半导体激光阵列外腔反馈光谱合束系统研究

发布时间：2018-11-04 15:31

【摘要】：半导体激光器光谱合束技术因其能够获得高功率、高功率密度、高光束质量的激光输出同时又具有半导体激光器体积小、质量轻、寿命长、转换效率高等优点已成为国际上研究的热点。整个外腔光谱合束系统通过衍射光栅的色散特性将所有激光单元的光束进行合束,因此衍射光栅是光谱合束技术的关键。本论文基于半导体激光器光谱合束技术的原理和衍射光栅的原理,研究了适用于半导体激光阵列外腔反馈光谱合束系统的亚波长熔融石英透射光栅。利用Rsoft软件设计并优化了940nm波段亚波长熔融石英透射光栅,获得了91.2%(TE模式)的衍射效率。根据仿真结果,选取和仿真参数相近的商用透射光栅实现了940nm半导体激光阵列外腔反馈光谱合束光源,获得了连续功率46W,谱宽宽度为14.36nm的激光输出。基于光栅的设计参数,研究了熔融石英透射光栅的制作工艺,结合全息曝光和ICP刻蚀等工艺,制作了周期为530nm、占空比为0.5和脊高为300nm的熔融石英透射光栅。
[Abstract]:Because of its ability to obtain high power, high power density and high beam quality laser output, semiconductor laser has small volume, light weight and long lifetime. High conversion efficiency and other advantages have become the focus of international research. The whole external cavity spectral beam system combines the beams of all the laser elements through the dispersion characteristics of the diffraction grating, so the diffraction grating is the key of the spectral beam matching technology. Based on the principle of spectral beam bonding and diffraction grating of semiconductor laser, the subwavelength fused quartz transmission grating suitable for semiconductor laser array external cavity feedback spectral beam matching system is studied in this paper. The subwavelength fused quartz transmission grating in 940nm band was designed and optimized by using Rsoft software. The diffraction efficiency of 91.2% (TE mode) was obtained. According to the simulation results, we select the commercial transmission grating which is similar to the simulation parameters to realize the 940nm semiconductor laser array external cavity feedback spectral beam light source. The laser output with continuous power of 46W and spectral width of 14.36nm is obtained. Based on the design parameters of the grating, the fabrication process of fused quartz transmission grating is studied. The fused quartz transmission grating with a period of 530 nm, duty cycle 0.5 and ridge height of 300nm is fabricated by combining holographic exposure and ICP etching.
【学位授予单位】：长春理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN248.4

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