不同pH值下过氧化氢对Ru的CMP的影响
发布时间：2018-10-22 20:13
【摘要】：研究了以H_2O_2为氧化剂,不同的pH值(2,4,6,8,10)对Ru的去除速率(vRu)和静态腐蚀速率(vSER)的影响,同时用电化学的方法研究了H_2O_2和pH值对Ru表面的动态极化曲线的影响,利用原子力显微镜对每次抛光前后的微观形貌进行了观察。实验结果表明:随着pH值的逐渐增大,Ru的去除速率和静态腐蚀速率也会随之升高,碱性条件下的vRu和vSER明显高于酸性条件。当pH值为2时,Ru表面生成致密的钝化层,阻碍了化学作用,vRu(0.31 nm/min)和vSER(0nm/min)最低;当pH值为4和6时,会生成可溶性的RuO_4,提高了化学作用,vRu和vSER相对提高;当pH值为8和10时,生成RuO_4~(2-)和RuO_4~-化学作用明显,vRu和vSER显著提高;当pH值为10时,vRu(23.544 nm/min)和vSER(2.88 nm/min)最高。同时,随着pH值的逐渐增大,Ru表面的腐蚀电位(Ecorr)不断减小,腐蚀电流密度(Icorr)不断增大,当pH值为10时,Ecorr达到最低值(0.094 V),Icorr为最高值(1.37×10~(-3)A/cm~(-2))。
[Abstract]:The effects of different pH values (2 ~ 4 ~ 6 ~ (6 ~ 8 ~ 10) on the removal rate of Ru (vRu) and static corrosion rate (vSER) were studied by using H_2O_2 as oxidant. The effects of H_2O_2 and pH values on the dynamic polarization curves of Ru surface were also studied by electrochemical method. Atomic force microscope (AFM) was used to observe the morphology of each polishing. The experimental results show that the removal rate and static corrosion rate of Ru increase with the increase of pH value. The vRu and vSER in alkaline condition are obviously higher than those in acidic condition. When pH value is 2, dense passivating layer is formed on the surface of Ru, which hinders the chemical action of, vRu (0.31 nm/min) and vSER (0nm/min) lowest, when pH value is 4 and 6, soluble RuO_4, increases chemically, vRu and vSER increase relatively, and when pH value is 8 and 10:00, The chemical effects of RuO_4~ (2-) and RuO_4~- were obvious, vRu and vSER were significantly increased, and when pH was 10:00, vRu (23.544 nm/min) and vSER (2.88 nm/min) were the highest. At the same time, with the increase of pH value, the corrosion potential (Ecorr) of Ru surface decreases and the corrosion current density (Icorr) increases. When pH value is 10:00, Ecorr reaches the lowest value (0.094 V), Icorr is the highest value (1.37 脳 10 ~ (-3) A / cm ~ (-2).
【作者单位】： 河北工业大学电子信息工程学院;天津市电子材料与器件重点实验室;
【基金】：国家中长期科技发展规划02科技重大专项资助项目(2016ZX02301003-004-007) 国家科技重大专项子课题河北省青年自然科学基金资助项目(F2015202267) 河北省教育厅基金资助项目(QN2014208) 河北省自然科学基金资助项目(E2013202247) 河北工业大学优秀青年科技创新基金资助项目(2015007)
【分类号】：TN305.2
，
本文编号：2288188
[Abstract]:The effects of different pH values (2 ~ 4 ~ 6 ~ (6 ~ 8 ~ 10) on the removal rate of Ru (vRu) and static corrosion rate (vSER) were studied by using H_2O_2 as oxidant. The effects of H_2O_2 and pH values on the dynamic polarization curves of Ru surface were also studied by electrochemical method. Atomic force microscope (AFM) was used to observe the morphology of each polishing. The experimental results show that the removal rate and static corrosion rate of Ru increase with the increase of pH value. The vRu and vSER in alkaline condition are obviously higher than those in acidic condition. When pH value is 2, dense passivating layer is formed on the surface of Ru, which hinders the chemical action of, vRu (0.31 nm/min) and vSER (0nm/min) lowest, when pH value is 4 and 6, soluble RuO_4, increases chemically, vRu and vSER increase relatively, and when pH value is 8 and 10:00, The chemical effects of RuO_4~ (2-) and RuO_4~- were obvious, vRu and vSER were significantly increased, and when pH was 10:00, vRu (23.544 nm/min) and vSER (2.88 nm/min) were the highest. At the same time, with the increase of pH value, the corrosion potential (Ecorr) of Ru surface decreases and the corrosion current density (Icorr) increases. When pH value is 10:00, Ecorr reaches the lowest value (0.094 V), Icorr is the highest value (1.37 脳 10 ~ (-3) A / cm ~ (-2).
【作者单位】： 河北工业大学电子信息工程学院;天津市电子材料与器件重点实验室;
【基金】：国家中长期科技发展规划02科技重大专项资助项目(2016ZX02301003-004-007) 国家科技重大专项子课题河北省青年自然科学基金资助项目(F2015202267) 河北省教育厅基金资助项目(QN2014208) 河北省自然科学基金资助项目(E2013202247) 河北工业大学优秀青年科技创新基金资助项目(2015007)
【分类号】：TN305.2
，
本文编号：2288188
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