基于MEMS的非制冷红外成像系统高速成像的分析及研究
发布时间：2018-10-14 09:38
【摘要】：近年来,基于MEMS的光学读出式非制冷红外成像系统在国内外红外成像领域中成为了一个新的研究热点。这种红外成像系统具有不需制冷、无需扫描,体积小、重量轻、功耗低,分辨率高等优点,是目前非制冷红外探测器的重要发展方向之一。但国内外对于该成像系统的研究都集中在系统成像质量上,而对于系统的响应时间和成像的帧频问题目前并未有相关报道,FPA(focal plane array)帧频提高的研究将是今后的一个重要研究方向。光读出式微悬臂梁FPA红外成像系统的响应时间即是本文的研究重点。影响FPA成像速度的主要有两个因素,一方面是通过合理的设计和提高FPA的制作工艺,使得FPA的本征响应速度得到提高,另一方面是分析外界环境对FPA响应速度的影响,通过改变成像环境,来提高系统成像速度。本文从系统的响应时间入手,主要研究了如下内容:1)分析了玻璃衬底结构的FPA的响应时间大小,并结合该结构的FPA热响应时间的概念,分析了影响FPA响应速度的主要因素——热容和热导。讨论了FPA热响应时间与成像系统环境压强和温度之间的关系。2)应用脉冲响应测试法,设计实验测量FPA的热响应时间与系统环境压强和温度的关系。通过与计算值的对比,验证给出的理论模型。3)应用实验室现有设备对不同的动态热目标进行高速成像,提高成像帧频,最终得到该系统可实现的帧频极限,从而达到高帧频成像的目的。4)分别用可见光和非制冷焦平面阵列成像系统对同一热物体进行成像,采集到不同情况下的视频图像,从而证明了FPA红外成像系统可以捕捉更多的信息。基于以上几点的研究工作,充分证明光读出式双材料微悬臂梁红外焦平面阵列可以达到更高成像速度,这为进一步增强红外探测器的性能奠定了基础。
[Abstract]:In recent years, the optical readout uncooled infrared imaging system based on MEMS has become a new research hotspot in the field of infrared imaging at home and abroad. This infrared imaging system has the advantages of no refrigeration, no scanning, small volume, light weight, low power consumption, high resolution and so on. It is one of the important development directions of uncooled infrared detectors. However, the research of the imaging system is focused on the quality of the system at home and abroad, and the research on the response time of the system and the frame rate of the imaging has not been reported at present. It will be an important research direction in the future to improve the, FPA (focal plane array) frame rate. The response time of optical readout micro cantilever FPA infrared imaging system is the focus of this paper. There are two main factors that affect the imaging speed of FPA. On the one hand, the intrinsic response speed of FPA is improved by reasonably designing and improving the fabrication process of FPA. On the other hand, the influence of external environment on FPA response speed is analyzed. The imaging speed of the system is improved by changing the imaging environment. In this paper, the response time of the system is studied as follows: 1) the response time of the glass substrate structure FPA is analyzed, and the concept of the FPA thermal response time of the glass substrate structure is introduced. Heat capacity and thermal conductivity are the main factors that affect the response speed of FPA. The relationship between the thermal response time of FPA and the ambient pressure and temperature of the imaging system is discussed. 2) the relationship between the thermal response time of the FPA and the pressure and temperature of the system is designed by using the pulse response test method. By comparing with the calculated values, the given theoretical model is verified. 3) the high speed imaging of different dynamic thermal targets is carried out by using the existing equipment in the laboratory, and the frame rate of the imaging is improved, and the limits of the system can be obtained. In order to achieve the purpose of high frame rate imaging. 4) using the visible light and uncooled focal plane array imaging system to image the same hot object, and collecting the video images under different conditions. It is proved that FPA infrared imaging system can capture more information. Based on the above research work, it is fully proved that the infrared focal plane array of optical readout micro-cantilever beam can achieve higher imaging speed, which lays a foundation for further enhancing the performance of infrared detector.
【学位授予单位】：北京理工大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN215
本文编号：2270075
[Abstract]:In recent years, the optical readout uncooled infrared imaging system based on MEMS has become a new research hotspot in the field of infrared imaging at home and abroad. This infrared imaging system has the advantages of no refrigeration, no scanning, small volume, light weight, low power consumption, high resolution and so on. It is one of the important development directions of uncooled infrared detectors. However, the research of the imaging system is focused on the quality of the system at home and abroad, and the research on the response time of the system and the frame rate of the imaging has not been reported at present. It will be an important research direction in the future to improve the, FPA (focal plane array) frame rate. The response time of optical readout micro cantilever FPA infrared imaging system is the focus of this paper. There are two main factors that affect the imaging speed of FPA. On the one hand, the intrinsic response speed of FPA is improved by reasonably designing and improving the fabrication process of FPA. On the other hand, the influence of external environment on FPA response speed is analyzed. The imaging speed of the system is improved by changing the imaging environment. In this paper, the response time of the system is studied as follows: 1) the response time of the glass substrate structure FPA is analyzed, and the concept of the FPA thermal response time of the glass substrate structure is introduced. Heat capacity and thermal conductivity are the main factors that affect the response speed of FPA. The relationship between the thermal response time of FPA and the ambient pressure and temperature of the imaging system is discussed. 2) the relationship between the thermal response time of the FPA and the pressure and temperature of the system is designed by using the pulse response test method. By comparing with the calculated values, the given theoretical model is verified. 3) the high speed imaging of different dynamic thermal targets is carried out by using the existing equipment in the laboratory, and the frame rate of the imaging is improved, and the limits of the system can be obtained. In order to achieve the purpose of high frame rate imaging. 4) using the visible light and uncooled focal plane array imaging system to image the same hot object, and collecting the video images under different conditions. It is proved that FPA infrared imaging system can capture more information. Based on the above research work, it is fully proved that the infrared focal plane array of optical readout micro-cantilever beam can achieve higher imaging speed, which lays a foundation for further enhancing the performance of infrared detector.
【学位授予单位】：北京理工大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN215
【参考文献】
相关期刊论文 前1条
1 周立伟;夜视技术的进展与展望[J];激光与光电子学进展;1995年04期
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