MOCVD原位监测系统软件设计

发布时间：2018-08-31 17:20

【摘要】：MOCVD设备作为LED产业链上游的重要设备之一,国内研发起步较晚,在其原位监测系统方面尤其短缺,本文以MOCVD原位监测系统为研究对象,旨在设计出一套可用于南昌大学自主研发的大型MOCVD设备的原位监测系统,通过硬件设计及软件开发,力图为外延片生长过程的观测,原位监测系统的思路拓展提供参照。本文主要工作内容包括硬件设计及软件开发。硬件设计中,通过多种芯片对比,选用DSP为SOC系统核心,完成局部电路设计及模块设计。继而对比串口通信,以太网通信及无线通信三种通信方式,选用合理方案。之后根据设备实际需求,使用程控放大器对微弱温度信号放大并整波,通过小波变换的滤波方式对信号的强噪声进行处理。加以整合后完成硬件部分的设计工作。软件开发主要从软件的整体结构,通信协议设计,数据库模块及数据处理模块展开工作。通信协议基于TCP协议及RS232通信协议分别进行改写,根据MOCVD数据传输特点,减少部分控制字,提高有用信号占比,提升传输效率。数据库模块对比了MSSQL,Fire Bird,ACCESS三种不同数据库,基于数据库处理速度及数据库兼容性选用ACCESS作为软件数据库,并有针对性的设计数据表结构。数据处理模块完成了从下位机上传的原始数据处理为可用的实际数据,数据筛选,可视化处理及数据压缩的工作。在完成以上工作后通过软件整体设计,建立可视化界面,完成可用于实际生产的MOCVD原位监测系统上位机软件。通过以上工作,完成原位监测系统样机并进行整体调试,调试结果良好,通信及数据传输稳定,速率满足工艺要求,上位机软件使用方便,数据图像清晰,监测效果良好。可以满足MOCVD设备生产应用中的需求。通过本文工作,精简了监控设备,降低MOCVD设备成本,优化数据处理过程,提升外延片生长过程的监控效率,给外延片生长工艺的优化提供了数据支持,为南昌大学自主研发的大型生产型MOCVD设备后续的优化设计提供参考。
[Abstract]:As one of the important equipments in the upstream of LED industry chain, MOCVD equipment started late in domestic research and development, especially in its in-situ monitoring system. This paper takes MOCVD in-situ monitoring system as the research object. The purpose of this paper is to design an in-situ monitoring system for large-scale MOCVD equipment independently developed by Nanchang University. Through hardware design and software development, this paper tries to provide a reference for the observation of the growth process of the epitaxial wafer and the extension of the train of thought of the in-situ monitoring system. The main work of this paper includes hardware design and software development. In the hardware design, DSP is chosen as the core of the SOC system through the comparison of various chips, and the local circuit design and module design are completed. Then compare the serial communication, Ethernet communication and wireless communication, choose a reasonable scheme. Then according to the actual demand of the equipment, the weak temperature signal is amplified and integrated by the programmable amplifier, and the strong noise of the signal is processed by the filtering method of wavelet transform. After the integration of the hardware part of the design. Software development mainly includes the whole structure of software, communication protocol design, database module and data processing module. The communication protocol is rewritten based on TCP protocol and RS232 protocol. According to the characteristics of MOCVD data transmission, the communication protocol can reduce some control words, improve the proportion of useful signals and improve the transmission efficiency. The database module compares three different databases of MSSQL,Fire Bird,ACCESS. Based on the database processing speed and database compatibility, ACCESS is chosen as the software database, and the data table structure is designed. The data processing module completes the processing of raw data uploaded from the lower computer to usable actual data, data filtering, visual processing and data compression. After the above work has been completed, the software of MOCVD in-situ monitoring system can be realized through the overall design of the software and the establishment of the visual interface. Through the above work, the prototype of the in-situ monitoring system is completed and debugged as a whole. The debugging results are good, the communication and data transmission are stable, the speed meets the technological requirements, the upper computer software is convenient to use, the data image is clear and the monitoring effect is good. Can meet the requirements of MOCVD equipment production applications. Through the work of this paper, the monitoring equipment is simplified, the cost of MOCVD equipment is reduced, the process of data processing is optimized, the monitoring efficiency of the growth process of the epitaxial wafer is improved, and the data support is provided for the optimization of the growth process of the epitaxial wafer. It provides a reference for further optimization design of large production MOCVD equipment independently developed by Nanchang University.
【学位授予单位】：南昌大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN304.055;TP311.52

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