双工件台换台实现过程中宏动系统的扰动抑制研究

发布时间：2018-06-13 17:09

本文选题：双工件台换台 + 扰动抑制　；参考：《哈尔滨工业大学》2015年硕士论文

【摘要】：双工件台换台是光刻机研制的核心,也是完成后续扫描光刻任务的前提,换台过程要求高速度和高精度,因此扰动的存在极易导致换台的失败。而双工件台宏动系统主要负责换台的大行程直线运动,只有重复定位精度达到指标要求的微米级,才能保证整个换台过程的连续性。本文将宏动系统的运动归结为X向单电机定位运动和Y向多电机同步运动,分别进行了扰动抑制技术的研究,在仿真基础上设计了相应的扰动补偿器,然后在双工件台上换台实现过程中进行了扰动抑制实验,使系统的抗扰性得到了很大提高。首先,针对双工件台的结构特点以及换台的轨迹规划,分析了换台过程中宏动系统的运动情况,阐述了对宏动系统进行扰动分析的必要性,最后分析了换台过程中宏动系统中可能存在的扰动。其次,对X向单电机定位过程中的扰动进了分析与抑制。为此,从直线电机的原理出发,得出定位力扰动是该过程中的主要扰动,然后结合定位力产生的机理,在实验平台上进行了定位力扰动模型的辨识。随后,在保证鲁棒稳定性的前提下,对扰动观测器进行了设计,对定位力扰动进行了补偿,并进行了仿真验证。再次,对Y向多电机同步过程中的扰动进行了分析与抑制。结合现有的同步控制策略,介绍了基于扰动补偿的同步控制策略,将扰动观测器应用在补偿回路,并进行了仿真验证研究,然后针对X向的负载扰动,设计了负载扰动动态补偿器,对上述同步控制策略进行了修正,并通过仿真验证了其有效性。最后,在双工件台上进行了宏动系统的扰动抑制实验,然后在宏动系统抗扰性达到一定程度的基础上,通过解决了换台调试中遇到的一些实际软硬件问题,包括多运动控制卡以及存储扩展等相关问题,使整个换台顺利得到了实现。不但达到了系统指标要求的精度,而且在换台速度达到一定程度的基础上,提高了系统的抗扰性。
[Abstract]:Double workpiece platform replacement is the core of lithography machine development, and also the premise to complete the subsequent scanning lithography task. The replacement process requires high speed and high precision, so the disturbance can easily lead to the failure of the replacement station. The double workpiece platform macro motion system is mainly responsible for the long stroke straight line motion of the replacement station. The continuity of the whole station changing process can be ensured only when the positioning precision reaches the micron level required by the target. In this paper, the motion of the macro motion system is reduced to the position motion of X direction single motor and the synchronous motion of Y direction multi-motor. The disturbance suppression technique is studied respectively, and the corresponding disturbance compensator is designed on the basis of simulation. Then the disturbance suppression experiment is carried out in the course of changing the platform on the double workpiece platform, and the immunity of the system is greatly improved. First of all, according to the structural characteristics of the double workpiece platform and the trajectory planning of the platform change, the motion of the macro motion system in the course of changing the platform is analyzed, and the necessity of analyzing the disturbance of the macro motion system is expounded. Finally, the possible disturbances in the macro-moving system are analyzed. Secondly, the disturbance of X-direction single motor is analyzed and suppressed. Therefore, based on the principle of linear motor, it is concluded that the disturbance of positioning force is the main disturbance in the process, and then the identification of the model of force disturbance is carried out on the experimental platform. Then, the disturbance observer is designed, and the disturbance of positioning force is compensated under the premise of robust stability, and the simulation is carried out. Thirdly, the disturbance in Y direction multi motor synchronization process is analyzed and suppressed. Combined with the existing synchronization control strategy, the synchronous control strategy based on disturbance compensation is introduced. The disturbance observer is applied in the compensation loop. The load disturbance dynamic compensator is designed, and the synchronization control strategy is modified, and its effectiveness is verified by simulation. Finally, the disturbance suppression experiment of the macro motion system is carried out on the double workpiece platform, and then, on the basis of the disturbance rejection of the macro motion system to a certain extent, some practical hardware and software problems encountered in the debugging of the changing station are solved. It includes multiple motion control card and memory expansion, which makes the whole station change realized smoothly. Not only the precision required by the system index is achieved, but also the immunity of the system is improved on the basis of the speed of the station changing to a certain extent.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN305.7

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