高速大功率光波导探测器新结构研究

发布时间：2018-07-06 13:44

本文选题：平板耦合光波导 + 对称水平方向耦合　；参考：《电子科技大学》2017年硕士论文

【摘要】：模拟光电探测器在微波光子领域有很多重要应用。在光载无线通信系统(radio-over-fiber,ROF)和相控阵雷达系统(Phased Array Radar,PAR)中,高速大功率的模拟光电探测器可用于直接驱动天线。传统的垂直入射型探测器和波导探测器都难以满足对于高速大功率两个方面的同时需求。本文首先计算了大横截面单模波导模型,但是由于大横截面单模波导结构能量损耗过大,且能量很难从下波导耦合到上波导,使得该结构的实际运用大打折扣。接下来本文提出了对称水平方向耦合波导探测器,该探测器工作在基超模和二阶超模,其横截面可以达到5×5μm2,降低了光纤-波导的耦合难度。本文主要从以下几个方面来具体研究对称水平方向耦合波导探测器的特性。1、提出了对称水平方向耦合波导探测器的具体结构,并通过大量的MATLAB计算与BeamProp软件仿真,设计出了探测器的结构参数。2、根据设计的对称水平方向耦合波导探测器的结构参数,运用有效折射率法具体分析了探测器的波导模式,计算了探测器的基超模、一阶超模和二阶超模,根据探测器的具体结构分析探测器应该工作在基超模和二阶超模,最后验证了探测器的超模匹配条件。3、根据单行载流子理论具体设计了探测器的外延层结构,并结合探测器的具体结构通过ATLAS和BeamProp软件仿真和MATLAB计算,对探测器的具体性能进行了分析。验证了探测器的光电流分布均匀,且探测器对中心波导偏移的影响不大。接下来计算了探测器的饱和电流和3dB带宽,得到探测器的饱和电流约为460mA,响应度为1.02A/W,3dB带宽为1.8GHz。4、根据对称水平方向耦合波导探测器的具体结构设计了其加工流程,从探测器的基片生长、掩膜板制作、光刻、刻蚀、电极制作、基底剪薄和波导切割等各方面具体介绍了每一步的加工流程及其目的。
[Abstract]:Analog photodetectors have many important applications in the field of microwave photons. High speed and high power analog photodetectors can be used to drive antennas directly in radio-over-fiberlike ROF and phased Array radar systems. The traditional vertical incident detector and waveguide detector are difficult to meet the needs of high speed and high power. In this paper, the large cross section single mode waveguide model is first calculated. However, the energy loss of the large cross section single mode waveguide structure is too large, and the energy is difficult to be coupled from the lower waveguide to the upper waveguide, so the practical application of the structure is greatly reduced. Then, a symmetrical horizontally coupled waveguide detector is proposed. The detector works in the base supermode and the second-order supermode. The cross section of the detector can reach 5 脳 5 渭 m ~ 2, which reduces the coupling difficulty of the fiber-waveguide. In this paper, the characteristics of symmetrical horizontally coupled waveguide detectors are studied in detail from the following aspects. 1. The structure of symmetrical horizontally coupled waveguide detectors is proposed, and a large number of MATLAB calculations and BeamProp software simulations are carried out. The structural parameters of the detector are designed. According to the structural parameters of the symmetrical horizontally coupled waveguide detector, the waveguide mode of the detector is analyzed by the effective refractive index method, and the fundamental supermode of the detector is calculated. First order supermode and second order supermode, according to the specific structure of the detector, the detector should work in the base supermode and the second order supermode. Finally, the supermode matching condition. 3 of the detector is verified. The epitaxial structure of the detector is designed according to the single line carrier theory, and the structure of the detector is simulated by software ATLAS and BeamProp and calculated by MATLAB. The performance of the detector is analyzed. It is verified that the photocurrent distribution of the detector is uniform, and that the detector has little effect on the shift of the central waveguide. Then, the saturation current and 3dB bandwidth of the detector are calculated. The saturation current of the detector is about 460 Ma and the responsivity is 1.02A / W / 3dB bandwidth of 1.8GHz. 4. The fabrication flow is designed according to the structure of the symmetrical horizontally coupled waveguide detector. The fabrication process and purpose of each step are introduced in detail from the aspects of substrate growth, mask fabrication, lithography, etching, electrode fabrication, substrate shearing and waveguide cutting.
【学位授予单位】：电子科技大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN15

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