LED高速高精直线往复式微位移工作台结构设计研究

发布时间：2018-11-24 08:09

【摘要】：随时LED产业的发展及其良好的应用性能得到各个国家和方面的重视,这时LED设备研发的重要性也凸显了出来。作为LED设备机械结构中很重要组成部分--直线往复式微位移工作台,其结构设计研究也就具有了很重要的地位。本文通过研究市面已经出现的LED设备和专利分析了已存在的LED高速高精直线往复式微位移平台结构的优点与缺点并结合LED设备直线往复式微运动模块的特性提出了结构设计的需求,为本文后续的结构设计和实验研究铺平了道路。基于工程应用的成本和研发周期的考虑,在LED检测机探针微运动、LED分选机摆臂微运动和顶针微运动这三个微运动模块首先采用了传统的电机驱动机械传动的方案进行了具体结构设计,这三个微运动模块的直线往复式微位移平台已经在研发成功并面市的设备中取得良好的应用。为了满足LED设备进一步升级优化的需求,那么作为设备中的重要机械结构--直线往复式微位移工作台必须进行进一步的研究,考虑到压电陶瓷具有优良的微位移输出性能,本文还将对压电陶瓷在LED设备中的应用进行研究。根据不同的压电陶瓷的特点以及LED设备机械结构的特点,LED检测机微运动模块采用了压电陶瓷弯曲致动片驱动探针直线往复式运动的新方案,并在本文中对压电陶瓷弯曲致动片驱动探针的控制方法进行了实验研究并取得良好的效果。由于LED分选机对微位移工作台的输出位移的行程要求较高,目前市面上已有的压电陶瓷不能直接满足其对输出位移的需求,因此本文设计了基于柔性铰链的微位移放大机构,利用有限元分析法确定了微位移放大机构的关键参数。本文还对由堆叠型压电陶瓷和基于柔性铰链的微位移放大机构组成微位移放大致动器进行了驱动摆臂和顶针的单项实验和相关研究工作,并取得了一定研究成果。
[Abstract]:At any time, the development of LED industry and its good application performance have been paid attention to in all countries and aspects. At this time, the importance of LED equipment R & D has also been highlighted. As an important part of the mechanical structure of LED equipment, the linear reciprocating micro-displacement table has a very important position in structural design. In this paper, the advantages and disadvantages of the existing LED high speed and high precision linear reciprocating micro displacement platform are analyzed by studying the existing LED devices and patents, and the characteristics of the linear reciprocating micro motion module of LED equipment are proposed. The requirements of structural design, It paves the way for the subsequent structural design and experimental research in this paper. Based on the cost of engineering application and the consideration of the research and development cycle, the probe micromotion in the LED detector, The three micro-motion modules of the LED separator, namely, the swing arm micro-motion and the thimble micro-motion, are designed by the traditional scheme of the motor driven mechanical transmission. The linear reciprocating micro-displacement platform of these three micro-motion modules has been successfully developed and marketed with good applications. In order to meet the requirements of further upgrading and optimization of LED equipment, as an important mechanical structure in the equipment, the linear reciprocating micro-displacement table must be further studied, considering that piezoelectric ceramics have excellent micro-displacement output performance. The application of piezoelectric ceramics in LED equipment is also studied in this paper. According to the characteristics of different piezoelectric ceramics and the characteristics of mechanical structure of LED equipment, the micro-motion module of LED detector adopts a new scheme of linear reciprocating motion driven by piezoelectric ceramic bending actuator. In this paper, the control method of piezoelectric ceramic bending actuator driving probe has been studied experimentally and good results have been obtained. Due to the high requirement of LED separator for the output displacement of the micro-displacement table, the piezoelectric ceramics available on the market can not directly meet the needs of the output displacement, so a micro-displacement amplification mechanism based on the flexure hinge is designed in this paper. The key parameters of micro-displacement amplification mechanism are determined by finite element analysis. In this paper, the single experiment and related research work on the actuating pendulum arm and thimble are also carried out, which are composed of stacked piezoelectric ceramics and micro-displacement amplifier based on flexure hinge, and some research results have been obtained.
【学位授予单位】：华中科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN312.8

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