高功率高效率光纤耦合半导体激光器的研究

发布时间：2018-06-06 15:35

本文选题：半导体激光阵列 + 光束整形　；参考：《北京工业大学》2015年硕士论文

【摘要】：在激光加工应用中,激光器的电光转换效率高、单位能耗低,可降低加工成本,半导体激光器可以满足这方面的要求,被越来越多地应用于工业加工,如激光熔覆、热处理、表面硬化等。光纤耦合半导体激光器具有很多优点,光纤耦合可以实现激光的柔性传输,利用光纤的均化作用可以将半导体激光转化为圆形均匀分布的光场。由于半导体激光器自身结构原因导致光场分布不均匀、光束质量差、功率密度低等缺点,限制了半导体激光器的应用。为解决这个问题,本论文通过光束整形技术提高半导体激光的光束质量;通过空间合束、偏振合束、波长合束等技术提高功率以及功率密度;利用光纤耦合技术均化光场并实现激光的柔性输出。本论文的研究目标是得到高功率、高光束质量和高光纤耦合效率的光纤耦合半导体激光器。通过对国内外光纤耦合半导体激光模块的调研和总结,在充分理解半导体激光器的光束整形技术和合束相关技术的基础上,针对半导体标准阵列,本论文主要研究内容和成果如下:(1)分析半导体激光器光纤耦合的国内外现状和应用背景;对半导体激光器的电学特性和光学特性进行了研究。(2)将波长为976 nm连续工作的5个半导体标准阵列,通过对快轴进行准直和快慢轴光束旋转的方式进行光束整形,准直后进行空间合束,经耦合透镜聚焦,耦合入芯径400μm、数值孔径0.22的光纤。测量结果显示:光纤的出光功率最大可达到244.6 W,光纤耦合效率大于93.6%。(3)针对波长为938nm的10个半导体标准阵列,采用光束整形技术、空间合束、偏振合束和光纤耦合等技术,最终耦合入芯径400μm、数值孔径0.22的光纤,研制出一种光纤输出功率518 W,光纤耦合效率为95%的半导体激光模块。(4)设计了紧凑型空间合束模块结构,实现了两个方向光束质量均衡的空间合束,利用4个模块经过偏振合束、波长合束后,得到高功率、高效率的半导体激光器,并研发出样机。输出光耦合入芯径为400μm,数值孔径0.22的光纤,光纤耦合输出最高功率1070 W,耦合效率96.3%,电光转换效率43%。
[Abstract]:In laser processing, the efficiency of electro-optic conversion is high, the unit energy consumption is low, and the processing cost can be reduced. Semiconductor lasers can meet the requirements of this aspect and are more and more used in industrial processing, such as laser cladding, heat treatment, etc. Surface hardening, etc The fiber coupling semiconductor laser has many advantages. The fiber coupling can realize the flexible transmission of the laser. By using the homogenization of the fiber, the semiconductor laser can be transformed into a circular and uniform distribution of light field. The application of semiconductor laser is limited because of its own structure, such as uneven light field distribution, poor beam quality and low power density. In order to solve this problem, the beam quality of semiconductor laser is improved by beam shaping technology, and the power and power density are improved by space beam, polarization beam, wavelength beam and so on. The fiber coupling technique is used to homogenize the light field and to realize the flexible output of the laser. The aim of this thesis is to obtain fiber coupled semiconductor lasers with high power, high beam quality and high fiber coupling efficiency. Based on the investigation and summary of optical fiber coupled semiconductor laser modules at home and abroad, and on the basis of fully understanding the beam shaping technology and beam correlation technology of semiconductor lasers, aiming at semiconductor standard arrays, The main contents and results of this thesis are as follows: (1) the current situation and application background of fiber coupling in semiconductor lasers are analyzed. In this paper, the electrical and optical properties of semiconductor lasers are studied. (2) five semiconductor standard arrays with a wavelength of 976 nm are used for beam shaping by collimating the fast axis and rotating the fast and slow axis beams. After collimation, the optical fiber with a diameter of 400 渭 m and a numerical aperture of 0.22 was focused by a coupling lens. The measurement results show that the maximum output power of the optical fiber can reach 244.6 W, and the coupling efficiency of the fiber is greater than 93.60.The optical fiber coupling efficiency is greater than 93.60.The optical fiber coupling technology is used for 10 semiconductor standard arrays with wavelength 938nm, such as beam shaping technology, spatial beam combination, polarization beam coupling and fiber coupling, etc. Finally, a semiconductor laser module, which has the output power of 518W and the coupling efficiency of 95%, has been developed by coupling the optical fiber with a core diameter of 400 渭 m and a numerical aperture of 0.22.) the compact spatial beam module structure has been designed. In this paper, two direction beam quality equalization space beam is realized. The semiconductor laser with high power and high efficiency is obtained by using four modules after polarization beam and wavelength beam combination, and a prototype is developed. The optical fiber with a core diameter of 400 渭 m and a numerical aperture of 0.22 has a maximum output power of 1070 W, a coupling efficiency of 96.3W and an electro-optic conversion efficiency of 43W.
【学位授予单位】：北京工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN248.4

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