数字光刻物镜设计与毛化微加工调Q改进技术研究

发布时间：2019-03-15 07:52

【摘要】：随着高清手机、超级电脑、多功能电视的普及,印刷电路板(PCB)、薄膜晶体管显示器(TFT-LCD)、氧化铟锡导电玻璃(ITO)的高精度光刻变得尤为关键,这使得与之相匹配的数字无掩膜光刻系统的研究和开发就变得十分重要。另外,随着食品包装产业、高档家电产业、高级汽车产业的兴盛,市场对于毛化过后表面性能优良的冷轧金属板材需求量与日俱增,为了获得性能更加优良的各类冷轧薄板,轧辊表面激光毛化系统的研究和升级改良成为目前企业亟需解决的问题。本文配合导师的国家自然基金项目和企业合作项目做了两方面的内容：前半部分从光刻的基础理论出发,分析了基于数字微反射镜器件(DMD)的无掩膜光刻系统的几个问题,设计了一套高分辨率的数字光刻用镜头；本文后半部分分析了传统声光调Q型YAG激光毛化系统的缺陷和不足,从双增益介质腔的稳定性出发,提出了新型机械调Q方法。针对当今市场上光刻线宽在3μm的高精度电路板和显示器的要求,通过采用0.7XGA型DMD芯片作为空间光调制器(SLM),设计了一套分辨率达到2gm的数字光刻投影物镜。通过利用光学设计软件ZEMAX对其进行建模、优化和质量评价,结果有效的减少了DMD栅格效应对空间数字掩模图形的影响,同时能够满足数字投影光刻系统的各项光学指标。本物镜从经典结构出发,提出采用一种新的非对称式结构,使用较少的透镜组成了一个具有较高分辨力、较大孔径的数字投影光刻镜头。本物镜系统在配合不同型号的DMD的基础上可以满足21μm以上的高精度数字光刻系统的各项要求,为高质量空间图像转移提供了一种高效可行的途径。针对如今企业对于固态脉冲YAG激光毛化轧辊高效率、高均匀性、高粗糙度、高无序性的要求,提出了光路变换加机械斩波调Q的新型脉冲激光毛化系统。由于传统声光调Q器件的自身特性决定了其高增益工作时衍射能力有限；脉冲能量低；脉宽窄,激光脉冲峰值过高；使得声光调Q激光毛化在高效率、高粗糙度领域的冷轧带钢生产上遇到了困难。这样的背景下提出：首先在双增益介质腔正中间用透镜对腔内光束整形,再通过斩波盘斩波的调Q方法。这种机械斩波调Q方法可以工作在激光腔的高增益状态；提高了脉冲能量；加大了脉宽,降低了脉冲峰值；使得这种新型激光毛化系统的工作效率高、粗糙度范围广。
[Abstract]:With the popularity of high-definition mobile phones, supercomputers and multi-functional televisions, high-precision photolithography of printed circuit board (PCB), thin-film transistor displays (TFT-LCD) and indium tin conductive glass (ITO) has become particularly critical. This makes it very important to research and develop the matching digital mask lithography system. In addition, with the prosperity of food packaging industry, high-grade household appliances industry and advanced automobile industry, the market demand for cold-rolled metal sheet with excellent surface performance after wool is increasing day by day. In order to obtain various kinds of cold-rolled sheet with better performance, The research and upgrading of laser texturing system on roll surface has become an urgent problem to be solved by enterprises at present. Based on the basic theory of lithography, several problems of the mask-free lithography system based on digital micro-mirror device (DMD) are analyzed in the first half of this paper, which is based on the national nature fund project and the enterprise cooperation project of the mentor, and the first half is based on the basic theory of photolithography. A set of high resolution lenses for digital lithography is designed. In the second half of this paper, the defects and shortcomings of the traditional acousto-optic Q-switched YAG laser texturing system are analyzed. Based on the stability of the double-gain dielectric cavity, a new mechanical Q-switching method is proposed. Aiming at the requirement of high precision circuit board and display with linewidth of 3 渭 m in today's market, a set of digital lithography projection lens with resolution up to 2gm is designed by using 0.7XGA DMD chip as spatial light modulator (SLM),. By using the optical design software ZEMAX to model, optimize and evaluate its quality, the results effectively reduce the influence of the DMD grid effect on the spatial digital mask pattern, and can meet the various optical indexes of the digital projection lithography system at the same time. Starting from the classical structure of the objective lens, a new asymmetrical structure is proposed. A digital projection lithography lens with higher resolution and larger aperture is constructed by using fewer lenses. The objective lens system can meet the requirements of high-precision digital lithography system above 21 渭 m on the basis of different types of DMD, and provides an efficient and feasible way for high-quality spatial image transfer. In order to meet the requirement of high efficiency, high uniformity, high roughness and high disorder of solid-state pulsed YAG laser wool roller, a new pulse laser texturing system based on optical path transformation and mechanical chopper Q-switching is proposed. Because of the characteristic of traditional acousto-optic Q-switching device, the diffraction ability is limited, the pulse energy is low, the pulse width is narrow and the peak value of laser pulse is too high. It is difficult for acousto-optic Q-switched laser texturing to produce cold rolled strip in the field of high efficiency and high roughness. Under this background, a Q-switched method is proposed, in which the intracavity beam is shaped by a lens in the middle of a double-gain dielectric cavity and then chopped by a chopper. The mechanical chopper Q-switching method can work in the high gain state of the laser cavity; improve the pulse energy; increase the pulse width and reduce the pulse peak value; make the new laser worming system work efficiently and have a wide range of roughness.
【学位授予单位】：广东工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN305.7

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