基于MEMS技术太赫兹波段超材料器件的研究

发布时间：2018-11-03 08:26

【摘要】：超材料（Metamaterial）是一种由周期性亚波长金属谐振的单元阵列组成的人工复合型电磁材料，通过合理的设计单元结构可实现特殊的电磁特性，主要包括隐身、完美吸和负折射等特性。目前，随着太赫兹技术的快速发展，太赫兹超材料器件已成为当前科研的研究热点，在滤波器、吸收器、偏振器、太赫兹成像、光谱和生物传感器等领域有着广阔的应用前景。本文提出了基于MEMS技术太赫兹超材料器件的研究，包括可实现带通与低通滤波的对称双开口环（DS-SRR）滤波器、生物传感器以及可重构电磁诱导透明超材料器件。本文主要研究工作如下：（1）设计和制备一种对称双开口环谐振器周期阵列（DS-SRR）太赫兹超材料滤波器。利用CST Microwave Studio对滤波器电磁性能进行模拟分析；为了提高超材料器件的透射率，，采用MEMS技术在高阻硅和柔性PET薄膜基底上制备滤波器实验样品，并进行相应的电磁性能测试，结果证明实验验证和模拟仿真相一致。（2）制备单开口环结构、不对称双开口环结构和交错结构三种超材料器件微流控芯片。实验主要包括CST模拟分析、MEMS工艺制备、PDMS封装模具制备、芯片键合及生物修饰等过程。修饰芯片的样品为GGT-2抗体（100μg/ml），且修饰前后THz-TDS透射测试结果表明，在0.4-1.2THz频段内，不对称双开口环结构共振峰最大频移为19GHz，灵敏度最优秀。（3）利用CST软件对电磁诱导透明超材料结构进行模拟仿真。当Δx为17μm时，电磁诱导透明效应最强，且透明窗口共振峰位置为1.449THz，幅度为75.7%。通过分析该结构的共振峰产生机理、太赫兹透射光谱、表面电流分布以及相位和延迟特性，从理论数据上验证该EIT效应的动态调谐特性。
[Abstract]:Metamaterial (Metamaterial) is a kind of artificial composite electromagnetic material composed of periodic subwavelength metal resonance element array. Special electromagnetic properties can be realized by reasonable design of unit structure, including stealth. Perfect absorption and negative refraction. At present, with the rapid development of terahertz technology, terahertz supermaterial devices have become the focus of current scientific research, and have broad application prospects in the fields of filter, absorber, polarizer, terahertz imaging, spectrum and biosensor. This paper presents the research of terahertz metamaterial devices based on MEMS technology, including symmetrical double open loop (DS-SRR) filters with bandpass and low pass filters, biosensors and reconfigurable electromagnetically induced transparent metamaterials. The main work of this paper is as follows: (1) A symmetric double-open ring resonator periodic array (DS-SRR) terahertz supermaterial filter is designed and fabricated. The electromagnetic performance of the filter is simulated and analyzed by CST Microwave Studio. In order to improve the transmissivity of metamaterial devices, the filter samples were prepared on high resistance silicon and flexible PET thin film substrates by MEMS technique, and the corresponding electromagnetic properties were tested. The results show that the experimental results are consistent with the simulation results. (2) three kinds of microfluidic chips with single opening ring structure, asymmetric double open ring structure and staggered structure are fabricated. The experiments mainly include CST simulation analysis, MEMS process preparation, PDMS packaging die preparation, chip bonding and biological modification. The sample of the modified chip is GGT-2 antibody (100 渭 g/ml), and the THz-TDS transmission test before and after modification shows that the maximum frequency shift of the resonance peak of asymmetric double open ring structure is 19GHz in the 0.4-1.2THz band, and the sensitivity is the best. (3) CST software is used to simulate the structure of electromagnetic induced transparent supermaterial. When 螖 x is 17 渭 m, the electromagnetically induced transparency effect is the strongest, and the resonant peak position of transparent window is 1.449THz, the amplitude is 75.7. By analyzing the mechanism of resonance peak generation, terahertz transmission spectrum, surface current distribution, phase and delay characteristics, the dynamic tuning characteristics of the EIT effect are verified from theoretical data.
【学位授予单位】：哈尔滨理工大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN713;TP212.3

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