半导体激光阵列光栅—外腔光谱合束设计模拟

发布时间：2018-07-15 07:48

【摘要】：在过去几十年里,激光技术得到极大发展,在高度工业化国家的经济发展中扮演着越来越重要的角色,然而光束质量差是制约其进一步应用的主要瓶颈。此外,许多应用场合需要使用大功率激光器,而目前商用单管半导体激光器的最高出射功率通常在mW级,需使用半导体激光单元组成的半导体激光阵列才能满足大功率的应用,因而研究如何提高大功率半导体激光阵列的光束质量成为关键。本论文采取光栅-外腔光谱合束技术在ZEMAX中对半导体激光阵列进行合束设计模拟,该系统主要由半导体激光阵列、准直透镜、传输透镜、光栅和输出镜等元件构成。利用光栅的衍射效应使光束在远场和近场叠加,将半导体激光阵列各个发光单元的光束组合到一起,使输出光束的光束质量与单个半导体激光器发光单元的光束质量相近,而功率是所有发光单元功率的叠加。具体内容如下:(1)论文首先对半导体激光器的工作原理和分类做出叙述,并讨论了半导体激光器的主要参数、光束特性以及光束质量评价方法。(2)介绍了光栅-外腔光谱合束的原理,选用Coherent公司中心波长为1060nm的传导冷却封装结构半导体激光阵列为例,对其光束特性和光束质量以及合束单元的入射角和中心波长进行详细理论计算。(3)在ZEMAX序列模式中设计了快轴准直镜+慢轴准直镜构成的准直结构以及双焦距单透镜准直结构,都获得不错的准直效果。另外设计了两两胶合的双透镜组成的传输透镜,用于减小像差且使不同光束在光栅上聚焦。(4)对以上两种准直结构在ZEMAX非序列模式中分别模拟光栅-外腔光谱合束模型,均较好的完成了光谱合束,合束线宽为19.86nm。在不考虑实际谐振腔和衍射光栅的损耗时,组合效率达到99.6%和99.7%,合束光斑光束质量与准直后的单个发光单元相似。
[Abstract]:In the past few decades, laser technology has been greatly developed and plays a more and more important role in the economic development of highly industrialized countries. However, the poor beam quality is the main bottleneck of its further application. In addition, many applications require the use of high-power lasers, and at present the maximum output power of commercial single-transistor semiconductor lasers is usually in the MW level, and a semiconductor laser array composed of semiconductor laser units is required to meet the needs of high-power applications. Therefore, how to improve the beam quality of high power semiconductor laser arrays becomes the key. In this paper, the design and simulation of semiconductor laser array are carried out in ZEMAX by grating and external cavity spectral beam bonding technology. The system is composed of semiconductor laser array, collimation lens, transmission lens, grating and output mirror and so on. By using the diffraction effect of the grating, the beam is superimposed in the far field and near field, and the beam of each luminescent unit of the semiconductor laser array is combined together, so that the beam quality of the output beam is similar to that of the light emitting unit of a single semiconductor laser. The power is the superposition of the power of all the luminous cells. The main contents are as follows: (1) at first, the working principle and classification of semiconductor lasers are described, and the main parameters of semiconductor lasers are discussed. Beam characteristics and beam quality evaluation methods. (2) the principle of grating / external cavity spectral beam combination is introduced. A conductive cooling package semiconductor laser array with 1060nm central wavelength of Coherent is selected as an example. The beam characteristics, beam quality, incidence angle and central wavelength of beam combination unit are calculated in detail. (3) the collimation structure of slow axis collimating mirror of fast axis collimating mirror and the collimating structure of double focal length single lens are designed in ZEMAX sequence mode. All get good collimation effect. In addition, a two-lens transmission lens is designed to reduce aberration and make different beams focus on the grating. (4) in ZEMAX non-sequential mode, the above two collimating structures are used to simulate the grating and external cavity spectral beam model, respectively. The beam width is 19.86 nm. The combination efficiency is 99.6% and 99.7%, and the beam quality is similar to that of a single luminescent unit after collimation.
【学位授予单位】：山东大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN248.4

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