:(1)激光光束静态稳定性实验,实验结果表明经过补偿后光斑的位置在x方向上和y方向上的稳定性都能够提升50%以上;(2)偏摆角和俯仰角的检测与补偿实验,实验结果表明对于同一个线性导轨在距离激光器不同位置上,经过激光光束漂移补偿后,偏摆角和俯仰角与Renishaw干涉仪角度测量组件具有较好的一致性;(3)直线度和位移测量与补偿实验,实验结果表明对于同一个线性导轨在距离激光器不同位置上,经过激光光束漂移补偿后,系统直线度测量值与Renishaw干涉仪直线度测量组件测量值,系统位移测量值与导轨定位位移都具有良好的一致性。
[Abstract]:As one of the basic parameters in the field of geometric measurement, straightness error plays an important role in the manufacture of modern precision equipment and instruments. Among the many straightness measurement methods, the laser heterodyne interferometry method has been widely used because of its advantages of nanoscale measurement accuracy, meter level measurement range and direct traceability to meter definition. But in the actual measurement, besides the nonlinear error of optical components, the error of interference signal processing and the stability of laser wavelength, etc. Laser beam drift is a key factor that affects the straightness or displacement measurement accuracy based on laser heterodyne interferometry, especially in the measurement of long travel guideway straightness. In this paper, the influence of laser beam drift on the measurement accuracy of laser interference precision guideway straightness is studied, and the compensation method of laser beam drift to long stroke precision guideway straightness and displacement measurement is put forward. The purpose of this paper is to improve the measuring accuracy of straightness and displacement of long stroke guideway. In this paper, the research status of straightness measurement method and laser beam drift detection and compensation method at home and abroad are comprehensively analyzed. In this paper, the measurement method of the straightness error and displacement of the two measuring beam Doppler frequency shift combined with the single measurement beam Doppler frequency shift is put forward, and the optical circuit structure of the long stroke precision guideway straightness and displacement measurement and compensation system is designed. A mathematical model of laser beam drift, deflection angle and pitch angle detection is established, and the relationship between laser beam angle deflection and spot position change on position sensitive detector is analyzed. The expressions of laser beam drift, deflection angle and pitch angle in horizontal and vertical directions are given. The influence of laser beam drift on the measurement results of straightness and displacement is analyzed. The compensation method of laser beam drift to straightness and displacement measurement is proposed. The signal processing method of the system is designed and the system measurement software is designed by Visual Basic language. In order to verify the feasibility of the method of measuring and compensating the straightness and displacement of the laser heterodyne interference precision guideway proposed in this paper, the system experimental devices are set up, and the following experiments on the static stability of laser beam are carried out respectively. The experimental results show that the stability of spot position in x direction and y direction can be increased by more than 50% after compensation. The experimental results show that for the same linear guideway at different positions in the distance laser, the laser beam drift compensation, The experiment of measuring and compensating for straightness and displacement of deflection angle and pitch angle with Renishaw interferometer has been carried out. The experimental results show that for the same linear guideway at different positions in the range laser, After the laser beam drift compensation, the measured values of the system straightness are in good agreement with the measured values of the Renishaw interferometer straightness measurement module, the system displacement measurements and the guide rail positioning displacements.
【学位授予单位】：浙江理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TG83;TN249

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