激光微加工在线检测系统的研究与开发

发布时间：2018-06-22 15:50

本文选题：激光加工 + 表面粗糙度　；参考：《华中科技大学》2015年硕士论文

【摘要】：随着激光加工技术的迅速发展,与之对应的表面形貌检测技术也在快速发展。在激光微加工领域,刻蚀工件的表面粗糙度和刻蚀尺寸是其最重要的表面形貌评价参数。其中,表面粗糙度是用来描述工件的微观几何形状误差,它是评定工件表面加工质量的重要指标,直接影响到工件的使用性能和寿命,而刻蚀尺寸的精确测量在表面测量中也有着十分重要的作用,它直接决定加工的精度,可以在很大程度上弥补由其他因素(如光斑尺寸、热效应等)引入的加工误差,同时,微细结构的尺寸测量已成为当前纳米测量技术和纳米计量标准的重要课题之一,在世界范围内得到了普遍重视。在此背景下,本文研究并开发了一种激光微加工在线检测系统,主要包括以下三个方面:激光在线检测系统结构设计、数据处理技术的研究和应用软件的开发。激光检测系统由激光传感器、三维精密位移平台和计算机组成,且集成到激光微加工系统中,构成了集加工和检测为一体的一整套系统。在数据处理技术方面,针对测量过程中的噪声,研究并设计了巴特沃斯降噪滤波器;针对滤波问题,研究并设计了最小二乘中线滤波和高斯滤波两种方法,通过轮廓调平的方法解决了刻蚀尺寸测量中的倾斜问题。在软件方面,开发了界面美观、操作方便的应用软件,它由设备控制软件和数据处理软件两部分组成,共同实现了在线检测的功能。实验部分,该系统通过大量样品的在线加工和检测实验,并采用Dektak 150 Surface Profiler表面轮廓测量仪的检测结果进行对比和不断修正,获得了在线检测精度能达到1.6μm,且具有良好的重复性、稳定性和可靠性的激光微加工在线检测系统。利用本文开发的激光微加工在线检测系统对激光加工的工件的表面质量和尺寸进行在线检测,极大地提高了加工效率,提高了加工精度,还能节省大量试验用材料,且非接触测量方法不会损伤样品表面,同时,大的测量范围和宽松的测量环境要求为三维曲面测量提供了必要的条件。
[Abstract]:With the rapid development of laser processing technology, the corresponding surface morphology detection technology is also developing rapidly. In the field of laser micromachining, the surface roughness and etching size of the etched workpiece are the most important parameters for evaluating the surface morphology. Among them, the surface roughness is used to describe the micro geometric error of the workpiece, and it is an important index to evaluate the workpiece surface processing quality, which directly affects the working performance and service life of the workpiece. The accurate measurement of etching size also plays an important role in surface measurement. It directly determines the processing accuracy, and can compensate for the machining errors introduced by other factors (such as spot size, thermal effect, etc.) to a great extent, at the same time, The measurement of microstructures has become one of the most important subjects in the field of nanometer measurement technology and nanometer measurement standards, and has been paid more and more attention to all over the world. Under this background, this paper studies and develops a laser micromachining on-line detection system, which mainly includes the following three aspects: the structure design of laser on-line detection system, the research of data processing technology and the development of application software. The laser detection system is composed of laser sensor, 3D precision displacement platform and computer, and integrated into the laser micromachining system. In the aspect of data processing, the Butterworth filter is studied and designed for the noise in the measurement process, and the least square midline filter and Gao Si filter are studied and designed for the filtering problem. The slanting problem in etching dimension measurement is solved by the method of profile leveling. In the aspect of software, the application software with beautiful interface and convenient operation is developed, which is composed of two parts: equipment control software and data processing software, and realizes the function of on-line detection together. In the experiment part, through the on-line processing and testing experiments of a large number of samples, the results of Dektak 150 Surface Profiler surface profile measuring instrument are compared and revised continuously. The on-line detection accuracy can reach 1.6 渭 m, and the system has good repeatability. Stability and reliability of laser micromachining online detection system. The surface quality and size of the workpiece machined by laser are tested on line by using the laser micromachining on-line inspection system developed in this paper. The processing efficiency is greatly improved, the machining precision is improved, and a large number of experimental materials are saved. The non-contact measurement method does not damage the surface of the sample, and the large measurement range and the loose measuring environment provide the necessary conditions for 3D surface measurement.
【学位授予单位】：华中科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN249;TP274

【引证文献】