光TSV损耗特性与耦合特性的研究

发布时间：2018-11-27 14:55

【摘要】：TSV(Through-Silicon Vias,硅穿孔)技术能够显著缩小芯片层之间导线的长度,因此其成为了三维集成电路技术的核心技术。光TSV兼有光波导和电TSV的优点,与电TSV相比,光TSV有着更大的带宽、更小的寄生效应及更强的抗干扰能力。因此,光TSV已经成为三维集成技术的另一个新领域。光TSV中诸如芯层直径、纵向高度以及光源波长等因素会对光TSV的损耗特性产生显著影响。另外,光TSV又是基于TSV工艺的,所以TSV工艺会引起的缺陷同样会影响着光TSV的性能。为了尽可能提高光TSV的集成度,光TSV之间的间距应该尽可能的小。但是当光TSV之间的间距缩小的时候,光TSV之间的耦合效应也会随之增大。本文使用RSOFT软件对光TSV的损耗以及耦合特性开展了研究。在光TSV的损耗特性方面,本文首先开展了光TSV结构参数及光源波长对损耗特性的影响研究。仿真结果显示,光TSV的传输损耗随着芯层直径的增大而减小,随着光源波长以及纵向高度的增大而增大。其次,本文开展了不同侧壁条件下光TSV的损耗特性研究。结果表明,侧壁倾斜程度越高,光TSV传输损耗越大,而且损耗程度与入射端面的选择有关;侧壁粗糙的光TSV的传输损耗比侧壁光滑的光TSV的大;对于侧壁是粗糙且倾斜的光TSV来说,侧壁粗糙度相对于侧壁倾斜度来说对光TSV的传输损耗的影响更小。在光TSV的耦合特性方面,本文首先开展了相邻光TSV之间的间距对耦合特性的影响研究。仿真结果显示,两个相邻光TSV的耦合效应随着它们的空间距离的增大而减小。其次,本文开展了不同侧壁条件下光TSV的耦合特性研究。结果表明,光滑的光TSV的耦合效应比粗糙类型全为凸起和全为凹陷的光TSV都要小;在间距较小时,光滑的光TSV的耦合效应比粗糙类型全为凸起和全为凹陷的光TSV要小得多;反向入射的侧壁倾斜的光TSV对相邻光TSV的耦合效应的影响比正向入射的侧壁倾斜的光TSV的大;粗糙类型全为凹陷的光TSV比粗糙类型全为凸起的光TSV对相邻光TSV具有更大的耦合效应;正向入射的侧壁粗糙倾斜的光TSV对相邻光TSV的耦合效应比反向入射的侧壁粗糙倾斜的光TSV的大;粗糙的侧壁与正向入射方式的综合效应加大了正向入射的侧壁粗糙倾斜的光TSV对相邻光TSV的耦合效应。
[Abstract]:TSV (Through-Silicon Vias, silicon perforation) technology can significantly reduce the length of wires between chip layers, so it has become the core technology of 3D integrated circuit technology. Optical TSV has the advantages of both optical waveguide and electric TSV. Compared with electric TSV, optical TSV has more bandwidth, less parasitic effect and stronger anti-jamming ability. Therefore, optical TSV has become another new area of 3D integration technology. The loss characteristics of optical TSV are significantly affected by such factors as core diameter, longitudinal height and light source wavelength. In addition, the optical TSV is based on the TSV process, so the defects caused by the TSV process will also affect the performance of the optical TSV. In order to improve the integration of optical TSV as much as possible, the distance between optical TSV should be as small as possible. However, when the spacing between TSV decreases, the coupling effect between optical TSV will increase. In this paper, RSOFT software is used to study the loss and coupling characteristics of optical TSV. In the aspect of loss characteristics of optical TSV, the influence of optical TSV structure parameters and light source wavelength on the loss characteristics is studied in this paper. The simulation results show that the transmission loss of optical TSV decreases with the increase of core diameter and increases with the increase of light source wavelength and longitudinal height. Secondly, the loss characteristics of optical TSV under different side-wall conditions are studied. The results show that the higher the side wall is, the greater the transmission loss of TSV is, and the loss degree is related to the selection of the incident end face, the transmission loss of light TSV with rough side wall is higher than that with smooth side wall light TSV. For the light TSV whose sidewall is rough and inclined, the effect of sidewall roughness on the transmission loss of optical TSV is less than that of sidewall inclination. In terms of the coupling characteristics of optical TSV, the influence of the spacing between adjacent optical TSV on the coupling characteristics is studied in this paper. The simulation results show that the coupling effect of two adjacent TSV decreases with the increase of their spatial distance. Secondly, the coupling characteristics of optical TSV under different side-wall conditions are studied. The results show that the coupling effect of smooth light TSV is smaller than that of rough type light TSV, and the coupling effect of smooth light TSV is much smaller than that of rough type light TSV. The coupling effect of the side-wall tilted TSV on the adjacent light TSV is greater than that of the positive incident side-wall tilted light TSV. The light TSV with the rough type is all concave and has more coupling effect on the adjacent light TSV than the light TSV with the rough type all protruding. The coupling effect of the TSV on the adjacent optical TSV is larger than that of the TSV with the rough oblique side wall on the positive incident side wall, and the coupling effect of the optical TSV on the adjacent optical TSV is larger than that on the side wall with the opposite incidence. The combined effect of the rough side wall and the positive incident mode increases the coupling effect of the coarse oblique optical TSV on the adjacent optical TSV.
【学位授予单位】：西安电子科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN40;TP319

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