Na-N共掺对ZnO薄膜结构及光学性质的影响

发布时间：2018-06-13 22:51

  本文选题：溶胶/凝胶法 + ZnO薄膜　； 参考：《兰州理工大学学报》2017年01期

【摘要】：采用溶胶/凝胶法在石英衬底上制备Na-N共掺ZnO纳米薄膜,研究Na掺杂原子分数对ZnO薄膜结构和光学性能的影响.结果表明:适度的Na掺杂,使得薄膜结晶质量明显改善,但过高原子分数的掺杂,则会诱发新的缺陷,导致结晶质量下降.在可见光区域,薄膜透光率随Na掺杂原子分数的升高而升高,掺杂原子分数7.5%的薄膜透光率达到90%左右.Na掺杂原子分数对ZnO的光学带隙产生了直接的影响.
[Abstract]:Na-N co-doped ZnO nanocrystalline films were prepared on quartz substrates by sol / gel method. The effects of Na doping atom fraction on the structure and optical properties of ZnO films were investigated. The results show that the crystal quality of the films is improved obviously by proper Na doping, but the doping with too high atomic fraction will induce new defects and lead to the decrease of crystal quality. In the visible region, the transmittance of ZnO films increases with the increase of Na doped atom fraction. The transmittance of doped films with 7.5% doped atom fraction reaches 90%. The Na doped atom fraction has a direct effect on the optical band gap of ZnO.
【作者单位】： 兰州理工大学材料科学与工程学院;
【基金】：吉林大学集成光电子学国家重点联合实验室开放课题(IOSKL2014KF01) 甘肃省博士后科研项目择优基金资助 兰州理工大学科研启动基金资助
【分类号】：TN304.21
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本文编号：2015817