频率选择表面的仿真、加工与测试研究

发布时间：2018-07-07 14:45

本文选题：频率选择表面 + UV-LIGA　；参考：《上海交通大学》2015年硕士论文

【摘要】：频率选择表面(frequency selective surface,FSS)是一种周期性平面二维阵列结构,其本质是一个空间电磁滤波器。当电磁波与FSS相互作用时,FSS会表现出明显的带通或带阻的电磁波透射特性。FSS拥有良好的频率选择和极化选择特性,能够有效控制电磁波的传输与反射。随着科技的不断进步与发展,频率选择表面已经越来越多的应用于微波、红外波及可见光波段领域。近些年,国内外的学者及研究机构对FSS进行了各种深入的研究与分析,人们对FSS各种特性的认识也越趋完善。本文对频率选择表面进行了以下的研究:利用CST MWS仿真软件对118GHz频率选择表面以及183 GHz频率选择表面进行仿真,研究了它们的频率响应特性,以及线宽、周期长度、结构片厚度以及垫片厚度对频率响应曲线的影响。利用UV-LIGA加工技术对118 GHz频率选择表面和183 GHz频率选择表面进行加工,并对样品进行测试。利用扫描电子显微镜(scanning electron microscope,SEM)对样品进行测量,测量样品的线宽、周期长度以及结构片厚度。同时,利用近场扫描法测试118 GHz频率选择表面的传输特性和反射特性。经试验证明,在满足指标要求的情况下,利用UV-LIGA技术加工的样品具有良好的尺寸特性,样品侧壁陡直,并且118 GHz频率选择表面样品的线宽误差为±0.6μm;周期长度误差为±2μm;结构片厚度误差为±1μm。对于183 GHz频率选择表面而言,线宽误差为±2.7μm;周期长度误差为±2μm;结构片厚度误差为±1μm。
[Abstract]:Frequency selective Surface (frequency selective) is a periodic planar two-dimensional array structure, which is essentially a spatial electromagnetic filter. When the electromagnetic wave interacts with the FSS, the FSS will show obvious transmission characteristics of the band-pass or band-stop electromagnetic wave. FSS has good frequency selection and polarization selection characteristics, which can effectively control the transmission and reflection of the electromagnetic wave. With the development of science and technology, frequency-selective surface has been applied to microwave, infrared and visible light. In recent years, scholars and research institutions at home and abroad have carried out various in-depth research and analysis of FSS, and people's understanding of various characteristics of FSS is becoming more and more perfect. In this paper, the frequency selective surface is studied as follows: the 118GHz frequency selective surface and 183GHz frequency selective surface are simulated by CST MWS simulation software, and their frequency response characteristics, linewidth and period length are studied. The influence of the thickness of structure and gasket on the frequency response curve. The 118GHz frequency-selective surface and 183GHz frequency-selective surface were fabricated by UV-LIGA and the samples were tested. The sample was measured by scanning electron microscope (scanning electron), and the linewidth, cycle length and thickness of the structure were measured. At the same time, the transmission and reflection characteristics of the 118GHz frequency-selective surface are measured by near-field scanning method. The experiments show that the samples processed by UV-LIGA technology have good size characteristics and the side walls of the samples are steep. The linewidth error of 118GHz frequency selective surface sample is 卤0.6 渭 m, the period length error is 卤2 渭 m, and the thickness error of structure chip is 卤1 渭 m. For the 183GHz frequency-selective surface, the linewidth error is 卤2.7 渭 m, the periodic length error is 卤2 渭 m, and the thickness error is 卤1 渭 m.
【学位授予单位】：上海交通大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN713

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