基于FPGA的氧化扩散炉温度控制系统研究

发布时间：2018-05-14 15:04

  本文选题：温度控制 + IGBT　； 参考：《西北大学》2015年硕士论文

【摘要】：随着集成电路(IC)性能及集成度的提高,对器件工艺的要求愈加严格,特别是对氧化扩散温度精度要求越来越高。温度对器件的氧化速率和掺入的杂质分布具有决定性的影响,致使温度控制精度不仅直接影响集成芯片产品质量,而且影响着产品的成本,研究开发性能优异的氧化扩散炉温度控制系统成为微电子制造行业的热点问题之一。论文基于IC制造行业的特点,分析了氧化扩散炉温度控制系统的参数需求,通过论证提出了一种基于FPGA的IGBT大功率开关加热装置温度控制系统研究方案。论文分析了FPGA控制电路、信号调理电路和IGBT半桥逆变及其驱动电路的原理和结构。利用逻辑电路速度快、C语言处理数据能力强的优点,采用SOPC技术将NiosII软核处理器嵌入到FPGA中,设计并实现系统温度测量；采用FPGA自带的参数化模块库设计了增量式PID控制器；通过可编程逻辑语言设计并实现了可调脉宽的脉冲信号发生器；搭建基于IGBT加热装置,结合控制软件实现温度的控制,最后完成了系统的装配和调试。本系统的测试结果为,系统升温速率最大可达22℃/min,恒温至1000℃时温度波动小于2℃,达到了预期的设计目标。
[Abstract]:With the improvement of IC (Integrated Circuit) performance and integration, the requirement of device technology is becoming more and more strict, especially the precision of oxidation diffusion temperature is becoming higher and higher. Temperature has a decisive effect on the oxidation rate and impurity distribution of the device, which results in the temperature control accuracy directly affecting not only the quality of integrated chip products, but also the cost of the products. The research and development of oxidation diffusion furnace temperature control system with excellent performance has become one of the hot issues in microelectronics manufacturing industry. Based on the characteristics of IC manufacturing industry, this paper analyzes the parameter requirements of temperature control system of oxidation diffusion furnace, and puts forward a research scheme of temperature control system of IGBT high power switch heating device based on FPGA. The principle and structure of FPGA control circuit, signal conditioning circuit, IGBT half-bridge inverter and its driving circuit are analyzed in this paper. Taking advantage of the fast speed of logic circuit and the strong ability of data processing in C language, the NiosII soft core processor is embedded into FPGA by SOPC technology, and the temperature measurement of the system is designed and realized, and the incremental PID controller is designed by using the parameterized module library of FPGA. The pulse signal generator with adjustable pulse width is designed and realized by programmable logic language, and the system is assembled and debugged based on IGBT heating device and control software. The test results show that the maximum heating rate of the system can reach 22 鈩，

本文编号：1888383