极化聚合物波导型电光调制器件研究

发布时间：2018-05-23 07:07

本文选题：极化聚合物 + 平面光波导　；参考：《吉林大学》2015年硕士论文

【摘要】：大数据网络时代的开启极大地增加了对数据和信息的需求，传统的数据和信息传输方式已经不能满足人类不断增长的需求。以光纤作为主要传输媒介的通信系统相对于传统通信系统具有带宽高、误码率低、抗电磁干扰能力强、损耗小、速度快等优点。作为光网络中光分插复用系统（OADM）和光交叉连接系统（OXC）核心的光调制器、光开关及其阵列在波分复用技术（WDM）中起着不可或缺的作用。相比于铌酸锂（LiNbO3）等无机材料，极化聚合物具有介电常数低、电光系数高、工艺简单、易于集成的优点，基于极化聚合物的电光调制器半波电压可降至1V以下，3dB带宽可达100GHz以上，而聚合物电光开关的时间响应则可达到ps量级。因此，极化聚合物电光调制器件已成为宽带光纤通信系统中极具竞争力的核心器件之一。本文对基于极化聚合物的电光调制器及开关进行了理论模拟和计算，完成了材料的合成、掩模版的设计并通过旋涂、蒸发、光刻等CMOS工艺完成了器件的制备，并对其性能进行了测试。论文主要包括以下几部分工作： 1、设计并制备了一种共面波导（Co-planar waveguide, CPW）金属电极，并利用矢量网络分析仪(Vector network analyzer)对电极的S参数等微波特性进行了测量，并根据S21参数对电极的衰减常数、相位常数、特性阻抗和介电常数进行了计算、模拟；设计了掩埋型共面波导电极聚合物电光调制器，以NOA73(NorlandOptical Adhesive73)为包层，DR1(Disperse Red1)/PMMA为芯层，设计了波导和电极的掩模版，对电极和聚合物波导的工艺参数进行了优化，得到NOA73凹槽的最佳刻蚀参数，获得底面粗糙度较小、垂直度较好的形貌。最后，对电光调制器的通光和调制情况进行了测试。 2、合成了一种主客掺杂型电光聚合物材料DR1/SU-8，并对其电光系数γ33和折射率进行了测量。为限制包层的吸收、减少电光开关的损耗、提高调制效率，选用紫外固化胶NOA73作为器件的包层材料。利用原子力显微镜（Atomic forcemicroscope, AFM）、椭偏仪和分光光度计对NOA73的成膜性、折射率以及吸收特性进行了表征；计算了倒脊型波导单模传输条件、基模有效折射率与脊高的关系、芯层光功率占比与脊高的关系以及有效折射率与波长的关系；利用BPM（Beam propagation method）软件对带有微带线（Micro-strip line, MSL）行波电极的马赫-曾德尔干涉仪（Mach-zehnder interferometer, MZI）型电光开关中的光功率分布情况进行了模拟；对制备完成的电光开关进行了扫描电子显微镜（Scanning electronic microscopy, SEM）的表征。测试结果表明，通光良好，并在10KHz下得到了方波响应信号波形，电光开关的上升时间和下降时间分别是3.199ns和2.559ns。 3、利用NOA73和DR1/SU-8设计和制备了基于表面等离子波导结构及微带线行波电极的聚合物电光开关。采用马赫-曾德尔干涉仪型波导结构，，设计了与波导相匹配的MSL电极，通过旋涂、紫外光刻、湿法刻蚀和热蒸发等平面工艺完成电光开关的制备，利用接触式电极化方法实现DR1/SU-8的二阶光学非线性，并对电光开关性能进行了测试，在10KHz下观察到方波响应，电光开关的上升时间和下降时间分别是578.7ns和645.3ns。
[Abstract]:The optical modulator , optical switch and its array have the advantages of high bandwidth , low bit error rate , strong anti - electromagnetic interference , low loss , high speed and so on . The polarization polymer has the advantages of low dielectric constant , high electro - optic coefficient , simple process and easy integration .

In this paper , the electro - optical modulator and switch based on polarized polymer are simulated and calculated theoretically , the synthesis of the material , the design of the mask plate are finished , and the performance of the device is tested by spin coating , evaporation , photoetching and other CMOS processes . The paper mainly includes the following parts :

1 . A kind of Co - planar waveguide ( CPW ) metal electrode was designed and fabricated , and the microwave characteristics of the electrode were measured by Vector Network analyzer . The attenuation constant , phase constant , characteristic impedance and dielectric constant of the electrode were calculated and simulated according to S21 parameters .
In this paper , a buried coplanar waveguide electrode polymer electro - optic modulator is designed with NOA73 ( Norland Optical Waveguide sive73 ) as cladding , DR1 ( doped Red1 ) / PMMA as core layer , waveguide and electrode mask are designed , the optimum etching parameters of the groove of NOA73 are obtained , and the topography of NOA73 groove is obtained . Finally , the light and modulation of the electro - optic modulator are tested .

2 . The electro - optic polymer material DR1 / SU - 8 was synthesized and the electro - optic coefficient 纬 33 and refractive index were measured . In order to limit the absorption of cladding , the loss of electro - optic switch was reduced , and the modulation efficiency was improved . The film - forming property , refractive index and absorption characteristics of NOA73 were characterized by atomic force microscope ( AFM ) , ellipsometers and spectrophotometer .
The relationship between the effective refractive index of the core layer and the ridge height , the relation between the effective index of the core layer and the ridge height and the relation between the effective refractive index and the wavelength are calculated .
The distribution of optical power in Mach - Zehnder interferometer ( MZI ) type electro - optical switch with micro - strip line and micro - strip line is simulated by BPM ( Beam propagation method ) software .
The scanning electron microscopy ( SEM ) was characterized by scanning electron microscopy ( SEM ) . The results show that the square wave response signal waveform is obtained at 10 KHz . The rise time and fall time of the electro - optical switch are 3.199 ns and 2.559ns , respectively .

3 . Using NOA73 and DR1 / SU - 8 , a polymer electro - optic switch based on surface plasmon waveguide structure and microstrip line traveling wave electrode was designed and fabricated . The fabrication of electro - optical switch was designed by using Mach - Zehnder interferometer type waveguide structure . The second order optical nonlinearity of DR1 / SU - 8 was realized by spin coating , UV lithography , wet etching and thermal evaporation . The performance of the electro - optical switch was tested . The square wave response was observed at 10 KHz . The rise time and fall time of the electro - optic switch were 578.7ns and 645.3ns , respectively .
【学位授予单位】：吉林大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN761

【参考文献】