基于QPD的多自由度光学测头研发及应用
发布时间：2018-12-20 10:07
【摘要】：随着科学研究的发展,科学实验和工业生产对多自由度测量技术提出了高精度和适用性的需求。多自由度测量技术已非一般机械式传感器所能解决,目前广泛研究的多自由度测量系统如激光干涉仪等由于成本高昂、体积大、装配复杂等原因限制了其广泛应用,因此设计出一种造价低、结构简单、体积小、精度高的多自由度误差测量传感器显得十分必要。本文在国家自然科学基金重大项目“功能形面结构与性能的耦合建模与影响机理研究”(项目编号:51490660/51490661)的支持下,研究一种基于QPD组件和半导体激光器的光学非接触式测量装置,最多能够实现四个自由度误差(X、Y方向直线度误差、偏摆角和俯仰角)的同时测量。本文首先阐述了国内外在多自由度测量传感器研究领域的发展状况,对基于各种测量方法的多自由度测量技术进行了比较。然后设计了基于光电自准直原理的四个自由度误差(X、Y方向直线度误差、偏摆角和俯仰角)的同时测量系统,该系统在自准直原理的基础上分离出了一束测量二维位移的基准光束。分析了角度测量对位移测量的误差影响,并提出了解决的办法,实现误差分离。根据方案搭建了相应的光路、设计了合理的机械结构、完成了硬件电路和上位机软件的编写。通过对传感器的标定试验,X方向和Y方向位移在±200μm范围内测量精度在1μm左右,偏摆角的测量精度能够达到2″,俯仰角的测量精度能够达到3″(在800″量程范围内)。此外还建立了角度偏转对位移影响的误差模型,实现了位移测量和角度测量的误差分离。最后将标定好的传感器用于测量机床主轴系统的热误差实验当中。
[Abstract]:With the development of scientific research, scientific experiments and industrial production require high accuracy and applicability of multi-degree-of-freedom measurement technology. The measurement technology of multi-degree of freedom can not be solved by general mechanical sensor. At present, the widely studied multi-degree of freedom measurement system, such as laser interferometer, is widely used because of its high cost, large volume and complicated assembly. Therefore, it is necessary to design a low cost, simple structure, small volume and high precision multi-degree-of-freedom error measurement sensor. This paper is supported by the important project of the National Natural Science Foundation of China, "Research on the Coupling Modeling and influence Mechanism of the structure and performance of functional surfaces" (Project No.: 51490660 / 51490661). An optical non-contact measuring device based on QPD module and semiconductor laser is studied. It can realize simultaneous measurement of four degrees of freedom errors (XY direction straightness error, deflection angle and pitch angle) at most. In this paper, the development of multi-degree-of-freedom measurement sensors at home and abroad is described, and the multi-degree of freedom measurement techniques based on various measurement methods are compared. Based on the principle of photoelectric autocollimation, the simultaneous measurement system of four degrees of freedom errors (XY direction straightness error, deflection angle and pitch angle) is designed. Based on the principle of autocollimation, a reference beam for measuring two-dimensional displacement has been separated. The influence of angle measurement on displacement measurement error is analyzed, and the solution is put forward to realize error separation. According to the scheme, the corresponding optical circuit is built, the reasonable mechanical structure is designed, and the hardware circuit and upper computer software are written. Through the calibration test of the sensor, the measuring accuracy of the displacement in the X and Y directions is about 1 渭 m in the range of 卤200 渭 m, the accuracy of the yaw angle can reach 2 ", and the measurement accuracy of the pitch angle can reach 3" (within 800 "range). In addition, the error model of the influence of angle deflection on displacement is established, and the error separation between displacement measurement and angle measurement is realized. Finally, the calibrated sensor is used to measure the thermal error of machine tool spindle system.
【学位授予单位】：合肥工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TH744.5
本文编号：2387840
[Abstract]:With the development of scientific research, scientific experiments and industrial production require high accuracy and applicability of multi-degree-of-freedom measurement technology. The measurement technology of multi-degree of freedom can not be solved by general mechanical sensor. At present, the widely studied multi-degree of freedom measurement system, such as laser interferometer, is widely used because of its high cost, large volume and complicated assembly. Therefore, it is necessary to design a low cost, simple structure, small volume and high precision multi-degree-of-freedom error measurement sensor. This paper is supported by the important project of the National Natural Science Foundation of China, "Research on the Coupling Modeling and influence Mechanism of the structure and performance of functional surfaces" (Project No.: 51490660 / 51490661). An optical non-contact measuring device based on QPD module and semiconductor laser is studied. It can realize simultaneous measurement of four degrees of freedom errors (XY direction straightness error, deflection angle and pitch angle) at most. In this paper, the development of multi-degree-of-freedom measurement sensors at home and abroad is described, and the multi-degree of freedom measurement techniques based on various measurement methods are compared. Based on the principle of photoelectric autocollimation, the simultaneous measurement system of four degrees of freedom errors (XY direction straightness error, deflection angle and pitch angle) is designed. Based on the principle of autocollimation, a reference beam for measuring two-dimensional displacement has been separated. The influence of angle measurement on displacement measurement error is analyzed, and the solution is put forward to realize error separation. According to the scheme, the corresponding optical circuit is built, the reasonable mechanical structure is designed, and the hardware circuit and upper computer software are written. Through the calibration test of the sensor, the measuring accuracy of the displacement in the X and Y directions is about 1 渭 m in the range of 卤200 渭 m, the accuracy of the yaw angle can reach 2 ", and the measurement accuracy of the pitch angle can reach 3" (within 800 "range). In addition, the error model of the influence of angle deflection on displacement is established, and the error separation between displacement measurement and angle measurement is realized. Finally, the calibrated sensor is used to measure the thermal error of machine tool spindle system.
【学位授予单位】：合肥工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TH744.5
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