有滞留时间约束的集束型装备在线调度方法
发布时间：2018-08-09 16:03
【摘要】：针对半导体制造中有滞留时间约束的集束型装备,研究了客户紧急订单、返工、新产品试制等临时晶圆到达时的在线调度问题,提出了不改变已有晶圆调度的前提下,利用资源空闲时间区间的两层在线调度方法。外层算法通过改进量子进化算法用以优化临时晶圆加工排序;内层算法在给定晶圆排序的基础上,采用后向逐级递推的策略从资源的空闲时间区间获得可行解,利用逆序最大逐级回溯策略在可行解空间获得晶圆的加工开始时间。通过不同规模测试问题上的仿真实验和算法比较,验证了提出方法的有效性。
[Abstract]:For cluster equipment with retention time constraint in semiconductor manufacturing, the on-line scheduling problem of temporary wafer arrival such as customer emergency order, rework, new product trial production and so on is studied, and the premise of not changing the existing wafer scheduling is put forward. A two-layer online scheduling method based on resource idle time interval is proposed. The outer layer algorithm uses the improved quantum evolutionary algorithm to optimize the processing order of the temporary wafer, and the inner layer algorithm obtains the feasible solution from the free time interval of the resource by using the strategy of backward stepwise recursion on the basis of the given order of wafer. The starting time of wafer processing is obtained in the feasible solution space by using the reverse order maximum step by step backtracking strategy. The effectiveness of the proposed method is verified by simulation experiments and algorithm comparisons on different scale test problems.
【作者单位】： 大连外国语大学软件学院;辽宁警察学院公安信息系;
【基金】：国家自然科学基金(61501082) 辽宁省教育厅科学研究一般项目(L2015137,L2014011,L2014455,L2014456)
【分类号】：TN305;TP18
，
本文编号：2174608
[Abstract]:For cluster equipment with retention time constraint in semiconductor manufacturing, the on-line scheduling problem of temporary wafer arrival such as customer emergency order, rework, new product trial production and so on is studied, and the premise of not changing the existing wafer scheduling is put forward. A two-layer online scheduling method based on resource idle time interval is proposed. The outer layer algorithm uses the improved quantum evolutionary algorithm to optimize the processing order of the temporary wafer, and the inner layer algorithm obtains the feasible solution from the free time interval of the resource by using the strategy of backward stepwise recursion on the basis of the given order of wafer. The starting time of wafer processing is obtained in the feasible solution space by using the reverse order maximum step by step backtracking strategy. The effectiveness of the proposed method is verified by simulation experiments and algorithm comparisons on different scale test problems.
【作者单位】： 大连外国语大学软件学院;辽宁警察学院公安信息系;
【基金】：国家自然科学基金(61501082) 辽宁省教育厅科学研究一般项目(L2015137,L2014011,L2014455,L2014456)
【分类号】：TN305;TP18
，
本文编号：2174608
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