后处理工艺对钛基纳米金刚石涂层场发射特性的影响

发布时间：2018-06-23 22:33

本文选题：纳米金刚石涂层 + 后处理工艺　；参考：《发光学报》2017年06期

【摘要】：采用胶带粘贴、金相砂纸摩擦、射频氢等离子体工艺对钛基纳米金刚石涂层进行了处理,分析了它们对样品的微观表征、场发射性能、发光效果的影响。首先通过电泳法将金刚石粉末移植到金属钛片上,然后经过真空热处理、表面后处理工艺形成了场发射阴极涂层,最后对样品进行了微观表征、场发射特性与发光测试。结果表明,胶带处理在场强达到10 V/μm时,场发射电流密度从50μA/cm~2增j加到72μA/cm~2;金相砂纸处理在10 V/μm场强下的场发射电流由48μA/cm~2提高到82μA/cm~2;适当的氢等离子体处理有助于降低表面功函数,使得金刚石表面的悬键被氢原子饱和,在其表面形成C—H键,进一步降低了电子亲和势,从而提高了样品的场发射性能和发光均匀性。
[Abstract]:Titanium based nanocrystalline diamond coatings were treated by adhesive tape, friction of metallographic sandpaper and radio frequency hydrogen plasma. The effects of these coatings on the microstructure, field emission properties and luminescence of the samples were analyzed. Firstly, diamond powder was implanted onto titanium metal by electrophoretic method, then the surface was treated by vacuum heat treatment, the field emission cathodic coating was formed. Finally, the microcosmic characterization, field emission characteristics and luminescence test of the samples were carried out. The results show that the field emission current density increases from 50 渭 A/cm~2 to 72 渭 A / cm ~ (-2), the field emission current increases from 48 渭 A/cm~2 to 82 渭 A / cm ~ (2) at 10 V / 渭 m field strength, and the surface work function is reduced by proper hydrogen plasma treatment. The suspended bond on diamond surface is saturated by hydrogen atom and forms C-H bond on its surface, which further reduces the electron affinity and improves the field emission property and luminescence uniformity of the sample.
【作者单位】：延安大学信息与通信工程研究所;
【基金】：国家自然科学基金(61664008) 延安大学引导项目(YD 2016-02) 2016地方高校国家大学生创新创业训练项目(1559,1569) 高水平大学学科建设专项研究基金(2015SXTS02) 2016延安大学校级大学生创新训练项目(D2016109) 2017年延安大学研究生创新训练项目(YCX201740)资助~~
【分类号】：TN141;TN304

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