超纯水处理系统设计及其信息化方研究

发布时间：2018-07-05 08:26

本文选题：超纯水制备 + 数据管理系统　；参考：《浙江大学》2016年硕士论文

【摘要】：浸没式光刻是新一代集成电路制造中的关键技术,它在传统光刻工艺的基础上,通过在物镜和硅片之间填充入一层高折射率的浸没液体,来提升光刻的分辨率。超纯水是浸没式光刻中所使用的浸没液体,超纯水的水质极大地影响了光刻的质量。因此,在我国提出的极大规模集成电路制造项目中,将超纯水制备作为一个非常重要的子课题来进行开展。本文研制了一套以半导体厂务水为原料,制备用于浸没式光刻浸没液体的超纯水制备系统。该系统实现对厂务水中TOC、离子、溶解氧、颗粒等污染物进行深度去除,并将超纯水以相对稳定的压力提供给下一级浸没液体传输设备。本文的内容涵盖超纯水制备系统工艺选型、流程设计、设备选型、结构设计、控制系统选型、系统加工集成以及调试。此外,本文还设计了一套对超纯水系统运行数据进行远程采集和发布的解决方案,大大提升了超纯水系统的数据管理能力。本文共分为四章：第一章介绍了浸没式光刻对超纯水的要求以及超纯水的发展现状。同时指出了开发超纯水信息管理系统的重要意义和目前的发展现状。最后,本章提出了课题主要的研究内容,规定了系统设计的规格和要求。第二章介绍了超纯水系统的设计、加工和调试。本章首先介绍了超纯水系统的工艺技术选型、关键部件选用和工艺流程的设计,然后详细地介绍了系统的结构设计过程,对其中的难点展开了讨论,随后分析了超纯水系统可选用的控制方式并做了技术选型,最后,介绍了超纯水系统加工和安装调试的过程和结果。第三章介绍的是超纯水系统信息管理系统的开发。本章从超纯水系统数据管理系统的数据传输、数据储存、数据分析发布三个方面开展了介绍。首先描述了需要传输的数据、并对其进行技术选型和方案讨论,提出了发送的格式和保障方式,随后,介绍了数据储存的数据库选型和数据库设计,最后,介绍了数据发布方案的技术选型和页面设计。第四章对本文的工作进行了总结,并对超纯水系统的未来工作进行了展望。
[Abstract]:Immersion lithography is a key technology in the manufacture of new generation integrated circuit. Based on the traditional lithography technology, the resolution of lithography is improved by filling a layer of immersion liquid with high refractive index between objective lens and silicon wafer. Ultrapure water is a submerged liquid used in immersion lithography. The quality of ultrapure water greatly affects the quality of lithography. Therefore, the preparation of ultra-pure water is regarded as a very important sub-topic in the project of maximum scale integrated circuit manufacturing proposed in our country. In this paper, a ultrapure water preparation system using semiconductor factory water as raw material for submerged lithographic immersion liquid has been developed. The system realizes the deep removal of TOC, ion, dissolved oxygen, particles and other pollutants in plant water, and provides ultra-pure water with relatively stable pressure to the next stage of submerged liquid transport equipment. The contents of this paper include process selection, process design, equipment selection, structure design, control system selection, system processing integration and debugging. In addition, this paper also designs a solution for remote data acquisition and distribution of ultra-pure water system, which greatly improves the data management ability of ultra-pure water system. This paper is divided into four chapters: the first chapter introduces the requirements of immersion lithography for ultra-pure water and the development of ultra-pure water. At the same time, it points out the importance of developing super-pure water information management system and the present development situation. Finally, this chapter puts forward the main research contents of the subject, and specifies the specifications and requirements of the system design. The second chapter introduces the design, processing and debugging of ultra-pure water system. In this chapter, the selection of process technology, the selection of key components and the design of process flow are introduced, then the structural design process of the system is introduced in detail, and the difficulties are discussed. Then it analyzes the control mode of ultra-pure water system and makes the selection of technology. Finally, the process and result of processing, installation and debugging of ultra-pure water system are introduced. The third chapter introduces the development of super-pure water system information management system. This chapter introduces the data transmission, data storage, data analysis and release of the data management system of the ultra-pure water system. This paper first describes the data that needs to be transmitted, and discusses its technical selection and scheme, and puts forward the format and guarantee mode of transmission. Then, it introduces the database selection and database design of data storage. The technology selection and page design of data release scheme are introduced. In chapter 4, the work of this paper is summarized, and the future work of ultra-pure water system is prospected.
【学位授予单位】：浙江大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TN305.7

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