基于石墨烯与光波导电光调制器的调制机理研究与制备
发布时间：2018-07-31 12:48
【摘要】：多核、多芯片封装的系统架构成为未来集成电路发展的一个主要趋势，尺寸的不断缩减导致芯片间互连延迟增大，损耗增加。硅基片上光互连系统兼具高性能和易集成的优势。硅基电光调制器是硅基片上光互连系统的一个重要组件，其性能决定着芯片或内核之间的数据吞吐速率、噪声和功耗等性能。本文提出一种全新的基于石墨新和微环谐振腔的硅基电光调制器，有机结合了石墨烯宽带调制、优异电传输性能以及微环谐振腔的高Q值光程放大的优势，可以在达到高的调制深度同时做到更高的3dB带宽。同时，设计了直波导石墨烯调制器结构，旨在验证石墨烯的吸光特性，计算出石墨烯的吸收系数为0.01dB/um。并利用这一点，根据环形谐振腔的高Q特性，计算出石墨烯的理论调制深度与实际测量的调制深度得到很好地一致性。针对这种新型电光调制器，研究其区别于传统调制器的调制原理，建立波导内光场分布-材料结构形式调制深度之间的定量化模型，分析最大调制频率参数的材料、结构性限制因素，实现石墨烯与微环谐振腔的一体式集成加工，为这种新型电光调制器的设计、制造提供理论、模型和方法基础，对未来片上光互连系统中电光调制-波分复用器的一体化集成技术开发具有重要意义。
[Abstract]:Multi-core, multi-chip packaging system architecture has become a major trend in the future development of integrated circuits, the size of the continuous reduction of inter-chip interconnection delay increases, loss increases. The optical interconnection system on silicon substrate has the advantages of high performance and easy integration. Silicon based electro-optic modulator is an important component of on-chip optical interconnection system. Its performance determines the data throughput rate, noise and power consumption between chips and cores. In this paper, a novel silicon based electro-optic modulator based on new graphite resonator and microring resonator is proposed, which combines the advantages of graphene wide band modulation, excellent electrical transmission performance and high Q value optical path amplification of micro ring resonator. We can achieve higher modulation depth and higher 3dB bandwidth. At the same time, the structure of direct-waveguide graphene modulator is designed to verify the absorption characteristics of graphene, and the absorption coefficient of graphene is calculated to be 0.01dB / um. According to the high Q characteristic of ring resonator, the theoretical modulation depth of graphene is in good agreement with the measured modulation depth. In view of this new type of electro-optic modulator, the modulation principle different from the traditional modulator is studied, and the quantitative model between the optical field distribution and the modulation depth of the material structure in the waveguide is established, and the material with the maximum modulation frequency parameter is analyzed. Structural constraints, the integrated fabrication of graphene and microring resonators, provides a theoretical, model and methodological basis for the design and manufacture of this new type of electro-optic modulator. It is of great significance to develop the integrated technology of electro-optic modulation-wavelength division multiplexer in the future on-chip optical interconnection system.
【学位授予单位】：中北大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN761
本文编号：2155628
[Abstract]:Multi-core, multi-chip packaging system architecture has become a major trend in the future development of integrated circuits, the size of the continuous reduction of inter-chip interconnection delay increases, loss increases. The optical interconnection system on silicon substrate has the advantages of high performance and easy integration. Silicon based electro-optic modulator is an important component of on-chip optical interconnection system. Its performance determines the data throughput rate, noise and power consumption between chips and cores. In this paper, a novel silicon based electro-optic modulator based on new graphite resonator and microring resonator is proposed, which combines the advantages of graphene wide band modulation, excellent electrical transmission performance and high Q value optical path amplification of micro ring resonator. We can achieve higher modulation depth and higher 3dB bandwidth. At the same time, the structure of direct-waveguide graphene modulator is designed to verify the absorption characteristics of graphene, and the absorption coefficient of graphene is calculated to be 0.01dB / um. According to the high Q characteristic of ring resonator, the theoretical modulation depth of graphene is in good agreement with the measured modulation depth. In view of this new type of electro-optic modulator, the modulation principle different from the traditional modulator is studied, and the quantitative model between the optical field distribution and the modulation depth of the material structure in the waveguide is established, and the material with the maximum modulation frequency parameter is analyzed. Structural constraints, the integrated fabrication of graphene and microring resonators, provides a theoretical, model and methodological basis for the design and manufacture of this new type of electro-optic modulator. It is of great significance to develop the integrated technology of electro-optic modulation-wavelength division multiplexer in the future on-chip optical interconnection system.
【学位授予单位】：中北大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN761
【参考文献】
相关期刊论文 前2条
1 仇宁,钟黎君,吴锦波;α氧化铝-铝合金的润湿现象及其机理[J];复合材料学报;1990年01期
2 商连弟，王宗兰，，揣效忠，孙柏瑜，王承武，焦秀莉;八种晶型氧化铝的研制与鉴别[J];化学世界;1994年07期
本文编号：2155628
本文链接：https://www.wllwen.com/kejilunwen/dianzigongchenglunwen/2155628.html
