微环谐振器硅基调制器的理论研究

发布时间：2018-06-26 09:21

本文选题：硅基光电子集成 + 微环谐振器　；参考：《电子科技大学》2017年硕士论文

【摘要】：电光调制器是光纤通信系统中的核心元件,具有速率高、宽带宽、尺寸小和易集成等特性的电光调制器是研究重点。传统的电光调制器主要是利用LiNbO3或III-V族材料的电致折射率效应实现高速的电光调制,但面临着尺寸大、集成度低、制作成本高等问题。硅基光调制器利用廉价的硅材料和成熟的硅基工艺,具有光电子与微电子混合集成的潜力,对于实现高速率、宽带宽和尺寸小、可集成的电光调制尤为重要。本论文以基于微环谐振结构的硅基电光调制器作为研究对象,重点研究了内嵌式石墨烯-硅基微环电光调制原理、结构设计和器件仿真,主要内容为以下几方面:1、研究了硅基光波导的耦合模方程,得到了硅基微环谐振结构的理论模型,分析了微环参数,包括微环半径、耦合波导间距、微环损耗对于微环谐振器的影响,并分析了石墨烯-硅基微环电光调制的工作原理,为石墨烯-硅基微环电光调制器设计提供参考;2、设计了内嵌式双层石墨烯-硅基波导结构,利用有限元分析法,建立了石墨烯-硅基波导的有效折射率随电压变化的关联关系,得到石墨烯-硅基电光调制器的TE和TM模电光调制特性。利用该波导设计了一种石墨烯-硅基微环电光调制器,通过优化内嵌石墨烯在波导中的位置、隔离层厚度、隔离层材料和波导尺寸、环波导与直波导间距,得到了速率高、宽带宽和小尺寸的石墨烯-硅基微环电光调制器;3、为了进一步增强石墨烯与光波的相互作用,提出了内嵌多层石墨烯的硅基波导结构,对比不同层参数,发现四层石墨烯硅基波导最优,结果表明,内嵌式四层石墨烯-硅基微环调制器的TE模调制消光比可达32.1dB、驱动电压为6.22V、每比特能耗为6.8fJ,TM模调制消光比可达37.4dB、驱动电压为2.2V、每比特能耗为0.92fJ,调制带宽为140GHz;为了消除对TE模和TM调制效果的不同,通过在波导中同时引入水平和垂直的石墨烯层,提出了一种四层石墨烯-硅基微环偏振无关电光调制器。4、对论文工作进行总结,并对石墨烯-硅基微环电光调制器的前景进行了展望。
[Abstract]:Electro-optic modulator is the core component in optical fiber communication system. The electro-optic modulator with high speed, wide bandwidth, small size and easy integration is the focus of research. The traditional electro-optic modulator mainly uses the electro-refractive index effect of Linbo _ 3 or III-V group materials to realize high-speed electro-optic modulation, but it is faced with the problems of large size, low integration and high production cost. Silicon based optical modulator has the potential of optoelectronic and microelectronic mixing integration using cheap silicon material and mature silicon based process. It is particularly important for realizing high speed wide bandwidth and small size integrated electro-optic modulation. In this paper, we focus on the principle, structure design and device simulation of embedded graphene based microring electro-optic modulator based on microring resonant structure. The main contents are as follows: 1. The coupling mode equation of silicon-based optical waveguide is studied, the theoretical model of the resonant structure of silicon based microring is obtained, and the parameters of microloop, including the radius of microring, the spacing of coupling waveguide, are analyzed. The effect of microring loss on the microring resonator is analyzed. The working principle of graphene silicon-based microring electro-optic modulation is analyzed. It provides a reference for the design of graphene silicon-based microring electro-optic modulator and designs the embedded double-layer graphene silicon-based waveguide structure. By using finite element analysis, the correlation of effective refractive index with voltage of graphene silicon-based waveguide is established, and the te and TM mode electro-optic modulation characteristics of graphene silicon-based electro-optic modulator are obtained. A graphene silicon-based microring electro-optic modulator is designed. By optimizing the position of the embedded graphene in the waveguide, the thickness of the isolation layer, the material and the size of the isolator, and the distance between the ring waveguide and the straight waveguide, a high rate is obtained. In order to further enhance the interaction between graphene and light wave, a wide and small size graphene / silicon-based microring electro-optic modulator is proposed. The silicon-based waveguide structure with embedded multilayer graphene is proposed, and the parameters of different layers are compared. It is found that the four-layer graphene silicon-based waveguide is optimal. The te mode modulation extinction ratio of embedded four-layer graphene silicon-based microring modulator can reach 32.1dB, the driving voltage is 6.22V, the power consumption per bit is 6.8fJ / TM mode modulation extinction ratio can reach 37.4 dB, the driving voltage is 2.2 V, the energy consumption per bit is 0.92fJand the modulation bandwidth is 140GHz. Eliminates differences in te mode and TM modulation effects, By introducing both horizontal and vertical graphene layers into the waveguide, a four-layer graphene silicon-based micro-ring polarization-independent electro-optic modulator. The prospect of graphene-silicon-based micro-ring electro-optic modulator is also prospected.
【学位授予单位】：电子科技大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN761

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