数字硅陀螺中带通调制器的设计
发布时间：2018-12-14 06:05
【摘要】：随着半导体技术与集成电路工艺的发展,数字硅陀螺在众多领域扮演着越来越重要的角色。数字硅陀螺是机械陀螺利用MEMS微型化后得到的硅结构,可以用于敏感加速度。由于通常的加速度信号通常通过硅结构中的机械位移体现,因此,读取该机械位移,并且将其转化为数字电路可以处理的数字信号,成为了数字硅陀螺的接口电路的主要功能。目前,数字硅陀螺的接口电路的研究是研究所与高校的研究热点,但是目前的数字硅陀螺往往存在着采样率过高,功耗较大的缺点,因此,利用带通调制器结构对数字硅陀螺信号进行处理,对于降低功耗,抑制噪声方面具有着重要的意义。本课题首先分析了数字硅陀螺敏感加速度的原理,并且分析了sigma-delta调制器调制信号的基本原理,即过采样调制器通过提高采样频率,降低带内噪声,提高信噪比。由于本课题需要实现带通调制器的中心频率可以调频的功能,因此设计了可以通过改变关键参数,改变噪声传递函数零点的带通调制器。在对数字硅陀螺与带通调制器进行数学行为级建模后,在Simulink环境中对工作在各个中心频率的带通调制器进行了仿真,实现了较高的性能。在Simulink环境仿真的基础上,利用0.5um CMOS的工艺条件,对带通调制器的各个模块进行了设计,设计了运算放大器、量化器电路、相位补偿电路、DAC电路、时钟信号产生电路、基准电路以及谐振器电路,并对各个模块进行了仿真,并且将关键的谐振器电路以开关电容电路的形式实现;总体的电路级仿真结果显示,在4KHZ、6KHZ、8KHZ、10KHZ、12KHZ处都可以将噪底抑制在-120dB,有效位数达到10bit以上。
[Abstract]:With the development of semiconductor technology and integrated circuit technology, digital silicon gyroscope plays a more and more important role in many fields. Digital silicon gyroscope is a silicon structure obtained by using MEMS miniaturization, which can be used for sensitive acceleration. Because the usual acceleration signal is usually reflected by the mechanical displacement in the silicon structure, reading the mechanical displacement and converting it into a digital signal which can be processed by the digital circuit has become the main function of the interface circuit of the digital silicon gyroscope. At present, the research of interface circuit of digital silicon gyroscope is the research hotspot of research institute and university, but the current digital silicon gyroscope often has the shortcoming of high sampling rate and high power consumption. The signal processing of digital silicon gyroscope using band-pass modulator structure is of great significance in reducing power consumption and suppressing noise. In this paper, the principle of sensitive acceleration of digital silicon gyroscope is analyzed, and the basic principle of modulation signal of sigma-delta modulator is analyzed, that is, over-sampling modulator can reduce the in-band noise and improve the signal-to-noise ratio by increasing the sampling frequency. Because the central frequency of the band-pass modulator can be modulated by changing the key parameters and changing the zero point of the noise transfer function, a band-pass modulator is designed. After modeling digital silicon gyroscope and band-pass modulator in mathematical behavior level, the band-pass modulator working at each center frequency in Simulink environment is simulated, and the high performance is realized. Based on the simulation of Simulink environment, each module of band-pass modulator is designed by using the process conditions of 0.5um CMOS. The operational amplifier, quantizer circuit, phase compensation circuit, DAC circuit, clock signal generation circuit are designed. The reference circuit and the resonator circuit are simulated, and the key resonator circuit is realized in the form of switched capacitor circuit. The overall simulation results at the circuit level show that the noise base can be suppressed to -120 dB at 4KHZ / 6KHZ / 8KHZ / 10KHZ / 10KHZ / 12KHZ, and the effective bit number is above 10bit.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN761
本文编号：2378059
[Abstract]:With the development of semiconductor technology and integrated circuit technology, digital silicon gyroscope plays a more and more important role in many fields. Digital silicon gyroscope is a silicon structure obtained by using MEMS miniaturization, which can be used for sensitive acceleration. Because the usual acceleration signal is usually reflected by the mechanical displacement in the silicon structure, reading the mechanical displacement and converting it into a digital signal which can be processed by the digital circuit has become the main function of the interface circuit of the digital silicon gyroscope. At present, the research of interface circuit of digital silicon gyroscope is the research hotspot of research institute and university, but the current digital silicon gyroscope often has the shortcoming of high sampling rate and high power consumption. The signal processing of digital silicon gyroscope using band-pass modulator structure is of great significance in reducing power consumption and suppressing noise. In this paper, the principle of sensitive acceleration of digital silicon gyroscope is analyzed, and the basic principle of modulation signal of sigma-delta modulator is analyzed, that is, over-sampling modulator can reduce the in-band noise and improve the signal-to-noise ratio by increasing the sampling frequency. Because the central frequency of the band-pass modulator can be modulated by changing the key parameters and changing the zero point of the noise transfer function, a band-pass modulator is designed. After modeling digital silicon gyroscope and band-pass modulator in mathematical behavior level, the band-pass modulator working at each center frequency in Simulink environment is simulated, and the high performance is realized. Based on the simulation of Simulink environment, each module of band-pass modulator is designed by using the process conditions of 0.5um CMOS. The operational amplifier, quantizer circuit, phase compensation circuit, DAC circuit, clock signal generation circuit are designed. The reference circuit and the resonator circuit are simulated, and the key resonator circuit is realized in the form of switched capacitor circuit. The overall simulation results at the circuit level show that the noise base can be suppressed to -120 dB at 4KHZ / 6KHZ / 8KHZ / 10KHZ / 10KHZ / 12KHZ, and the effective bit number is above 10bit.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN761
【参考文献】
相关博士学位论文 前1条
1 刘云涛;电容式SIGMA-DELTA微加速度计接口ASIC芯片研究[D];哈尔滨工业大学;2010年
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