氮化铝兰姆波MEMS谐振器在滤波器及传感器方面的应用研究
发布时间：2018-11-22 09:36
【摘要】：本文介绍了氮化铝兰姆波MEMS谐振器以及基于该谐振器的带通滤波器、传感器的设计与制造。氮化铝兰姆波MEMS谐振器是一种新型压电谐振器,其制造工艺与集成电路工艺兼容,且可实现多频率器件的单片集成;其品质因子较高,可应用于振荡器、滤波器及传感器的设计中,故其相关研究受到了广泛关注。本文首先介绍了氮化铝兰姆波谐振器的工作原理,对其设计和制造进行了深入研究。研究表明谐振器尺寸对其性能系数(FOM)有较大影响,谐振器的最优设计尺寸可使FOM达到最佳。基于该规律,本文设计制造了基于该谐振器的中频窄带滤波器,该滤波器表现出了较低的插入损耗和陡峭的滚降。之后,本文继续优化了滤波器设计。通过结合电容电感网络,滤波器实现了与50欧姆射频系统的匹配;本文进一步将兰姆波滤波器与电容集成,系统整体的面积进一步缩小,电路设计进一步简化。另外,本文还研究了兰姆波谐振器作为传感器的特征,尤其是其在液相环境下的表现。为减小液体对谐振器性能的削弱,本文将微流体技术与谐振器集成,这样,传感器不仅可以实现极小量样本检测,其优良性能还可以得到维持,保证传感器拥有更小的探测极限和更高的灵敏度。
[Abstract]:In this paper, the design and fabrication of MEMS resonator based on aluminum nitride and its bandpass filter and sensor are introduced. Aluminum nitride Lamb wave MEMS resonator is a new type of piezoelectric resonator. Its fabrication process is compatible with integrated circuit technology, and it can realize monolithic integration of multi-frequency devices. Because of its high quality factor, it can be used in the design of oscillator, filter and sensor. In this paper, the working principle of aluminum nitride Lamb wave resonator is introduced, and its design and manufacture are studied. The results show that the size of the resonator has a great influence on the performance coefficient (FOM), and the optimum design size of the resonator can make the FOM achieve the best. Based on this rule, the intermediate frequency narrow band filter based on the resonator is designed and manufactured. The filter shows low insertion loss and steep roll down. After that, this paper continues to optimize the filter design. By combining the capacitive inductance network, the filter is matched with the 50 ohms RF system, the Lamb wave filter is further integrated with the capacitor, the whole area of the system is further reduced, and the circuit design is further simplified. In addition, the characteristics of Lamb wave resonator as a sensor, especially its performance in liquid phase environment, are studied. In order to reduce the weakening of the performance of the resonator by liquid, the micro-fluid technology is integrated with the resonator in this paper. In this way, the sensor can not only realize the minimal sample detection, but also maintain its excellent performance. Ensure that the sensor has a smaller detection limit and higher sensitivity.
【学位授予单位】：天津大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN713;TP212
本文编号：2348889
[Abstract]:In this paper, the design and fabrication of MEMS resonator based on aluminum nitride and its bandpass filter and sensor are introduced. Aluminum nitride Lamb wave MEMS resonator is a new type of piezoelectric resonator. Its fabrication process is compatible with integrated circuit technology, and it can realize monolithic integration of multi-frequency devices. Because of its high quality factor, it can be used in the design of oscillator, filter and sensor. In this paper, the working principle of aluminum nitride Lamb wave resonator is introduced, and its design and manufacture are studied. The results show that the size of the resonator has a great influence on the performance coefficient (FOM), and the optimum design size of the resonator can make the FOM achieve the best. Based on this rule, the intermediate frequency narrow band filter based on the resonator is designed and manufactured. The filter shows low insertion loss and steep roll down. After that, this paper continues to optimize the filter design. By combining the capacitive inductance network, the filter is matched with the 50 ohms RF system, the Lamb wave filter is further integrated with the capacitor, the whole area of the system is further reduced, and the circuit design is further simplified. In addition, the characteristics of Lamb wave resonator as a sensor, especially its performance in liquid phase environment, are studied. In order to reduce the weakening of the performance of the resonator by liquid, the micro-fluid technology is integrated with the resonator in this paper. In this way, the sensor can not only realize the minimal sample detection, but also maintain its excellent performance. Ensure that the sensor has a smaller detection limit and higher sensitivity.
【学位授予单位】：天津大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN713;TP212
【共引文献】
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