组合激光对单晶硅热作用的数值分析

发布时间：2018-06-02 04:20

本文选题：激光技术 + 组合激光　；参考：《激光技术》2017年05期

【摘要】：为了提高激光加工中单晶硅材料对激光能量的耦合效率,采用一个短脉冲激光和一个长脉冲激光形成组合激光辐照单晶硅,使用COMSOL软件对该过程进行模拟,得到了组合激光长短脉冲间的延迟时间和长脉冲激光能量密度的变化对作用效果的影响,并与总能量相等的毫秒激光单独作用的效果进行比较;实验测量得到的不同能量密度的激光作用单晶硅后损伤形貌,与数值计算结果的趋势吻合。结果表明,组合激光能提高材料对激光的耦合效率;不同的延迟时间会影响组合激光的作用效果,最佳延迟时间为0.1ms;组合激光中毫秒激光能量密度占比较低时,作用效能较明显,随着毫秒激光能量密度占比的提高,对作用效果的提升相对变缓。该研究结果可以为组合激光的应用提供理论和实验依据。
[Abstract]:In order to improve the coupling efficiency of monocrystalline silicon materials to laser energy in laser processing, a short pulse laser and a long pulse laser are used to form a combination laser to irradiate monocrystalline silicon. The process is simulated by COMSOL software. The effects of the delay time between the long and long pulses and the energy density of the long pulse laser on the effect are obtained and compared with that of the millisecond laser with equal total energy. The damage morphology of monocrystalline silicon after laser irradiation with different energy density measured experimentally is in good agreement with the numerical results. The results show that the combined laser can improve the coupling efficiency of the material to the laser, different delay time will affect the effect of the combined laser, the optimum delay time is 0.1 Ms, and the millisecond laser energy density is low in the combined laser. With the increase of the ratio of millisecond laser energy density, the improvement of the effect is relatively slow. The results can provide theoretical and experimental basis for the application of combined laser.
【作者单位】：南京理工大学理学院;
【基金】：国家自然科学基金资助项目(61605079)
【分类号】：TN249;TN304.12

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