高速多线切割机控制系统的研究与开发

发布时间：2019-03-03 18:17

【摘要】：集成电路、光伏和半导体照明产业是我国战略性产业之一。多线切割技术是太阳能光伏发电、大规模集成电路等电子产业中基片加工的创新性核心工艺和主流技术,可以大幅度提高出片率、切片质量和生产效率。多线切割机控制系统复杂,控制精度要求非常高。目前国内多线切割机产品大部分依赖从国外进口,多线切割机的核心控制技术已成为制约国内多线切割机市场发展的技术瓶颈。多电机速度同步系统和张力系统是控制系统研究的重点和难点。本文针对多电机速度同步控制和张力控制等关键技术进行了理论分析与实际开发,对国内多线切割机控制系统的设计、开发和调试提供了一些理论依据,具有一定的理论意义和实际应用价值。本课题以实验室原有多线切割机样机为研究对象,设计了一套高精度、高速度的控制系统。具体研究内容和成果如下:(1)分析介绍了多线切割机的工作原理及其走线系统结构,提出了控制系统总体方案设计,并分别建立了多电机同步系统、线辊半径模型、张力系统数学模型,为控制方案的设计提供理论基础;(2)针对速度同步系统,根据机电伺服理论建立了合理准确的伺服电机数学模型,并分别设计了基于PID和模糊自适应PID的速度同步跟随控制方案,并进行仿真。仿真结果表明,基于模糊自适应PID的速度同步控制方案更优,控制精度高,收放线辊电机与加工辊电机同步情况良好;(3)针对张力控制系统,为了减小张力波动幅度,分析了切割线张力产生机理,设计了基于张力传感器的张力反馈控制方案,并优化了走线过程中速度换向的控制策略,同时针对样机排线机构,设计了基于开关限位的排线方案。排线试验结果表明,线辊排线较为均匀,排线效果良好;(4)在理论分析基础上,设计了控制系统硬件方案以及相应控制程序,并对部分功能的程序设计进行了介绍;最后进行了样机运行试验,各项性能实测均达到了设计指标:线速度误差在0.8m/min以内,张力摆杆角位移在5o以内,切割线张力波动低于2.5N。
[Abstract]:Integrated circuit, photovoltaic and semiconductor lighting industry is one of the strategic industries in China. Multi-wire cutting technology is the innovative core technology and mainstream technology of substrate processing in the electronic industry such as solar photovoltaic power generation and large scale integrated circuit. It can greatly improve the chip rate, chip quality and production efficiency. The control system of multi-wire cutting machine is complex, and the control precision is very high. At present, most of the domestic multi-wire cutting machine products are imported from abroad. The core control technology of the multi-wire cutting machine has become the technical bottleneck restricting the development of the domestic multi-wire cutting machine market. Multi-motor speed synchronization system and tension system are the focus and difficulty in the research of control system. In this paper, the theoretical analysis and practical development of the key technologies such as synchronous speed control and tension control of multi-motor are carried out, which provides some theoretical basis for the design, development and debugging of the control system of multi-wire cutting machine in China. It has certain theoretical significance and practical application value. In this paper, a set of high precision and high speed control system is designed, which takes the original multi-wire cutting machine prototype of laboratory as the research object. The concrete research contents and achievements are as follows: (1) the working principle and structure of multi-wire cutting machine are analyzed and introduced, the overall scheme design of the control system is put forward, and the multi-motor synchronous system and the radius model of wire roller are established, respectively. The mathematical model of tension system provides a theoretical basis for the design of control scheme. (2) for the speed synchronization system, a reasonable and accurate mathematical model of the servo motor is established according to the electro-mechanical servo theory, and the speed synchronization following control scheme based on PID and fuzzy adaptive PID is designed, and the simulation is carried out. The simulation results show that the speed synchronization control scheme based on fuzzy adaptive PID is better, the control precision is high, and the speed synchronization between the up-and-out roller motor and the machining roll motor is good. (3) for the tension control system, in order to reduce the amplitude of tension fluctuation, the mechanism of tension generation in cutting line is analyzed, the tension feedback control scheme based on tension sensor is designed, and the control strategy of speed commutation in the course of moving line is optimized. At the same time, aiming at the line arrangement mechanism of the prototype, the line arrangement scheme based on the switch limit is designed. The results of line arrangement test show that the line roller arrangement is more uniform and the line arrangement effect is good. (4) on the basis of theoretical analysis, the hardware scheme of the control system and the corresponding control program are designed, and the program design of some functions is introduced. The test results show that the linear velocity error is less than 0.8m/min, the angular displacement of tension swing rod is less than 5o, and the fluctuation of cutting line tension is less than 2.5N.
【学位授予单位】：浙江工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN405;TP273

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