基于随机方法的AFM探针位置最优估算研究

发布时间：2018-06-24 06:41

本文选题：探针精确定位 + 运动模型　；参考：《仪器仪表学报》2017年09期

【摘要】：由于受到驱动器PZT(Pb Zr Ti O3)非线性、系统温漂与其他不确定因素的影响,原子力显微镜(AFM)探针在任务空间的位置存在不确定性。这严重影响了AFM探针观测与操作的效率,如何减小探针位置的不确定性,实现AFM探针的精确定位成为亟待解决的问题。针对此问题,提出用概率分布的方式描述探针位置的不确定性,通过建立探针运动模型,结合基于局部扫描的观测模型,采用Kalman滤波对探针位置进行最优估算。针对算法的实现,设计了模型参数标定方案。通过仿真和实验的结果验证了算法的有效性与可行性,实现了探针在任务空间中的精确定位,提高了纳米操作效率。
[Abstract]:The position of atomic force microscope (AFM) probe in mission space is uncertain due to the nonlinear PZT (Pb Zr TIO 3), temperature drift and other uncertain factors. This seriously affects the efficiency of AFM probe observation and operation. How to reduce the uncertainty of the probe location and how to locate the AFM probe accurately becomes an urgent problem to be solved. In order to solve this problem, the probabilistic distribution is proposed to describe the uncertainty of the probe position. By establishing the probe motion model and combining the observation model based on local scanning, the Kalman filter is used to estimate the probe position optimally. Aiming at the realization of the algorithm, the calibration scheme of model parameters is designed. The effectiveness and feasibility of the algorithm are verified by simulation and experimental results. The accurate positioning of the probe in the mission space is realized, and the efficiency of nanometer operation is improved.
【作者单位】：沈阳建筑大学信息与控制工程学院;中国科学院沈阳自动化研究所;
【基金】：中国国家自然科学青年基金(61305125) 沈阳建筑大学学科内容教育工程(XKHY2-66) 学校自然科学基金(2014068,2017028) 国家博士后基金(2013M530955,2014T70265)项目资助
【分类号】：TN713

【相似文献】