基于跑道型谐振腔固支梁式加速度传感器的理论研究
发布时间：2018-12-26 06:32
【摘要】：微纳光纤既不同于普通的光纤,也不同于集成光波导,是一种由空气为包层、二氧化硅等材料为芯层的光纤。这种微纳光纤由于本身所具有的大比例倏逝波传输,使得其具有强倏逝波耦合、低弯曲损耗、高色散区等特性。相比较于普通光纤,微纳光纤尺寸更小、损耗更低、耦合强度更强;相比较于集成光波导,微纳光纤的制作工艺更为简单可行。并且,由微纳光纤构成的环形谐振腔具有低损耗和品质因数高的特点,从而微纳光纤环形谐振腔可以作为一种高灵敏度的光学传感器。微纳光纤与硅MEMS传感结构相结合构成的MOEMS加速度传感器是一种体积小、质量轻、灵敏度高且动态范围大的加速度传感器。主要工作为:先对本课题的研究背景及意义进行了简要的介绍,对微纳光纤的发展现状、环形谐振腔的应用领域以及基于微纳光纤环形谐振腔加速度传感器的研究现状进行了简要的分析。之后在对微纳光纤模式及能量分布分析的基础上对微纳光纤环形谐振腔的相关理论及特性进行了分析,并重点分析了自耦合系数t、传输损耗因子τ以及微环有效折射率n对微纳光纤环形谐振腔传输特性的影响。提出了一种基于新型的微纳光纤跑道型谐振腔的双端固支梁加速度传感器:分析了跑道型谐振腔的传输理论和谐振原理、双端固支梁的受力、传感器的传感原理、传感器的灵敏度。对跑道型谐振腔在不同有效折射率下的光场分布图和双端固支梁的模态进行了仿真,验证了可以通过检测波长漂移和光强度的方式实现对加速度的测量,并通过MATLAB仿真软件对这两种检测方法进行了具体的仿真分析,得出固支梁的结构参数是影响传感器灵敏度的重要因素。本文最后对微纳光纤以及微纳光纤跑道型谐振腔的实验制备过程进行了简要的介绍。采用酒精熔融拉制法制备了直径约为2μm的微纳光纤,且用此微纳光纤制备了跑道型谐振腔,阐述了具体的制备过程以及需要注意的事项。并验证了微纳光纤跑道型谐振腔的光谱特性与理论分析所得基本一致。
[Abstract]:Micro-nano fiber is not only different from ordinary optical fiber, but also different from integrated optical waveguide. It is a kind of fiber with air as cladding and silicon dioxide as core layer. Due to its large proportion of evanescent wave transmission, the micro-nano fiber has the characteristics of strong evanescent wave coupling, low bending loss and high dispersion region. Compared with ordinary optical fiber, micro-nano fiber is smaller in size, lower in loss and stronger in coupling strength. Compared with integrated optical waveguide, the fabrication process of micro-nano fiber is simpler and more feasible. Furthermore, the ring resonator composed of micro-nano fiber has the characteristics of low loss and high quality factor, so the micro-nano fiber ring resonator can be used as an optical sensor with high sensitivity. The MOEMS accelerometer, which is composed of micro-nano fiber and silicon MEMS sensor structure, is a kind of acceleration sensor with small volume, light weight, high sensitivity and wide dynamic range. The main work is as follows: firstly, the research background and significance of this subject are briefly introduced, and the development status of micro-nano fiber is introduced. The application field of ring resonator and the research status of accelerometer based on micro-nano fiber ring resonator are briefly analyzed. Then, based on the analysis of the mode and energy distribution of micro-nano fiber, the related theory and characteristics of micro-nano fiber ring resonator are analyzed, and the self-coupling coefficient t _ (2) is emphatically analyzed. The effects of transmission loss factor 蟿 and effective refractive index n of microring on the propagation characteristics of micro nano fiber ring resonator. In this paper, a new type of accelerometer based on micro and nano fiber optic racetrack resonator is proposed. The transmission theory and resonant principle of runway resonator, the force acting on double end fixed beam, the sensing principle of sensor are analyzed. The sensitivity of the sensor. The field distribution of the racetrack resonator at different effective refractive index and the mode of the double-end clamped beam are simulated. It is proved that the acceleration can be measured by detecting the wavelength drift and the light intensity. The two methods are simulated and analyzed by MATLAB simulation software. It is concluded that the structural parameters of the clamped beam are the important factors affecting the sensitivity of the sensor. Finally, the fabrication process of micro-nano fiber and micro-nano fiber racetrack resonator is briefly introduced. The micro-nano fiber with diameter of about 2 渭 m was prepared by alcohol melt drawing method, and the raceway resonator was fabricated by the micro-nano fiber. The preparation process and the matters needing attention were described. The spectral characteristics of the micro-nano fiber racetrack resonator are in good agreement with the theoretical analysis.
【学位授予单位】：燕山大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TP212;TN253
本文编号：2391665
[Abstract]:Micro-nano fiber is not only different from ordinary optical fiber, but also different from integrated optical waveguide. It is a kind of fiber with air as cladding and silicon dioxide as core layer. Due to its large proportion of evanescent wave transmission, the micro-nano fiber has the characteristics of strong evanescent wave coupling, low bending loss and high dispersion region. Compared with ordinary optical fiber, micro-nano fiber is smaller in size, lower in loss and stronger in coupling strength. Compared with integrated optical waveguide, the fabrication process of micro-nano fiber is simpler and more feasible. Furthermore, the ring resonator composed of micro-nano fiber has the characteristics of low loss and high quality factor, so the micro-nano fiber ring resonator can be used as an optical sensor with high sensitivity. The MOEMS accelerometer, which is composed of micro-nano fiber and silicon MEMS sensor structure, is a kind of acceleration sensor with small volume, light weight, high sensitivity and wide dynamic range. The main work is as follows: firstly, the research background and significance of this subject are briefly introduced, and the development status of micro-nano fiber is introduced. The application field of ring resonator and the research status of accelerometer based on micro-nano fiber ring resonator are briefly analyzed. Then, based on the analysis of the mode and energy distribution of micro-nano fiber, the related theory and characteristics of micro-nano fiber ring resonator are analyzed, and the self-coupling coefficient t _ (2) is emphatically analyzed. The effects of transmission loss factor 蟿 and effective refractive index n of microring on the propagation characteristics of micro nano fiber ring resonator. In this paper, a new type of accelerometer based on micro and nano fiber optic racetrack resonator is proposed. The transmission theory and resonant principle of runway resonator, the force acting on double end fixed beam, the sensing principle of sensor are analyzed. The sensitivity of the sensor. The field distribution of the racetrack resonator at different effective refractive index and the mode of the double-end clamped beam are simulated. It is proved that the acceleration can be measured by detecting the wavelength drift and the light intensity. The two methods are simulated and analyzed by MATLAB simulation software. It is concluded that the structural parameters of the clamped beam are the important factors affecting the sensitivity of the sensor. Finally, the fabrication process of micro-nano fiber and micro-nano fiber racetrack resonator is briefly introduced. The micro-nano fiber with diameter of about 2 渭 m was prepared by alcohol melt drawing method, and the raceway resonator was fabricated by the micro-nano fiber. The preparation process and the matters needing attention were described. The spectral characteristics of the micro-nano fiber racetrack resonator are in good agreement with the theoretical analysis.
【学位授予单位】：燕山大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TP212;TN253
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