热光可调谐滤波器及其关键技术研究
发布时间：2018-10-10 08:07
【摘要】：热光可调谐滤波器是一种新的光学器件,在光纤通信、激光调谐、光谱分析以及红外探测等诸多领域有着广泛的应用。这种器件利用材料的热光效应,可以实现中心波长移动的调谐滤波,具有调谐范围大、工艺制作方便以及结构简单的优点。针对滤波器性能实现器件结构设计、根据实验条件确定滤波器的工艺实现方案以及滤波器结构中各膜层的变化均是对器件性能产生影响的关键所在,因此,本文利用理论分析滤波器的结构特性,在此基础上进行优化和选择,并从工艺上考虑并消除器件多层膜结构带来的问题,制作出滤波器件进行测试,对热光滤波器的应用技术进行初步探究。首先,通过对器件性能要求的分析确定合适的滤波器材料,从理论出发根据所选材料的参数对滤波器结构进行分析,确定滤波器基本结构为具有半波长的中间腔层的单腔体,并对器件的热调谐性能进行了仿真研究,得到调谐灵敏度为0.1nm/℃。其次,通过分析器件对膜层的要求与工艺上实现的难点,解决多层膜沉积中的膜层应力、均匀性、各层接触以及粗糙度问题,确定出制备各膜层的工艺参数,对滤波器制作过程中可能引起的误差进行分析,在此基础上完成单元滤波器的工艺制备。制备的样品在1554 nm处获得72%的透射率,SEM图显示器件中各膜层均匀连续且致密,没有缺陷。利用搭建的热光器件测试平台对滤波器热调谐性能进行测试,其中心波长移动明显,调谐灵敏度达到0.072 nm/℃,并且在不同位置处热响应变化不大,表现出良好的热响应均匀性。最后,将单元滤波器通过光刻实现阵列化以探究热光调谐滤波器应用技术,并对滤波器性能进行了表征分析,滤波器阵列分布均匀,尺寸保持一致,并通过温度的变化控制滤波器的输出光强,在光开关与探测领域展现出良好的应用前景,为后续研究打下基础。
[Abstract]:Thermo-optical tunable filter is a new optical device, which has been widely used in many fields such as optical fiber communication, laser tuning, spectral analysis and infrared detection. By utilizing the thermo-optical effect of the material, the device can realize the tunable filter of center wavelength shift, which has the advantages of wide tuning range, convenient fabrication and simple structure. In order to realize the device structure design of filter performance, according to the experimental conditions, it is the key to determine the technological realization scheme of filter and the change of each film layer in the filter structure to influence the device performance. In this paper, the structure characteristics of the filter are analyzed theoretically, and the optimization and selection are carried out on this basis, and the problems caused by the multilayer membrane structure of the device are considered and eliminated in the process, and the filter parts are made for testing. The application technology of thermal optical filter is discussed. First of all, the suitable filter material is determined by analyzing the performance requirements of the device. The filter structure is analyzed according to the parameters of the selected material, and the basic structure of the filter is determined to be a single cavity with half a wavelength in the middle cavity. The thermal tuning performance of the device is simulated and the tuning sensitivity is obtained at 0.1nm/ 鈩，
本文编号：2261273
[Abstract]:Thermo-optical tunable filter is a new optical device, which has been widely used in many fields such as optical fiber communication, laser tuning, spectral analysis and infrared detection. By utilizing the thermo-optical effect of the material, the device can realize the tunable filter of center wavelength shift, which has the advantages of wide tuning range, convenient fabrication and simple structure. In order to realize the device structure design of filter performance, according to the experimental conditions, it is the key to determine the technological realization scheme of filter and the change of each film layer in the filter structure to influence the device performance. In this paper, the structure characteristics of the filter are analyzed theoretically, and the optimization and selection are carried out on this basis, and the problems caused by the multilayer membrane structure of the device are considered and eliminated in the process, and the filter parts are made for testing. The application technology of thermal optical filter is discussed. First of all, the suitable filter material is determined by analyzing the performance requirements of the device. The filter structure is analyzed according to the parameters of the selected material, and the basic structure of the filter is determined to be a single cavity with half a wavelength in the middle cavity. The thermal tuning performance of the device is simulated and the tuning sensitivity is obtained at 0.1nm/ 鈩，
本文编号：2261273
本文链接：https://www.wllwen.com/kejilunwen/dianzigongchenglunwen/2261273.html
