磁悬浮微动台解耦及控制研究

发布时间：2018-06-14 09:08

  本文选题：磁悬浮微动台 + 电磁力建模　； 参考：《电子科技大学》2015年硕士论文

【摘要】：磁悬浮微动台作为光刻机粗精叠层超精密运动平台的关键部件之一,其运动行程小、精度要求高,同时其运动及定位精度将直接决定晶圆在光刻工艺中质量的优劣。本文以一种采用新型重力补偿结构的磁悬浮微动台为对象,针对其各个自由度运动间的耦合进行研究,并在精确解耦的基础上进行控制器设计,满足磁悬浮微动台的运动性能指标。首先,考虑当微动台运动造成驱动音圈电机永磁磁钢相对于线圈偏移将引起驱动电磁力的变化,由于电磁力不同将引起非平衡驱动,同时各自由度将产生耦合,因此建立磁悬浮微动台驱动音圈电机的电磁场和电磁力的解析模型,并通过仿真和实验验证解析模型的正确性。其次,重力平衡组件以及驱动电机在安装、制造、装配等环节中不可避免存在误差,造成实际模型与理论模型的不一致,从而使得基于理论模型的驱动力分配将引起各自由度间的耦合以及驱动力的误差,通过仿真验证分析结果。再次,针对磁悬浮微动台时域和频域性能指标,在对其模型辨识基础上设计相位超前-滞后反馈控制器对其进行运动控制,同时,为减小高频段柔性振荡对位置误差的放大,采用低通滤波器对高频段的能量进行衰减,并通过磁悬浮微动台的运动控制实验进行验证。最后,建立磁悬浮微动台的六自由度输入输出模型,结合最小二乘法提出一种离线计算电流分配系数的方法对其解耦,并通过实验对其进行了验证,同时提出采用递推最小二乘法在线计算电流分配系数进行解耦。
[Abstract]:As one of the key components of the ultra-precision motion platform of lithography machine, the maglev micro-motion platform has small movement stroke and high precision requirement. At the same time, its motion and positioning accuracy will directly determine the quality of wafer in lithography process. In this paper, a magnetic levitation micro-motion platform with a new gravity compensation structure is used as an object, the coupling between the motion of each degree of freedom is studied, and the controller is designed on the basis of precise decoupling. Meet the motion performance index of the maglev fretting platform. First of all, it is considered that when the motion of the fretting platform causes the permanent magnet of the drive coil motor to deviate from the coil, it will cause the change of the driving electromagnetic force, and the non-equilibrium drive will be caused by the difference of the electromagnetic force, and at the same time each degree of freedom will be coupled. Therefore, an analytical model of electromagnetic field and electromagnetic force of the voice coil motor driven by the maglev fretting platform is established, and the correctness of the analytical model is verified by simulation and experiment. Secondly, there are inevitable errors in the installation, manufacture and assembly of the gravity balance module and the driving motor, which leads to the inconsistency between the actual model and the theoretical model. Therefore, the driving force allocation based on the theoretical model will lead to coupling between degrees of freedom and the error of driving force. The results are verified by simulation. Thirdly, aiming at the time domain and frequency domain performance indexes of the maglev micromotion platform, the phase lead-lag feedback controller is designed on the basis of the model identification. At the same time, in order to reduce the amplification of the position error of the flexible oscillation in the high frequency band, the phase lead-lag feedback controller is designed to control the motion of the maglev micro-motion platform. The low pass filter is used to attenuate the energy of high frequency band, and it is verified by the motion control experiment of the maglev micromotion platform. Finally, a six-degree-of-freedom input and output model of the maglev fretting platform is established, and an off-line method to calculate the current distribution coefficient is presented, which is decoupled by the least square method and verified by experiments. At the same time, the recursive least square method is used to calculate the current distribution coefficient on line to decouple.
【学位授予单位】：电子科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN305.7
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本文编号：2016850