共光路三自由度激光测量系统

发布时间：2018-06-25 21:40

本文选题：共光路 + 激光　；参考：《光电工程》2017年08期

【摘要】：基于迈克尔逊干涉原理和激光自准直原理,采用共光路布局,研制了能对运动工作台同时进行一维位移和二维角度测量的三自由度激光测量系统。在位移测量中,采用光程差放大技术,并结合偏振干涉技术和信号差分处理,得到高质量的位移输出信号和高分辨力的位移测量结果。在角度测量中,运动工作台的偏摆和俯仰运动会引起固定在工作台上的反射镜位置变化。入射光被反射镜反射,并被四象限探测器探测,根据四象限探测器上的光斑位置变化,获得偏摆角和俯仰角的变化值。对研制的系统进行稳定性和分辨力测试,同时与英国雷尼绍XL-80激光干涉仪进行比对实验。实验结果表明:测量系统的位移分辨力为0.8 nm,角度分辨力为0.2″;在50 mm的测量范围内,与雷尼绍XL-80激光干涉仪测量值相比,系统的位移最大偏差小于100 nm,偏摆角最大偏差为0.5″,俯仰角最大偏差为0.4″。
[Abstract]:Based on Michelson interference principle and laser self-collimation principle, a three-degree-of-freedom laser measurement system is developed, which can measure the one-dimensional displacement and two-dimensional angle of the moving table simultaneously. In the displacement measurement, high quality displacement output signal and high resolution displacement measurement result are obtained by using optical path difference amplification technique, polarization interferometry and signal differential processing. In angle measurement, the deflection and pitching movement of the moving table cause the change of the mirror position fixed on the table. The incident light is reflected by the reflector and detected by the four-quadrant detector. According to the change of the spot position on the four-quadrant detector, the variation values of the deflection angle and the pitch angle are obtained. The stability and resolution of the system were tested and compared with Renishaw XL-80 laser interferometer. The experimental results show that the displacement resolution of the system is 0.8 nm and the angular resolution is 0.2 ". The maximum deviation of displacement is less than 100 nm, the maximum deviation of deflection angle is 0.5 ", and the maximum deviation of pitch angle is 0.4".
【作者单位】：合肥工业大学仪器科学与光电工程学院;合肥工业大学电子科学与应用物理学院;
【基金】：国家自然科学基金资助项目(51475131)
【分类号】：TH744.5

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