面向电子封装装备制造的若干关键技术研究及应用
发布时间：2018-12-06 18:12
【摘要】：随着电子信息产业的高速发展,高性能电子封装装备成为众多半导体器件制造企业的重大需求。我国自主精密电子封装装备的研发有待于在设计理论与方法上取得突破。针对高性能封装装备在大行程、高速、高加速度运动与高精度定位的综合性能指标方面的苛刻要求,深入开展其核心关键技术的创新设计与理论研究,提出一种解耦式高速XY并联运动平台,分析平台的工作空间及黎曼度量评价方法;针对高速轻载执行机构在其运动及定位过程中振动惯性能快速衰减难题,提出基于惯性能时空分布最优的结构优化和运动规划新方法,可有效减少执行机构末端和运动末段的能量聚积,实现高速运动条件下的快速精密定位;面向高性能封装装备对控制系统的高响应速度和精密定位精度需求,提出一种多核多任务控制器设计与驱控一体化的控制系统方案,可有效提高控制系统的实时性、可靠性和协调性;同时,开发高速精密封装装备闭环控制所需的宏微复合绝对光栅检测装置,实现高速运动过程执行机构位置信息的采集与反馈,保证高速运动过程的精密定位;同时研究键合工艺过程的劈刀运动轨迹及键合界面的冲击力影响因素。综合各项技术研究成果,成功开发出高性能引线键合机装备。
[Abstract]:With the rapid development of electronic information industry, high-performance electronic packaging equipment has become a major demand of many semiconductor device manufacturers. The research and development of autonomous precision electronic packaging equipment in China needs to make a breakthrough in design theory and method. Aiming at the harsh requirements of high performance packaging equipment in the aspects of long stroke, high speed, high acceleration motion and high precision positioning, the innovation design and theoretical research of its core key technology are carried out. A decoupled high-speed XY parallel motion platform is proposed. The workspace of the platform and the Riemann metric evaluation method are analyzed. Aiming at the problem of fast attenuation of inertial energy of high speed light load actuator during its motion and positioning, a new method of structure optimization and motion planning based on the optimal spatial and temporal distribution of inertial energy is proposed. It can effectively reduce the energy accumulation at the end of the actuator and the end of the movement, and realize the fast and precise positioning under the condition of high speed motion. In order to meet the requirement of high response speed and precision positioning precision for high performance packaging equipment, a control system scheme integrating multi-core and multi-task controller design and drive control is proposed, which can effectively improve the real-time performance of the control system. Reliability and coordination; At the same time, the macro and micro composite absolute grating detection device for closed loop control of high speed precision packaging equipment is developed to collect and feedback the position information of the executing mechanism during the high speed motion process, and to ensure the precise positioning of the high speed motion process. At the same time, the moving path of the splitter and the factors affecting the impact force of the bonding interface are studied. Comprehensive technical research results, the successful development of high-performance lead bonding machine equipment.
【作者单位】： 广东工业大学机械装备制造与控制技术教育部重点实验室;香港科技大学电子与计算机工程系;
【基金】：国家自然科学基金(51675106,91648108) 广东省科技计划(2015B010104008,2015B010104006) 广东省自然科学基金(2015A030312008,2016A03030801)资助项目
【分类号】：TN05
[Abstract]:With the rapid development of electronic information industry, high-performance electronic packaging equipment has become a major demand of many semiconductor device manufacturers. The research and development of autonomous precision electronic packaging equipment in China needs to make a breakthrough in design theory and method. Aiming at the harsh requirements of high performance packaging equipment in the aspects of long stroke, high speed, high acceleration motion and high precision positioning, the innovation design and theoretical research of its core key technology are carried out. A decoupled high-speed XY parallel motion platform is proposed. The workspace of the platform and the Riemann metric evaluation method are analyzed. Aiming at the problem of fast attenuation of inertial energy of high speed light load actuator during its motion and positioning, a new method of structure optimization and motion planning based on the optimal spatial and temporal distribution of inertial energy is proposed. It can effectively reduce the energy accumulation at the end of the actuator and the end of the movement, and realize the fast and precise positioning under the condition of high speed motion. In order to meet the requirement of high response speed and precision positioning precision for high performance packaging equipment, a control system scheme integrating multi-core and multi-task controller design and drive control is proposed, which can effectively improve the real-time performance of the control system. Reliability and coordination; At the same time, the macro and micro composite absolute grating detection device for closed loop control of high speed precision packaging equipment is developed to collect and feedback the position information of the executing mechanism during the high speed motion process, and to ensure the precise positioning of the high speed motion process. At the same time, the moving path of the splitter and the factors affecting the impact force of the bonding interface are studied. Comprehensive technical research results, the successful development of high-performance lead bonding machine equipment.
【作者单位】： 广东工业大学机械装备制造与控制技术教育部重点实验室;香港科技大学电子与计算机工程系;
【基金】：国家自然科学基金(51675106,91648108) 广东省科技计划(2015B010104008,2015B010104006) 广东省自然科学基金(2015A030312008,2016A03030801)资助项目
【分类号】：TN05
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