半导体晶圆厂实时派工系统的设计与实现

发布时间：2018-05-26 06:24

本文选题：半导体制造 + 生产执行系统　；参考：《电子科技大学》2015年硕士论文

【摘要】：最近几年半导体产业在中国迅猛发展,其生产规模不断地扩大,制造工艺也日益复杂。半导体市场以其技术含量高、制造工艺精细、原本材料成本高、信息交流速度快,产品生产周期短的特征,使其竞争相当激烈。由于半导体制造流程复杂和专业性很强,所以半导体制造环境迫切需要能够快速响应生产线实际状态的调度方法,参考蚂蚁生态系统中个体蚂蚁间接通讯实现群体优化的特征,将若干生产因素切割成独立信息素,再根据半导体制造生产线的机台设备特性,给出了模仿信息素机制的半导体晶圆厂生产线动态派工规则。该规则同时考虑了批加工机台设备和非批加工机台设备的工件动态派工,具有能够改善整条半导体制造生产线的能力。半导体晶圆制造系统是非常典型的大规模复杂重入型制造系统。要解决全局生产调度优化及并且兼顾各区派工优化的实际问题,就需要整合具时变特征的多目标生产调度方法及区域派工策略,从而建立起来一个高效率的时变多目标的生产控制体系。从我国当前半导体晶圆制造企业实际的生产调度的角度出发,以典型的瓶颈区域光刻机台为例,根据系统仿真方法以及模糊控制理论,为在区域内运行实时派工和兼顾全局生产调度优化的类似复杂的问题提供了很好解决方法。该派工方法是除了在求解速度和优化质量二者之间取得平衡外,很好的实现了全局以及兼顾部分重要区域优化的效果,为实现科学生产控制、调度与派工提供了有效的策略和方法。根据实际生产线模型的仿真结果表明,与生产线上当前使用的调度规则相比,该动态派工规则能够更好的帮组我们改善半导体生产线性能,获得较高的产量和准时交货率,以及较低的生产周期。本文在充分了解及分析国内外半导体及实时派工系统的发展状况,提出了一套实时派工系统系统整合的方案和并测试运行,希望能够有效地指导工厂的生产控制,同时提高了工厂及时生产能力、改善了物料的流通,提高生产效率,以适应公司发展的需要。
[Abstract]:In recent years, the semiconductor industry has developed rapidly in China, its production scale is expanding and its manufacturing process is increasingly complex. The semiconductor market has the characteristics of high technology content, fine manufacturing process, high cost of material, rapid information exchange and short production cycle of the product, which makes the semiconductor manufacturing process complicated. And the professionalism is very strong, so the semiconductor manufacturing environment urgently needs the scheduling method that can quickly respond to the actual state of the production line. It can refer to the characteristics of the colony optimization by the indirect communication of the individual ants in the ant ecosystem, cut several production factors into the independent pheromone, and then according to the characteristics of the equipment of the semiconductor manufacturing line. The dynamic dispatching rule of the semiconductor wafer factory production line imitates the pheromone mechanism. The rule also takes into account the work-piece dynamic assignment of the batch machine and the non batch machine equipment, and has the ability to improve the whole semiconductor manufacturing line. The semiconductor wafer manufacturing system is a very typical large-scale complex reentry system. In order to solve the optimization of global production scheduling and to take account of the actual problems of optimizing the work in each area, it is necessary to integrate the multi target production scheduling method with time-varying characteristics and the regional dispatching strategy, thus establishing an efficient and time-varying multi target production control system. From the point of view of production scheduling, a typical bottleneck area photolithography platform is taken as an example. According to the system simulation method and fuzzy control theory, a good solution to similar complex problems in the operation of real time dispatching in the region and taking into account the optimization of global production scheduling is provided. This method is the two one in addition to the speed and the quality of the optimization. To achieve the balance, the overall situation and the effect of some important regional optimization are well realized, and the effective strategies and methods are provided for the realization of scientific production control, scheduling and dispatching. The simulation results of the actual production line model show that the dynamic dispatching rule can be more than the scheduling rules currently used in the production line. A good group to improve the performance of the semiconductor production line, obtain higher production and on time delivery rate, and lower production cycle. In this paper, we have fully understood and analyzed the development of semiconductor and real-time dispatching systems at home and abroad, and proposed a set of real-time system integration scheme and test operation, hoping to be effective. The production control of the pilot plant also improves the timely production capacity of the factory, improves the circulation of materials, and improves the production efficiency to meet the needs of the development of the company.
【学位授予单位】：电子科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TP311.52;TN305

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