模糊PID在铸锭炉温控系统中的应用研究
发布时间：2018-08-03 08:12
【摘要】：本文详细的分析了真空多晶硅铸锭炉工艺原理以及温度特性,在深入研究传统PID控制的基础上,对其进行改进,将模糊控制理论引入到PID控制中,以提高系统的自动化程度。设计了以模糊PID控制为基础的串级控制系统,并在matlab环境中对该算法进行仿真。本系统采用PLC可编程控制器作为系统的下位机,对炉温进行实时控制与信息采集,并与上位机进行数据交换,控温算法根据炉温的实际情况计算出合理的控制参数,再将控制信息发送给执行机构,执行机构通过调节可控硅的导通角来调节加热功率,实现对炉温的良好控制。最后,在多晶硅铸锭炉生产实验中对该系统进行工艺实验以验证该系统的控制性能。
[Abstract]:In this paper, the process principle and temperature characteristics of vacuum polysilicon ingot furnace are analyzed in detail. On the basis of deeply studying the traditional PID control, the fuzzy control theory is introduced into the PID control to improve the automation degree of the system. A cascade control system based on fuzzy PID control is designed and simulated in matlab environment. In this system, the PLC programmable controller is used as the lower computer of the system, the furnace temperature is controlled in real time and the information is collected, and the data is exchanged with the upper computer. The temperature control algorithm calculates the reasonable control parameters according to the actual condition of the furnace temperature. Then the control information is sent to the actuator, which adjusts the heating power by adjusting the conduction angle of SCR, and realizes the good control of furnace temperature. Finally, the control performance of the system is tested in the production experiment of polysilicon ingot furnace.
【学位授予单位】：河北科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TP273;TN304.12
本文编号：2161143
[Abstract]:In this paper, the process principle and temperature characteristics of vacuum polysilicon ingot furnace are analyzed in detail. On the basis of deeply studying the traditional PID control, the fuzzy control theory is introduced into the PID control to improve the automation degree of the system. A cascade control system based on fuzzy PID control is designed and simulated in matlab environment. In this system, the PLC programmable controller is used as the lower computer of the system, the furnace temperature is controlled in real time and the information is collected, and the data is exchanged with the upper computer. The temperature control algorithm calculates the reasonable control parameters according to the actual condition of the furnace temperature. Then the control information is sent to the actuator, which adjusts the heating power by adjusting the conduction angle of SCR, and realizes the good control of furnace temperature. Finally, the control performance of the system is tested in the production experiment of polysilicon ingot furnace.
【学位授予单位】：河北科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TP273;TN304.12
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