基于溶胶凝胶法的PLZT光波导薄膜的制备研究

发布时间：2018-06-07 11:56

本文选题：PLZT + 光波导薄膜　；参考：《东南大学》2016年硕士论文

【摘要】：基于PLZT的波导电光器件具有驱动电压小、功耗低、偏振不敏感等优点,成为集成光学领域的研究热点。作为PLZT波导电光器件的核心,PLZT光波导薄膜的质量将直接影响其器件的性能。具有较低传输损耗的PLZT光波导薄膜的制备具有重要意义。本文采用溶胶-凝胶(Sol-Gel)法,针对PLZT光波导薄膜的制备工艺进行了研究。首先,基于当前普遍采用的金属醇盐法,对PLZT光波导薄膜的制备工艺进行了研究。针对前驱体种类、环境湿度、热处理工艺等因素的确定进行了详细的讨论,采用优化的工艺条件获得了表面均匀平整、致密性较高的双组分PLZT光波导薄膜。由此制作了PLZT脊形光波导,并实现了波导通光。其次,为了进一步降低成本,我们采用无机盐取代金属醇盐作为溶胶的主要原料,对PLZT光波导薄膜的制备工艺进行了研究。针对溶胶体系、环境湿度、热处理工艺等条件进行了优化。采用优化的工艺条件获得了厚度4.6μm左右的双组分PLZT光波导薄膜,表面均匀平整,致密性较好,从而为PLZT光波导薄膜的低成本制备提供了依据。
[Abstract]:Waveguide electro-optic devices based on PLZT have the advantages of low driving voltage, low power consumption, low polarization sensitivity and so on, so they have become the research hotspot in the field of integrated optics. The quality of PLZT waveguide film, which is the core of PLZT waveguide electro-optic device, will directly affect the performance of the device. The preparation of PLZT optical waveguide films with low transmission loss is of great significance. In this paper, the preparation process of PLZT optical waveguide thin films was studied by sol-gel method. Firstly, the fabrication process of PLZT optical waveguide thin films is studied based on the metal alkoxide method. The determination of precursor type, environmental humidity, heat treatment process and other factors were discussed in detail. The two-component PLZT optical waveguide thin films with uniform and smooth surface and high density were obtained by optimizing the process conditions. The PLZT ridged optical waveguide is fabricated and the waveguide through light is realized. Secondly, in order to further reduce the cost, the preparation process of PLZT optical waveguide films was studied by using inorganic salts instead of metal alcohols as the main raw materials of the sol. The conditions of sol system, environmental humidity and heat treatment were optimized. Two-component PLZT optical waveguide thin films with a thickness of 4.6 渭 m were obtained by optimizing the process conditions. The surface of the films was even and smooth, which provided a basis for the low cost preparation of PLZT optical waveguide films.
【学位授予单位】：东南大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TN252;O484.1

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