激光干涉位移及速度测量中的关键技术研究

发布时间：2018-07-25 13:54

【摘要】：随着现代科学技术和生产生活的飞速发展,精密测量技术越来越成为各国高技术发展水平的重要标志,发达国家都将精密测量技术作为机械行业首要发展的关键技术。激光干涉传感器由于系统固有的结构简单、测量精度高及非接触等优点,在实现对速度等物理量的高精度测量上,具有广阔的应用前景。本文通过将现代信号处理方法和激光传感技术相结合,实现对速度和位移高精密测量理论及其关键技术的研究。提出了基于毫赫兹频率检测算法的新型测速方法,设计了结构简单的双折射双频激光多普勒测速仪。仪器采用低频锁相放大技术,具有结构紧凑、成本低廉以及频差稳定等显著优点。文中给出了测速仪理论推导和仿真分析结果,并对测量过程中各种可能的误差来源及其对测量精度的影响进行了分析。实验结果表明:相较于已报道的测速仪,所研制的测速仪结构简单,抗干扰能力强,测量精度高,达到0.0281mm/s。本文还研制了一套实用性强的零差激光干涉仪,并将其应用到大量程的位移测量中。文中研究了改进型零差激光干涉仪的位移测量原理及其信号处理方法,并对测量过程中主要的误差来源及其对测量精度的影响进行了分析。实验中,使用PI高分辨率的商用电动位移平移台来标定测量结果进而验证干涉仪的性能。结果表明:在百毫米级大范围位移测量中该零差激光干涉仪可以达到小于0.7 μm的测量误差。该零差干涉仪具有结构简单,成本低廉及可重复性高等特点,具有实用价值。本文还研究了一种结构简单实用、紧凑且成本低廉的激光鼠标自混合干涉位移测量系统。系统基于激光自混合干涉的基本原理,并结合蓝牙通信技术,在Linux平台下实现了目标靶镜位移信息的采集与分析。论文重点研究了基于Linux平台的蓝牙通信技术。从实验测量结果可以看出:该位移测量系统能较好地实现位移波形的恢复。系统结构简单、性价比高且抗干扰能力强。同时,系统不再受到外部光反馈强度的限制,降低了对目标物体表面反射率的要求,扩展了系统应用范围。
[Abstract]:With the rapid development of modern science and technology and production and life, precision measurement technology has become an important symbol of the level of high-tech development in various countries. Developed countries regard precision measurement technology as the most important key technology in the development of mechanical industry. Because of the advantages of simple structure, high measurement precision and non-contact, laser interferometer has a broad application prospect in the realization of high precision measurement of physical quantities such as velocity. In this paper, by combining modern signal processing method with laser sensing technology, the theory of high precision measurement of velocity and displacement and its key techniques are studied. A new velocity measurement method based on millihertz frequency detection algorithm is proposed. A birefringent laser Doppler velocimeter with simple structure is designed. The instrument adopts low frequency phase locking amplification technology, which has the advantages of compact structure, low cost and stable frequency difference. In this paper, the theoretical derivation and simulation results of the velocimeter are given, and the possible error sources in the measurement process and their influence on the measurement accuracy are analyzed. The experimental results show that compared with the reported velocimeter, the developed velocimeter has the advantages of simple structure, strong anti-interference ability and high measuring accuracy, reaching 0.0281 mm / s. A practical homodyne laser interferometer is also developed and applied to the displacement measurement of a large range. In this paper, the displacement measurement principle and signal processing method of the improved homodyne laser interferometer are studied, and the main error sources in the measurement process and their influence on the measurement accuracy are analyzed. In the experiment, Pi high resolution commercial electric displacement translation platform is used to calibrate the measurement results and verify the performance of the interferometer. The results show that the error of the zero-difference laser interferometer is less than 0.7 渭 m in the large range displacement measurement of 100 mm. The homodyne interferometer has the advantages of simple structure, low cost and high repeatability. A simple, practical, compact and low cost laser mouse self-mixing interferometric displacement measurement system is also studied in this paper. Based on the principle of laser self-mixing interference and Bluetooth communication technology, the system realizes the acquisition and analysis of target mirror displacement information under Linux platform. This paper focuses on Bluetooth communication technology based on Linux platform. It can be seen from the experimental results that the displacement measurement system can achieve the recovery of displacement waveform. The structure of the system is simple, the cost-performance ratio is high and the anti-interference ability is strong. At the same time, the system is no longer restricted by the external optical feedback intensity, which reduces the requirement of the surface reflectivity of the target object and expands the application scope of the system.
【学位授予单位】：南京师范大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN249

【参考文献】